公开(公告)号：JP2013080251A

公开(公告)日：2013-05-02

申请号：JP2012281359

申请日：2012-12-25

Applicant: Sumitomo Osaka Cement Co Ltd ,  住友大阪セメント株式会社 ,  National Institute For Materials Science ,  独立行政法人物質・材料研究機構 ,  National Institute Of Information & Communication Technology ,  独立行政法人情報通信研究機構

Inventor： ICHIKAWA JUNICHIRO ,  HIKUMA KAORU ,  YAMAMOTO FUTOSHI ,  OIKAWA SATORU ,  MORI SHINGO ,  KURIMURA SUNAO ,  KITAMURA KENJI ,  KAWANISHI TETSUYA ,  TSUCHIYA MASAHIRO ,  IZUTSU MASAYUKI

IPC: G02F1/035 ,  G02F1/03

Abstract: PROBLEM TO BE SOLVED: To provide a nested modulator having a simplified circuit layout of modulation electrodes including signal electrodes and capable of operating at a reduced drive voltage.SOLUTION: A nested modulator includes a substrate 20 made of an electro-optical material, an optical waveguide formed on the substrate, and modulation electrodes for modulating a light wave propagating through the waveguide. The waveguide includes a main Mach-Zehnder waveguide 1 and sub Mach-Zehnder waveguides 2, 3 provided on two branch waveguides, and the modulation electrodes are provided on sub-branch waveguides of the sub Mach-Zehnder waveguides. A polarization reversal regions 46, 47 are formed on a portion of a sub-branch waveguide on the same side of each sub Mach-Zehnder waveguide and modulation electrodes, comprising a signal electrode and a ground electrode, are formed such that, for each sub Mach-Zehnder waveguide, signal electrodes 41, 44 branching off from a single signal injection electrode 40, 43 are laid out to act on both of the sub-branch waveguides and are merged together to be led out thereafter.

Abstract translation: 要解决的问题：提供一种嵌套调制器，其具有包括信号电极的调制电极的简化的电路布局，并且能够以降低的驱动电压进行操作。 解决方案：嵌套调制器包括由电光材料制成的衬底20，形成在衬底上的光波导和用于调制通过波导传播的光波的调制电极。 波导包括设置在两个分支波导上的主马赫 - 曾德尔波导1和次马赫 - 曾德尔波导2,3，并且调制电极设置在次马赫 - 曾德尔波导的子分支波导上。 在每个子马赫 - 曾德尔波导的同一侧的子分支波导的一部分上形成极化反转区域46,47，并且形成包括信号电极和接地电极的调制电极，使得对于每个子 马赫 - 策德尔波导，从单个信号注入电极40,43分支出的信号电极41,44布置成作用在两个子分支波导上并合并在一起以便被引出。 版权所有（C）2013，JPO＆INPIT

公开(公告)号：JP2013020029A

公开(公告)日：2013-01-31

申请号：JP2011152438

申请日：2011-07-11

Applicant: Sumitomo Osaka Cement Co Ltd ,  住友大阪セメント株式会社

Inventor： MOTOTANI MASAYUKI ,  ICHIKAWA JUNICHIRO

IPC: G02F1/035 ,  H01L21/66

Abstract: PROBLEM TO BE SOLVED: To provide a wafer having an inspection electrode that allows easy and accurate measurement of a refractive index of the electrode in a manufacturing process of a traveling wave optical modulator and allows formation of an inspection electrode required for an inspection with an even smaller electrode pattern, and a method for measuring a refractive index of the electrode.SOLUTION: A wafer having an inspection electrode comprises a wafer 1 having an electrooptic effect, a plurality of optical waveguides 2 and a plurality of traveling wave control electrodes and inspection electrodes (3, 31). The traveling wave control electrode is formed by arranging a signal electrode and a ground electrode along the optical waveguides and configured to travel an electric signal between the electrodes to control light propagating through the optical waveguides. The inspection electrodes are formed in part of the wafer. The inspection electrode has a resonance electrode (3, 31) drawn in the same drawing direction as the signal electrode.

