가스의 적외선 분광 분석방법 및 이것에 사용되는 장치
    74.
    发明授权
    가스의 적외선 분광 분석방법 및 이것에 사용되는 장치 失效
    红外光谱分析仪及其设备

    公开(公告)号:KR100186272B1

    公开(公告)日:1999-05-15

    申请号:KR1019950705235

    申请日:1995-03-22

    Abstract: A method and apparatus for measuring the concentration of a very small amount of impurities in an object gas by an infrared spectroscopic analysis using a semiconductor laser. In order to carry out the analysis with a high sensitivity and a high accuracy, an object gas is introduced into a sample cell (5) and the cell is evacuated by a vacuum pump (16). An infrared beam of a wavelength in a region in which a high absorption peak due to impurities appears is emitted from a semiconductor laser (1) and passed through the sample cell (5) and a reference sample cell (8) in which impurities alone are sealed to measure a differential value absorption spectrum. The impurities are identified by comparing the spectrum of the object gas with that of impurities alone and determining a plurality of absorption peaks concerning the impurities, and the quantity of the impurities is determined on the basis of the absorption intensity at the highest peak. When impurity gas molecules form clusters in the object gas, the light of not less than 0.5 eV is applied to the clusters to dissociate the same, and the analysis of the gas is then carried out. This invention is suitably utilized, especially, for analyzing a very small amount of impurities in a semiconductor material gas.

    가스의 레이저 분광을 위한 방법
    75.
    发明授权
    가스의 레이저 분광을 위한 방법 有权
    气体激光光谱法

    公开(公告)号:KR101580606B1

    公开(公告)日:2015-12-28

    申请号:KR1020140059199

    申请日:2014-05-16

    Applicant: 식아게

    Abstract: 분광계를이용하여샘플에서의가스(15)의농도및/또는가스(15)의조성을결정하는방법은: 파장이실질적으로연속적으로파장범위를통과하는방사(19)를전달하는단계 -여기서, 파장범위의연속적인통과는파장변조, 바람직하게는실질적으로조화파장변조에의해중첩됨- ; 상기가스(15)에의한상기방사(19)의흡수로부터흡수신호(29)를상기방사(19)의파장의함수로측정하는단계(27); 상기흡수신호(29)를제1 미분신호로변환하는단계(31); 상기제1 미분신호(33)로부터적어도하나의제1 측정가스농도값(39)을도출하는단계(37); 상기적어도하나의제1 측정가스농도값(39)으로부터상기가스(15)의농도및/또는조성(49)를결정하는단계(47)를포함하고, 상기파장변조는상기가스(15)의적어도하나의상태변수의변화에대응하여적응되며, 상기방법은: 상기흡수신호(29)를제2 미분신호(35)로변환하는단계(31); 상기제2 미분신호(35)로부터적어도하나의제2 측정가스농도값(41)을도출하는단계(37)를더 포함하는것을특징으로하고, 상기파장변조는, 상기제1 측정가스농도값(39)과상기제2 측정가스농도값(41)의비(43)가실질적으로일정하게유지되도록, 바람직하게는연속적으로, 순응되는(45) 것을특징으로한다.

    적외선 사광파 혼합 편광 이미징 장치
    76.
    发明授权
    적외선 사광파 혼합 편광 이미징 장치 失效
    用于红外四波混合极化显微镜的成像装置

