公开(公告)号：US11733172B2

公开(公告)日：2023-08-22

申请号：US17313703

申请日：2021-05-06

Applicant: KLA Corporation

Inventor： Anatoly Romanovsky ,  Jenn-Kuen Leong ,  Daniel Kavaldjiev ,  Chunhai Wang ,  Bret Whiteside ,  Zhiwei Xu

IPC: G01N21/88

CPC classification number: G01N21/8806 ,  G01N2021/8822 ,  G01N2201/063

Abstract: A dark-field optical system may include a rotational objective lens assembly with a dark-field objective lens to collect light from a sample within a collection numerical aperture, where the dark-field objective lens includes an entrance aperture and an exit aperture at symmetrically-opposed azimuth angles with respect to an optical axis, a rotational bearing to allow rotation of at least a part of the dark-field objective lens including the entrance aperture and the exit aperture around the optical axis, and a rotational driver to control a rotational angle of the entrance aperture. The system may also include a multi-angle illumination sub-system to illuminate the sample with an illumination beam through the entrance aperture at two or more illumination azimuth angles, where an azimuth angle of the illumination beam on the sample is selectable by rotating the objective lens to any of the two or more illumination azimuth angles.

公开(公告)号：US20230221259A1

公开(公告)日：2023-07-13

申请号：US17998207

申请日：2021-04-19

Applicant: Analytik Jena GmbH

Inventor： Stefan Hanitsch ,  Meike Hofmann

IPC: G01N21/76

CPC classification number: G01N21/766 ,  G01N2201/063

Abstract: A device for chemiluminescence analysis includes: a reaction chamber; a first inlet opening for introducing a sample gas into the reaction chamber via a first supply line; a second inlet opening for introducing a reaction gas into the reaction chamber via a second supply line; an outlet opening for discharging a mixture of the sample gas and the reaction gas out of the reaction chamber via an outlet line; a mixer unit in which the sample gas and the reaction gas are mixed; and a sensor unit for detecting chemiluminescent radiation in the reaction chamber, wherein the mixer unit is arranged in a first end region of the reaction chamber, and the sensor unit is arranged in a second end region of the reaction chamber opposite the first end region. An elemental analyzer including the device is also disclosed.

公开(公告)号：US20180356338A1

公开(公告)日：2018-12-13

申请号：US15778447

申请日：2016-11-18

Applicant: NEC CORPORATION

Inventor： Akihiro TANAKA

IPC: G01N21/3504

CPC classification number: G01N21/3504 ,  G01N21/39 ,  G01N2201/061 ,  G01N2201/063 ,  G01N2201/0833

Abstract: In order to perform gas detection at multiple locations with a simple configuration and at a low cost, the gas detection device is provided with: a transmission unit for outputting to a transmission path, as a first optical signal, pulse light that has a temporally changing wavelength and that is generated by pulse light modulated by an optical wavelength modulator; and a reception unit for receiving a second optical signal output from a sensor head outputting the first optical signal propagated through the atmosphere as the second optical signal, converting the second optical signal received into an electric the signal detecting, by each sensor head, a predetermined type of gas contained in the atmosphere based on a temporal change in amplitude of the electric signal, and outputting a result of detection of the gas.

公开(公告)号：US10082466B2

公开(公告)日：2018-09-25

申请号：US15138660

申请日：2016-04-26

Applicant: Molecular Devices, LLC

Inventor： Josef J. Atzler ,  Michael Katzlinger ,  Klaus Wagner

IPC: G01N21/64

CPC classification number: G01N21/6428 ,  G01N21/6408 ,  G01N21/6445 ,  G01N21/645 ,  G01N2021/174 ,  G01N2201/061 ,  G01N2201/063

Abstract: In an optical-based sample analysis, for example fluorescence-based or absorbance-based measurement, a selection is made between a first excitation light path and a second excitation light path. The first excitation light path directs excitation light from a light source, through an excitation monochromator, through an excitation filter, and to a sample. The second excitation light path directs excitation light from the light source, through the excitation filter, and to the sample while bypassing the excitation monochromator. Excitation light generated by the light source is transmitted along either the first excitation light path or the second excitation light path in accordance with the selection made, thereby irradiating the sample. In response the sample produces emission light (transmitted light in the case of absorbance measurements), which is transmitted to and measured by a light detector.

公开(公告)号：US20180172594A1

公开(公告)日：2018-06-21

申请号：US15845754

申请日：2017-12-18

Applicant: Abbott Japan Co., LTD.

Inventor： Tomohiro Ikeda

IPC: G01N21/75 ,  G01N33/543 ,  G01N21/64

CPC classification number: G01N21/75 ,  G01N21/64 ,  G01N33/54366 ,  G01N2201/0621 ,  G01N2201/063

Abstract: A compact optical imaging system including a single filter and a light source that provides lateral illumination for bead detection in digital assays. The light source is configured to emit light toward the detection vessel. The single filter is positioned to receive light reflected from a sample in the detection vessel, that originated from the light source, and receive an output from a sample in the detection vessel. A detector is configured to receive a portion of the reflected light and a portion of the output that passes through the single filter.