Abstract translation: 要解决的问题：提供具有检查电极的晶片，其允许在行波光学调制器的制造过程中容易且精确地测量电极的折射率，并且允许形成检查所需的检查电极 具有更小的电极图案，以及用于测量电极的折射率的方法。 解决方案：具有检查电极的晶片包括具有电光效应的晶片1，多个光波导2和多个行波控制电极和检查电极（3,31）。 行波控制电极通过沿着光波导布置信号电极和接地电极而形成，并且被配置为在电极之间行进电信号，以控制通过光波导传播的光。 检查电极形成在晶片的一部分中。 检查电极具有以与信号电极相同的绘制方向绘制的谐振电极（3,31）。 版权所有（C）2013，JPO＆INPIT

公开(公告)号：JP2012247797A

公开(公告)日：2012-12-13

申请号：JP2012179164

申请日：2012-08-13

Applicant: Sumitomo Osaka Cement Co Ltd ,  住友大阪セメント株式会社

Inventor： HIKUMA KAORU ,  ICHIKAWA JUNICHIRO

IPC: G02F1/035

Abstract: PROBLEM TO BE SOLVED: To provide a light modulator capable of easily stabilizing a signal output by properly adjusting intensities of output signals entering the multiplexer of a light modulator having a plurality of Mach-Zehnder type waveguides combined into a nesting structure.SOLUTION: A light modulator includes: a substrate 3 having an electrooptical effect; an optical waveguide having a branch formed on the substrate and constituted by arranging a plurality of Mach-Zehnder type waveguides (11 to 14) in parallel and branching waveguides connected to input waveguides of the Mach-Zehnder type waveguides and the multiplexer where output waveguides from the Mach-Zehnder type waveguides join; and a modulation electrode for modulating an optical wave propagated in the optical waveguide. The light modulator is provided with Y-branch switches (51, 52) at least at one of positions at the branch, between the branch and an input waveguide of a Mach-Zehnder type waveguide to which the waveguide branching off from the branch is connected, or between the output waveguide of the Mach-Zehnder type waveguide and the multiplexer 36, branching ratios of the Y-branch switches being adjustable.

Abstract translation: 要解决的问题：提供一种光调制器，其能够通过适当调节进入具有组合到嵌套结构中的多个马赫 - 曾德尔型波导的光调制器的多路复用器的输出信号的强度来容易地稳定信号输出。 光调制器包括：具有电光效应的衬底3; 具有分支的光波导，其形成在基板上并且通过并联布置多个马赫 - 曾德尔型波导（11至14）并且连接到马赫 - 策德尔型波导的输入波导的分支波导和多路复用器，其中输出波导 马赫 - 曾德尔型波导连接; 以及用于调制在光波导中传播的光波的调制电极。 光调制器在至少分支位置的一个位置处设置有Y分支开关（51,52），分支与从分支分支的波导连接的马赫 - 曾德尔型波导的输入波导 ，或者在马赫曾德尔型波导的输出波导和多路复用器36之间，Y分支开关的分支比是可调节的。 版权所有（C）2013，JPO＆INPIT

公开(公告)号：JP2012098744A

公开(公告)日：2012-05-24

申请号：JP2011277340

申请日：2011-12-19

Applicant: Sumitomo Osaka Cement Co Ltd ,  住友大阪セメント株式会社

Inventor： HIKUMA KAORU ,  ICHIKAWA JUNICHIRO

IPC: G02F1/035 ,  G02B6/12

Abstract: PROBLEM TO BE SOLVED: To provide an optical waveguide element in which each optical waveguide has a plurality of optical waveguide parts arranged in parallel with each other, like a nest type optical waveguide, and crosstalk of modulation signals applied to respective optical waveguides can be effectively suppressed even in the case that the optical waveguide parts are closely arranged.SOLUTION: The optical waveguide element includes a substrate 1 having an electro-optic effect, optical waveguides 2-3 to 2-6 formed on the substrate, and modulation electrodes 3-1 to 3-2 for modulating light waves guided in the optical waveguides. Each optical waveguide has such a configuration that a plurality of optical waveguide parts are arranged in parallel with each other and an electric field from the modulation electrodes is applied to at least one optical waveguide part, and each optical waveguide part is a sub-Mach-Zehnder waveguide of a nest type optical waveguide. A distance between the optical waveguide parts is 300 μm or shorter, and grooves 10 are formed between the optical waveguide parts, and the grooves are formed between different sub-Mach-Zehnder waveguides.

