Method for manufacturing structure with moving element by heterogeneous sacrificial layer
    2.
    发明专利
    Method for manufacturing structure with moving element by heterogeneous sacrificial layer 审中-公开
    通过异质真空层制造移动元件结构的方法

    公开(公告)号:JP2010045334A

    公开(公告)日:2010-02-25

    申请号:JP2009148880

    申请日:2009-06-23

    Abstract: PROBLEM TO BE SOLVED: To provide a method for manufacturing a movable structure capable of easing various restrictions in the structure manufacturing process using a sacrificial material.
    SOLUTION: A first sacrificial material and a second sacrificial material are made to accumulate on substrate 1. A first pattern 2a and a second pattern 6a are formed with the first sacrificial material and the second sacrificial material, respectively. The first pattern created from the first sacrificial material is arranged on the second pattern created from the second sacrificial material. The first pattern is formed in the state where the surrounding portion of the second pattern is not covered. An active layer 3 covers at least whole sidewalls of the first pattern and the second pattern, and a predetermined area of the second pattern. The active layer is patterned so as to make it possible to access the first sacrificial material. The first sacrificial material and the second sacrificial material are removed selectively, and form the movable structure provided with the free area fixed to a substrate 1 by the fixed area.
    COPYRIGHT: (C)2010,JPO&INPIT

    Abstract translation: 要解决的问题:提供一种制造可消除使用牺牲材料的结构制造过程中的各种限制的可移动结构的方法。 解决方案:第一牺牲材料和第二牺牲材料被制成积累在衬底1上。第一图案2a和第二图案6a分别由第一牺牲材料和第二牺牲材料形成。 由第一牺牲材料制成的第一图案被布置在由第二牺牲材料制成的第二图案上。 在第二图案的周围部分未被覆盖的状态下形成第一图案。 有源层3覆盖第一图案和第二图案的至少整个侧壁以及第二图案的预定区域。 有源层被图案化以使得可以访问第一牺牲材料。 选择性地去除第一牺牲材料和第二牺牲材料,并且形成设置有通过固定区域固定到基板1的自由区域的可移动结构。 版权所有(C)2010,JPO&INPIT

    Production method for mold for nanostructured polymer product
    5.
    发明专利
    Production method for mold for nanostructured polymer product 审中-公开
    用于纳米结构聚合物产品的模具的生产方法

    公开(公告)号:JP2010115922A

    公开(公告)日:2010-05-27

    申请号:JP2009253066

    申请日:2009-11-04

    Abstract: PROBLEM TO BE SOLVED: To provide a production method for a mold with improved life time and low cost in regard to producing a nanopatterned product.
    SOLUTION: The production process for mold deposits a barrier thin layer 4 and a thin layer of diamond-like carbon 5 on a metal support 2 and performs nanopatterning on the thin layer of diamond-like carbon 5 as follows: a selective chemical etching is conducted in dry phase through a hard mask 8 where the etching stops at an interface between the thin layer of diamond-like carbon 5 and the barrier thin layer 4. The hard mask 8 used is a void lattice 11 whose outline is defined by nanoparticles 10 deposited beforehand on a free surface. A laminated coating composed of the barrier thin layer 4 and the patterned thin layer of diamond-like carbon 5 has a thickness between about 100 nm and about 10 μm.
    COPYRIGHT: (C)2010,JPO&INPIT

    Abstract translation: 要解决的问题:为了提供一种在制造纳米图案化产品方面具有改善的寿命和低成本的模具的生产方法。 解决方案:模具的制造过程在金属载体2上沉积阻挡薄层4和类金刚石碳5的薄层,并在如金刚石碳5的薄层上进行如下的纳米图案化:选择性化学 蚀刻通过硬掩模8进行,其中蚀刻停止在类金刚石碳5的薄层与阻挡薄层4之间的界面处。所使用的硬掩模8是空隙格11,其外形由 预先沉积在自由表面上的纳米颗粒10。 由阻挡薄层4和菱形碳5的图案化薄层构成的层压涂层的厚度为约100nm至约10μm。 版权所有(C)2010,JPO&INPIT

    Packet scheduling method
    6.
    发明专利
    Packet scheduling method 审中-公开
    分组调度方法

    公开(公告)号:JP2010050961A

    公开(公告)日:2010-03-04

    申请号:JP2009170380

    申请日:2009-07-21

    Abstract: PROBLEM TO BE SOLVED: To preferentially schedule urgent packets in a multi-access communication system sharing a plurality of transmission resources. SOLUTION: Data packets relative to various accesses are classified into a first category of urgent packets (Q u ) and a second category of non-urgent packets (Q n-u ) (110). The packets of the first category are scheduled in accordance with first scheduling (120) and transmission resources are allocated to these packets (125). Next, the packets of the second category are scheduled in accordance with second scheduling (130) and transmission resources are allocated to these packets (135). COPYRIGHT: (C)2010,JPO&INPIT

    Abstract translation: 要解决的问题:优先在共享多个传输资源的多址通信系统中优先安排紧急分组。 解决方案:相对于各种访问的数据分组被分类为紧急分组的第一类别(Q u )和第二类非紧急分组(Q nu )(110)。 根据第一调度(120)调度第一类别的分组,并将传输资源分配给这些分组(125)。 接下来,根据第二调度(130)调度第二类别的分组,并将传输资源分配给这些分组(135)。 版权所有(C)2010,JPO&INPIT

    Detector readout interface for avalanche particle detector
    10.
    发明专利

    公开(公告)号:JP2014527171A

    公开(公告)日:2014-10-09

    申请号:JP2014526410

    申请日:2012-08-10

    CPC classification number: G01T1/185 G01T1/2935 H01J47/02

    Abstract: アバランシェ粒子検出器のための検出器読み出しインターフェイスは、ガス・チャンバーの底部側に形成された抵抗層と、前記抵抗層の下に形成さる誘電体層とを備え、外部読み出し基板に容量結合されるように適合される。 これは、読み出しカードおよび検出器コアが自由に交換可能に組み合わされうるモジュール式検出器の構成をもたらす。 読み出し基板は、検出器をオフに切り替えることなく、取り外しまたは交換されてもよい。 同時に、構成は、スパークおよび放電に対して効果的な保護をもたらし、特に追加の保護回路の必要をなくす。 構成は、MicroMegasまたはGEM検出器のような、任意のアバランシェ粒子検出器に採用されてもよい。

    Abstract translation: 用于雪崩粒子检测器的检测器 - 读出器接口包括形成在气体室的底侧的电阻层和形成在所述电阻层下面的电介质层,并适于电容耦合到外部读出板。 这提供了一种模块化检测器配置,其中读出卡和检测器芯可以自由地和可互换地组合。 读取板甚至可以拆下或更换,而不关闭检测器。 同时,该配置提供了有效的防止火花和放电的保护,特别是不再需要额外的保护电路。 该配置可以用于任何雪崩粒子检测器,例如MicroMegas或GEM检测器。

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