公开(公告)号：US20180149855A1

公开(公告)日：2018-05-31

申请号：US15568770

申请日：2016-04-22

Applicant: The University of British Columbia

Inventor： Keng C. CHOU ,  Reza TAFTEH

IPC: G02B21/26 ,  G06T7/70 ,  G01N21/64 ,  G02B21/16 ,  G02B21/24 ,  G02B21/36 ,  G02B27/32 ,  G02B21/34

CPC classification number: G02B21/26 ,  G01N21/6458 ,  G01N2021/6463 ,  G01N2201/063 ,  G02B3/14 ,  G02B21/06 ,  G02B21/16 ,  G02B21/241 ,  G02B21/244 ,  G02B21/34 ,  G02B21/361 ,  G02B21/367 ,  G02B27/0075 ,  G02B27/32 ,  G06T7/70 ,  G06T2207/10056 ,  G06T2207/10064 ,  G06T2207/30204

Abstract: Methods and apparatus for deep microscopic super resolution imaging use two independent and variable focal planes. Movements of fiducial markers imaged using one focal plane are monitored and used to provide real-time or near real-time correction for sample drift. A second focal plane may be used to collect light for super-resolution imaging of a sample. A prototype embodiment has produced low drift when imaging many microns deeper than the fiducial markers.

公开(公告)号：US09921148B2

公开(公告)日：2018-03-20

申请号：US14786144

申请日：2014-04-20

Applicant: MOBILEODT LTD

Inventor： David Levitz ,  Ariel Beery

IPC: G01J4/00 ,  G01N21/21 ,  G01N21/956

CPC classification number: G01N21/21 ,  G01N21/956 ,  G01N2201/063

Abstract: A polarized light imaging apparatus is provided. In an embodiment, the apparatus comprises a light source for producing light beams; an illumination optic coupled to the light source for guiding the light beams towards the sample; a linear polarizer coupled to the illumination optic and configured to produce a linearly polarized light towards the sample respective of the light beams; a TIR birefringent polarizing prism (BPP) coupled to the sample to maximize a refraction difference between ordinary waves and extraordinary waves of light returning from the sample; and a detection optic unit coupled to the non-TIR BPP for guiding the light waves returning from the sample towards a single polarization sensitive sensor element (SE), the SE is configured to capture at least one frame of the sample respective of the light waves returning from the superficial single-scattering layer of the sample apart from the deeper diffuse layer.

公开(公告)号：US09829441B2

公开(公告)日：2017-11-28

申请号：US15023112

申请日：2014-11-27

Applicant: NEXTIN, INC. ,  SAMSUNG ELECTRONICS CO., LTD.

Inventor： Tae Hoon Park ,  Segal Ram

IPC: G01N21/00 ,  G01N21/88 ,  G01N21/95 ,  H01L21/66

CPC classification number: G01N21/8851 ,  G01N21/8806 ,  G01N21/9501 ,  G01N2021/8887 ,  G01N2201/063 ,  H01L22/12

Abstract: ProA wafer image inspection apparatus for inspecting defects of a semiconductor wafer comprises: a lighting portion for generating light; a lens portion for obtaining a wafer image, which is reflected after the light has been reflected onto a wafer to be inspected, and delivering the wafer image by lighting same in one direction; a dividing optical element for dividing the wafer image delivered from the lens portion; an image detection portion comprising a plurality of image-capturing elements, which are installed so that images which have passed through the lens portion and the dividing optical element are respectively formed on different focus positions; and an image processing portion for combining the images on different focus positions captured by the plurality of image pick-up elements to form a TSOM image, and comparing the TSOM image with a TSOM image of a normal semiconductor apparatus part to determine whether an object is defective.

公开(公告)号：US09739600B1

公开(公告)日：2017-08-22

申请号：US15184034

申请日：2016-06-16

Applicant: FOGALE NANOTECH

Inventor： Gilles Fresquet ,  Alain Courteville ,  Philippe Gastaldo

IPC: G01N21/00 ,  G01B11/22 ,  G01N21/95

CPC classification number: G01N21/9501 ,  G01B11/022 ,  G01B11/0608 ,  G01B11/22 ,  G01B11/245 ,  G01B2210/50 ,  G01B2210/56 ,  G01J3/0208 ,  G01J3/0218 ,  G01J3/18 ,  G01J3/453 ,  G01N21/8851 ,  G01N21/956 ,  G01N2201/063 ,  G01N2201/0833 ,  G01N2201/105 ,  G02B21/0064 ,  H01L22/12

Abstract: A confocal chromatic device for inspecting the surface of an object such as a wafer, including a plurality of optical measurement channels with collection apertures arranged for collecting the light reflected by the object through a chromatic lens at a plurality of measurement points, the plurality of optical measurement channels including optical measurement channels with an intensity detector for measuring a total intensity of the collected light. A method is also provided for inspecting the surface of an object such as a wafer including tridimensional structures.

公开(公告)号：US09606062B2

公开(公告)日：2017-03-28

申请号：US14374928

申请日：2013-09-02

Applicant: INDIAN INSTITUTE OF SCIENCE

Inventor： Siva Umapathy ,  Sanchita Sil ,  John Kiran

IPC: G01J3/44 ,  G01N21/65 ,  G01N21/51 ,  G01N33/22

CPC classification number: G01N21/65 ,  G01N21/51 ,  G01N33/227 ,  G01N2201/06113 ,  G01N2201/063

Abstract: The invention provides a method for detection of hazardous chemicals in a non-metallic container. The method comprises of irradiating the sample at a predefined location with an electromagnetic radiation of specific wavelength; selectively capturing a certain component of the scattered electromagnetic radiation to obtain a plurality of profiles; and filtering the profiles to obtain a signature specific to at least one hazardous chemical present in the container. The invention provides a system for obtaining a signature specific to the hazardous chemicals in the container.