Abstract translation: 要解决的问题：为了提供一种光波导元件，其中每个光波导具有彼此并联布置的多个光波导部件，如巢型光波导，以及施加到各个光波导的调制信号的串扰 即使在光波导部件紧密配置的情况下也能够被有效地抑制。 解决方案：光波导元件包括具有电光效应的基板1，形成在基板上的光波导2-3至2-6，以及调制电极3-1至3-2，用于调制在 光波导。 每个光波导具有这样的结构：多个光波导部件彼此并联布置，并且来自调制电极的电场被施加到至少一个光波导部分，并且每个光波导部分是子Mach- 巢式光波导的Zehnder波导。 光波导部分之间的距离为300μm或更短，并且在光波导部分之间形成槽10，并且在不同的子马赫 - 曾德尔波导之间形成凹槽。 版权所有（C）2012，JPO＆INPIT

公开(公告)号：JP2012068679A

公开(公告)日：2012-04-05

申请号：JP2011277341

申请日：2011-12-19

Applicant: Sumitomo Osaka Cement Co Ltd ,  住友大阪セメント株式会社

Inventor： HIKUMA KAORU ,  ICHIKAWA JUNICHIRO

IPC: G02F1/035 ,  G02B6/12

Abstract: PROBLEM TO BE SOLVED: To provide an optical waveguide element comprising an optical waveguide with a plurality of optical waveguide sections arranged parallel with each other as in the case of a nest type optical waveguide, capable of effectively restraining cross talk of a modulating signal applied to each optical waveguide even when the optical waveguide sections are arranged in close proximity to each other.SOLUTION: An optical waveguide element includes a substrate having an electrooptical effect, an optical waveguide formed on the substrate, and a modulating electrode for modulating light waves guided in the optical waveguide. The optical waveguide has a plurality of optical waveguide sections disposed in parallel with each other. An electric field of the modulating electrode is applied to at least one of the optical waveguide sections. The distance between the optical waveguide sections is 300 μm or less with a groove formed between the optical waveguide sections, and a conductive material fills or is adhered to the inside of the groove.

Abstract translation: 要解决的问题：为了提供一种光波导元件，其包括光波导，其具有如在巢式光波导的情况下彼此平行布置的多个光波导部分，能够有效地抑制调制的串扰 即使当光波导段彼此靠近地布置时也施加到每个光波导的信号。 解决方案：光波导元件包括具有电光效应的衬底，形成在衬底上的光波导和用于调制在光波导中引导的光波的调制电极。 光波导具有彼此平行设置的多个光波导部。 调制电极的电场被施加到至少一个光波导部分。 光波导路段之间的距离为300μm以下，在光波导路部之间形成有槽，导电材料填充或粘附于槽的内部。 版权所有（C）2012，JPO＆INPIT

公开(公告)号：JP2011170168A

公开(公告)日：2011-09-01

申请号：JP2010034695

申请日：2010-02-19

Applicant: Sumitomo Osaka Cement Co Ltd ,  住友大阪セメント株式会社

Inventor： SAKUMA MITSURU ,  SUDO MASAAKI ,  ICHIKAWA JUNICHIRO

IPC: G02B6/122

Abstract: PROBLEM TO BE SOLVED: To provide an optical waveguide device using evanescent wave as monitor light and a method of manufacturing the optical waveguide device, wherein the manufacturing process is not complicated and the gap between an optical waveguide and a light-receiving element is accurately controlled. SOLUTION: The optical waveguide device includes a substrate 1 on which the optical waveguide 2 is formed and the light-receiving element 3 disposed striding the optical waveguide. A spacer film 4 is provided on the substrate and the light-receiving element is directly joined to the spacer film. COPYRIGHT: (C)2011,JPO&INPIT

