METHOD OF LOW TEMPERATURE SYNTHESIS OF CARBON NANOTUBE USING CATALYST METAL FILM FOR DECOMPOSITION OF CARBON SOURCE GAS

    公开(公告)号:JP2001020072A

    公开(公告)日:2001-01-23

    申请号:JP2000178515

    申请日:2000-06-14

    Abstract: PROBLEM TO BE SOLVED: To provide a method for the low temperature synthesis of carbon nanotubes using a catalyst metal film. SOLUTION: After a catalyst metal film is formed on a substrate, the catalyst metal film is etched to form nanometer size catalyst metal particles separated from one another. Then a carbon nanotube is grown on each nanometer size catalyst metal particle separated from one another by a thermochemical vapor phase vapor deposition method to pyrolyze a carbon source gas at a temperature lower than the deformation temperature of the substrate by using the catalyst metal film for the decomposition of the carbon source gas. Thus, a plurality of carbon nanotubes perpendicularly arranged on the substrate are formed.

    SYNTHESIS OF CARBON NANOTUBE
    2.
    发明专利

    公开(公告)号:JP2001020071A

    公开(公告)日:2001-01-23

    申请号:JP2000175498

    申请日:2000-06-12

    Abstract: PROBLEM TO BE SOLVED: To provide a method for the mass-synthesis of high purity carbon nanotubes perpendicularly arranged on a large area substrate by thermochemical vapor phase vapor deposition method. SOLUTION: After catalyst metal particles of a nanometer size are formed as separated on a substrate by an etching process (step 30), high purity carbon nanotubes perpendicularly arranged on the substrate are grown by a thermochemical vapor phase vapor deposition method using a carbon source gas (step 40). Then after the step of selective synthesis of carbon nanotubes, carbon nanotubes are purified in-situ (step 60).

    WHITE LIGHT SOURCE AND MANUFACTURE THEREOF

    公开(公告)号:JP2001015077A

    公开(公告)日:2001-01-19

    申请号:JP2000177789

    申请日:2000-06-14

    Abstract: PROBLEM TO BE SOLVED: To provide a white light source using a carbon nanotube and a manufacturing method thereof. SOLUTION: This white light source include a metal film 200 formed on an under substrate 100 and used as a cathode, a catalyst metal film 300 formed on the metal film 200, a carbon nanotube 400 for field electron emission vertically directed to on the catalyst metal film 300, a spacer 500 disposed on the catalyst metal film 300 and a transparent upper substrate 600 attached with an anode transparent electrode 700 that a phosphor 800 is attached facing the carbon nanotube 400. Here, the catalyst metal film 300 is composed of a catalyst metal particle having nano-dimensions and separated each other and the carbon nanotube 400 is grown vertically oriented to the substrate by the CVD from each catalyst metal particle.

    THERMOCHEMICAL VAPOR PHASE DEPOSITION SYSTEM AND METHOD FOR SYNTHESIZING CARBON NANOTUBE USING THE SAME

    公开(公告)号:JP2001234341A

    公开(公告)日:2001-08-31

    申请号:JP2001015874

    申请日:2001-01-24

    Abstract: PROBLEM TO BE SOLVED: To provide a thermochemical vapor phase deposition system and to provide a synthesizing method for carbon nanotubes using the same. SOLUTION: This thermochemical vapor phase deposition system contains a belt 600 rotating while being successively loaded with many substrates 100, a rotary part 650 for rotating the belt 600, a loading part 210 for successively loading the substrates 100 onto the belt 600, a recovering part 250 set oppositely to the loading part 210 and recovering the substrates 100 transported by the rotation of the belt 600, first and second reaction gas feeding parts 450 and 460 for feeding reaction gas for synthesizing carbon nanotubes onto the substrates 100 moving along the belt 600, a substrate heating part 700 for heating the substrates 100 loaded on the belt 600 for the thermal reaction of the reaction gas and a fan as a part for exhausting the reaction gas.

    ELECTRIC FIELD DISCHARGE DISPLAY ELEMENT AND MANUFACTURING METHOD OF THE SAME

    公开(公告)号:JP2001167721A

    公开(公告)日:2001-06-22

    申请号:JP2000321094

    申请日:2000-10-20

    Abstract: PROBLEM TO BE SOLVED: To provide an electric field discharge display element using carbon nano tubes oriented vertically. SOLUTION: A metallic film 32 for a cathode electrode is formed on a lower substrate 30, and carbon nano tubes 34 for an emitter chip are formed on the metallic film 32, to be oriented vertically. A spacer 36 is installed on the metallic film 32, and an upper substrate 50 is installed on the spacer 36, and a transparent electrode 52 and a fluorescence body 54 are adhered on a surface of the upper substrate 50. The electric field discharge display element is simply constructed in two-electrode structure, therefore, production yield can be improved and manufacturing of a large area is possible. Further, since the carbon nano tubes oriented vertically as chips for the emitter are used, a large discharge current can be obtained with a lower voltage.

