STATIC INTERFERENCE TYPE ELLIPTIC POLARIMETER

    公开(公告)号:JPS61259127A

    公开(公告)日:1986-11-17

    申请号:JP8519586

    申请日:1986-04-15

    Inventor: JIORUJIO GUREGO

    Abstract: A static interferometric ellipsometer, wherein a source (3) generates a coherent light-beam with two monochromatic radiations at slightly different frequencies. A first photodetector (6) generates a first beat between the two radiations, to be used as reference. A second photodetector (9) generates a second beat between the two radiations, after they have been polarized in perpendicular planes and separated so that one of them is reflected onto the photodetector (9) by the sample under test (1,2). A measuring and computing system (11) determines the optical properties of said sample starting from the intensity of the second beat and from the relative phase between the two beats.

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