Abstract translation: 解决的问题：为了提供使用ev逝波的光波导装置作为监视光，以及制造光波导装置的方法，其中制造过程不复杂，光波导与光接收元件之间的间隙 被精确控制。 解决方案：光波导器件包括其上形成有光波导2的基板1和跨越光波导的光接收元件3。 间隔膜4设置在基板上，光接收元件直接接合到间隔膜。 版权所有（C）2011，JPO＆INPIT

公开(公告)号：JP2010237593A

公开(公告)日：2010-10-21

申请号：JP2009087708

申请日：2009-03-31

Applicant: Sumitomo Osaka Cement Co Ltd ,  住友大阪セメント株式会社

Inventor： MOTOTANI MASAYUKI ,  SUDO MASAAKI ,  ICHIKAWA JUNICHIRO

IPC: G02F1/035

Abstract: PROBLEM TO BE SOLVED: To provide a light control device which has an improved broad band property of 20 GHz or more even in a light control device having a folded bent part in a signal electrode.
SOLUTION: In the light control device having a substrate having electrooptic effect, optical waveguides 31 to 33 formed on the substrate, and a modulation electrode modulating an optical wave propagated in the optical waveguide, the modulation electrode is a symmetric or asymmetric CPW electrode which is composed of signal electrodes 41, 42 and ground electrodes 61 to 63; the signal electrode from signal input end parts 51, 52 of the signal electrode to a start point (b) of an operation part (s) performing modulation of the optical wave propagated in the optical waveguide is an input side signal electrode part; the electrode has a bent part R folding back wiring in at least a part of the input side signal electrode part, and thickness of the substrate of a region in which the bent part exists is 30 to 100 μm.
COPYRIGHT: (C)2011,JPO&INPIT

Abstract translation: 要解决的问题：即使在信号电极中具有折叠弯曲部分的光控制装置中，也提供具有20GHz以上的改善的宽带特性的光控制装置。 解决方案：在具有电光效应的基板的光控制装置中，形成在基板上的光波导31至33以及调制在光波导中传播的光波的调制电极，调制电极是对称或非对称的CPW 由信号电极41,42和接地电极61〜63构成的电极; 从信号电极的信号输入端部分51,52到执行在光波导中传播的光波的调制的操作部分的起点（b）的信号电极是输入侧信号电极部分; 电极在输入侧信号电极部的至少一部分具有弯曲部R折回布线，并且弯曲部存在的区域的基板的厚度为30〜100μm。 版权所有（C）2011，JPO＆INPIT

公开(公告)号：JP2009210634A

公开(公告)日：2009-09-17

申请号：JP2008050784

申请日：2008-02-29

Applicant: Sumitomo Osaka Cement Co Ltd ,  住友大阪セメント株式会社

Inventor： ICHIOKA MASAYUKI ,  SAKUMA MITSURU ,  ICHIKAWA JUNICHIRO

IPC: G02B6/12 ,  G02F1/03 ,  G02F1/035

Abstract: PROBLEM TO BE SOLVED: To improve reliability of an optical waveguide device, operating in a wide band and driven at low voltage. SOLUTION: This optical waveguide device includes an optical waveguide substrate having a thickness of 30 μm or less, a holding substrate holding the optical waveguide substrate, a low dielectric constant substrate having a lower dielectric constant than the optical waveguide substrate and interposed between the optical waveguide substrate and the holding substrate, an adhesive layer adhesively bonding the optical waveguide substrate and the low dielectric constant substrate to each other and having a thickness of 9 μm or less, and a fixing means for fixing the low dielectric constant substrate to the holding substrate. COPYRIGHT: (C)2009,JPO&INPIT