    公开(公告)号:KR100829439B1

    公开(公告)日:2008-05-15

    申请号:KR1020070056085

    申请日:2007-06-08

    Inventor: 이재용 이은성

    CPC classification number: G02B21/0064 G01J3/433 G01N21/21 G01N21/23 G01N21/636

    Abstract: A polarization imaging device is provided to improve a space resolution of a microscope by extracting a non-linear vibration polarization signal using a short-wavelength probe beam. A pump source(10) and a probe source(20) generate pump and probe beams, respectively. Polarizers(11,21) linearly polarize the pump and probe beams. A beam combiner(30) temporally synchronizes the pump and probe beams and guides the beams on the same axis. A scanner(40) scans the beams on a plane. An optical focusing system(50) focuses the beams on a test material. A collecting optical system(60) collects beams, which are phase-shifted due to a birefringence, to generate a parallel beam. A beam splitter(70) removes an IR(InfraRed) pump beam from the parallel beam and separates an anisotropy phase-shifted probe beam. A polarizing beam splitter(80) converts the separated probe beam to a linear polarizing beam having normal axial components. Light detectors(91,92) detect a magnitude of the linear polarizing beam. A polarization difference detector(100) detects a polarization difference due to a magnitude of the detected linear polarizing beam. A data analyzer(110) collects the polarization difference and generates and extracts a polarizing signal according to a molecular vibration resonance intensity.

    Abstract translation: 提供偏振成像装置,通过使用短波长探针光束提取非线性振动偏振信号来提高显微镜的空间分辨率。 泵浦源(10)和探测源(20)分别产生泵浦和探针。 偏振器(11,21)使泵和探头光束线性偏振。 光束组合器(30)在时间上同步泵和探针光束并将光束引导在相同的轴上。 扫描器(40)在平面上扫描光束。 光学聚焦系统(50)将光束聚焦在测试材料上。 收集光学系统(60)收集由于双折射而相移的光束以产生平行光束。 分束器(70)从平行光束去除IR(红外)泵浦光束并分离各向异性相移探测光束。 偏振分束器(80)将分离的探针光束转换成具有正常轴向分量的线性偏振光束。 光检测器(91,92)检测线偏振光束的大小。 偏振差检测器(100)检测由于检测到的线偏振光束的大小引起的偏振差。 数据分析器(110)收集偏振差,并根据分子振动共振强度产生和提取偏振信号。

    藉路徑調變恢復振幅及相位之系統及方法 SYSTEM AND METHOD FOR MAGNITUDE AND PHASE RETRIEVAL BY PATH MODULATION
    78.
    发明专利
    藉路徑調變恢復振幅及相位之系統及方法 SYSTEM AND METHOD FOR MAGNITUDE AND PHASE RETRIEVAL BY PATH MODULATION 审中-公开
    藉路径调制恢复振幅及相位之系统及方法 SYSTEM AND METHOD FOR MAGNITUDE AND PHASE RETRIEVAL BY PATH MODULATION

    公开(公告)号:TW201209388A

    公开(公告)日:2012-03-01

    申请号:TW100105867

    申请日:2011-02-22

    IPC: G01N

    CPC classification number: G01J3/42 G01J3/433 G01N21/3581 G01N21/41

    Abstract: 一種系統,包括傳輸器被配置用以將電磁信號經由樣本胞元(包括樣本媒介)傳輸至接收器,該接收器被配置用以接收該電磁信號以及用以與其混合的另一個電磁信號。該信號傳至該傳輸器以及接收器的傳播路徑包括該電磁信號至該傳輸器的第一傳播路徑,以及該另一個電磁信號至該接收器的第二傳播路徑。沿著信號至該傳輸器以及接收器之傳播路徑的其中一個或每一個而被設置的該排列被配置用以改變分別傳播路徑的長度。以及該處理器被配置用以恢復所傳輸之電磁信號的振幅以及相位,以及以所傳輸之電磁信號的振幅以及相位為函數而計算該樣本媒介的複折射指數。

    Abstract in simplified Chinese: 一种系统,包括传输器被配置用以将电磁信号经由样本胞元(包括样本媒介)传输至接收器,该接收器被配置用以接收该电磁信号以及用以与其混合的另一个电磁信号。该信号传至该传输器以及接收器的传播路径包括该电磁信号至该传输器的第一传播路径,以及该另一个电磁信号至该接收器的第二传播路径。沿着信号至该传输器以及接收器之传播路径的其中一个或每一个而被设置的该排列被配置用以改变分别传播路径的长度。以及该处理器被配置用以恢复所传输之电磁信号的振幅以及相位,以及以所传输之电磁信号的振幅以及相位为函数而计算该样本媒介的复折射指数。

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