USES OF MICROSPHERES AND MICROSPHEROIDS MADE OF DIAMOND, CBN OR STRUCTURED CERAMIC MATERIALS IN MICROMECHANICS, SENSOR AND MEDICAL TECHNOLOGY, TRIBOLOGY AND RELATED FIELDS
    81.
    发明申请
    USES OF MICROSPHERES AND MICROSPHEROIDS MADE OF DIAMOND, CBN OR STRUCTURED CERAMIC MATERIALS IN MICROMECHANICS, SENSOR AND MEDICAL TECHNOLOGY, TRIBOLOGY AND RELATED FIELDS 审中-公开
    作者微BALLS应用及-SPHÄROIDENOFF金刚石,CBN或微机械,传感器结构陶瓷材料和医疗技术,摩擦学及相关领域

    公开(公告)号:WO1995008721A1

    公开(公告)日:1995-03-30

    申请号:PCT/EP1994003115

    申请日:1994-09-16

    Abstract: Spherical or spheroid grains made of diamond, cubic boron nitride (CBN) or structured ceramic materials are used to produce structural elements and components in micromechanics, microelectromechanics, sensor and medical technology, tribology and related fields, for example to produce ball bearings, low abrasion and low attrition sliding surfaces, ball or globe valves, submillimetric pumps and micropumps, micropumps for feeding the smallest amounts of gasses, powders or liquids and for producing micropistons, as well as highly accurate microsyringes for injecting volumes from 1 mu l down to 1 al(1 10 1).

    Abstract translation: 本发明涉及一种用于结构元件和部件在微机械,微机电,传感器和医疗技术,摩擦学和相关领域,如用于制备中的用途金刚石的球形或类球形颗粒,立方氮化硼(CBN)或结构陶瓷材料的应用 的球轴承和和低磨损的滑动,球阀和-hähnen摩擦和泵在亚毫米波和微范围,微型泵向下推动非常少量的气体,粉末或液体和生产微型活塞,以及超精密微注射器1亩升的体积,以 1人(1 <> 10 <-18> 1)。

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