Abstract translation: 要解决的问题：为了提高在宽带中工作并以低电压驱动的光波导器件的可靠性。 解决方案：该光波导装置包括厚度为30μm以下的光波导基板，保持光波导基板的保持基板，介电常数低于光波导基板的低介电常数基板，介于 光波导基板和保持基板，将光波导基板和低介电常数基板彼此粘合并且具有9μm以下的厚度的粘合层，以及用于将低介电常数基板固定到 保持基板。 版权所有（C）2009，JPO＆INPIT

公开(公告)号：JP2008089936A

公开(公告)日：2008-04-17

申请号：JP2006270181

申请日：2006-09-30

Applicant: Sumitomo Osaka Cement Co Ltd ,  住友大阪セメント株式会社

Inventor： KANEHARA YUUKI ,  ICHIKAWA JUNICHIRO ,  OIKAWA SATORU

IPC: G02F1/035

CPC classification number: G02F1/0356 ,  G02F1/0316 ,  G02F1/2255 ,  G02F2001/212 ,  G02F2201/127

Abstract: PROBLEM TO BE SOLVED: To provide an optical control element capable of achieving speed maching between a microwave and a light wave and impedance matching of the microwave and reducing a driving voltage.
SOLUTION: The optical control element has a thin plate 1 of ≤10 μm in thickness having electrooptic effect, an optical waveguide 2 formed on the thin film, and a control electrode for controlling light passing through the optical waveguide, wherein the control electrode comprises a first electrode and a second electrode disposed across the thin plate, the first electrode having a coplanar type electrode comprising at least a signal electrode 4 and a ground electrode 5 (51) and the second electrode having at least a ground electrode 54 and configured to apply an electric field to the optical waveguide cooperatively with the signal electrode of the first electrode, and the signal electrode of the first electrode has ≥2 branch signal lines branching halfway from at least one signal line.
COPYRIGHT: (C)2008,JPO&INPIT

Abstract translation: 要解决的问题：提供一种能够实现微波和光波之间的速度加工以及微波的阻抗匹配并降低驱动电压的光学控制元件。 解决方案：光控制元件具有厚度≤10μm的具有电光效应的薄板1，形成在薄膜上的光波导2和用于控制通过光波导的光的控制电极，其中控制 电极包括跨过薄板设置的第一电极和第二电极，第一电极具有至少包括信号电极4和接地电极5（51）的共平面型电极，并且第二电极至少具有接地电极54和 被配置为与第一电极的信号电极协作地向光波导施加电场，并且第一电极的信号电极具有从至少一条信号线中途分支的≥2个分支信号线。 版权所有（C）2008，JPO＆INPIT

公开(公告)号：JP2007256535A

公开(公告)日：2007-10-04

申请号：JP2006079743

申请日：2006-03-22

Applicant: Sumitomo Osaka Cement Co Ltd ,  住友大阪セメント株式会社

Inventor： YAMAMOTO FUTOSHI ,  ICHIKAWA JUNICHIRO

IPC: G02B6/12

Abstract: PROBLEM TO BE SOLVED: To provide an electric element which can stably operate even on increase drive voltages with reduced spaces between electrodes, and its manufacturing method. SOLUTION: The electric element having electrodes formed on an insulation substrate or insulation film is housed in a case. The minimum distance at least between a pair of electrodes is 20 μm or less and a gas higher in insulation than dried nitrogen is filled between these electrodes. Especially, it is preferable that the high insulation gas contains an arc-suppressing gas. COPYRIGHT: (C)2008,JPO&INPIT

Abstract translation: 要解决的问题：提供即使在增加电极之间的空间减小的驱动电压下也可以稳定地操作的电气元件及其制造方法。 解决方案：将具有形成在绝缘基板或绝缘膜上的电极的电气元件容纳在壳体中。 至少在一对电极之间的最小距离为20μm以下，并且在这些电极之间填充绝缘性高于干燥氮气的气体。 特别地，优选高绝缘气体含有电弧抑制气体。 版权所有（C）2008，JPO＆INPIT