    METHOD FOR PURIFYING CARBON NANOTUBE BY THERMAL TREATMENT IN DIFFUSION OVEN

    公开(公告)号:JP2001031410A

    公开(公告)日:2001-02-06

    申请号:JP2000180076

    申请日:2000-06-15

    Abstract: PROBLEM TO BE SOLVED: To provide a method for purifying carbon nanotubes, by which many kinds of impurities can simply and rapidly be separated from the crude product of the carbon nanotubes in a simple process. SOLUTION: This method for purifying carbon nanotubes 30 comprises purifying the nanotubes 30 with a thermally decomposed acidic gas in a diffusion oven provided with a tube for the thermal treatment. The acidic gas comprises hydrogen chloride gas or nitric acid gas, and is charged into the tube in a state diluted with a dilution gas such as hydrogen gas. The purification process is simpler than by conventional methods, and efficiently removes many kinds of impurities even in a short time to show an excellent purification effect and give the purified carbon nanotubes in a high yield.

    METHOD FOR OPENING TIP OF CARBON NANOTUBE AND METHOD FOR PURIFICATION

    公开(公告)号:JP2001146409A

    公开(公告)日:2001-05-29

    申请号:JP2000301893

    申请日:2000-10-02

    Abstract: PROBLEM TO BE SOLVED: To provide both a method for opening the tips of carbon nanotubes using physical energy and a method for purification. SOLUTION: Unpurified carbon nanotubes 12 are stood vertically on a substrate 10 and lined up and physical energy is applied to the unpurified carbon nanotubes 12 in the direction parallel to the principal plane of the substrate 10 at a prescribed level of the lined up unpurified carbon nanotubes 12 to remove the tip parts of the unpurified carbon nanotubes 12. Thereby, unnecessary substances present in the tip parts and outer walls of the unpurified carbon nanotubes 12 are removed.

    FIELD-EMISSION DISPLAY ELEMENT AND MANUFACTURING METHOD THEREFOR

    公开(公告)号:JP2001176431A

    公开(公告)日:2001-06-29

    申请号:JP2000321075

    申请日:2000-10-20

    Abstract: PROBLEM TO BE SOLVED: To provide a field-emission display element using a perpendicularly oriented carbon nanotube. SOLUTION: On a lower substrate 30, a first metal film 32 for cathode electrode is formed and then a carbon nanotube 34 thereon. A first spacer 36 has been provided on the first metal film 32, and a meshwork of the second metal film 38 used as gate electrode is supported above the carbon nanotube 34. Provided on the first spacer 36 is a second spacer 49, on which an upper substrate 50 attached with a transparent electrode and fluorescent substance has been mounted. Accordingly, the structure is simple, production yield can be enhanced, and manufacturing of a large area is possible. Since this uses the carbon nanotube 34 oriented in the vertical direction as emitter tips, also, a large emission current can be obtained even with a low working voltage.

    CHEMICAL VAPOR DEPOSITION SYSTEM AND METHOD FOR SYNTHESIZING CARBON NANOTUBE USING THE SAME

    公开(公告)号:JP2001081564A

    公开(公告)日:2001-03-27

    申请号:JP2000225525

    申请日:2000-07-26

    Abstract: PROBLEM TO BE SOLVED: To provide a chemical vapor deposition system for synthesizing carbon nanotubes in a large amount and to provide a method for synthesizing carbon nanotubes using same. SOLUTION: In a chemical vapor deposition system growing carbon nanotubes 3000 on substrates 1300, a boat containing supporting projections respectively supporting substrates 1300 numerously amounted parallely in the horizontal direction and many vertical axes provided with the supporting projections is utilized. Moreover, the system contains a reaction furnace having passages for feeding and exhausting reaction gas on both edge parts and having an internal shape of a rectangular parallelpiped so that the boat is mounted on the inside and a heating means provided on the outside of the reaction furnace. By using such chemical vapor deposition system, carbon nanotubes can be synthesized in a large amount.

    FIELD EMISSION DISPLAY ELEMENT USING CARBON NANOTUBE AND ITS MANUFACTURE

    公开(公告)号:JP2001076651A

    公开(公告)日:2001-03-23

    申请号:JP2000225409

    申请日:2000-07-26

    Abstract: PROBLEM TO BE SOLVED: To provide a field emission display element using carbon nanotubes, having a large area and a large number of chips per unit area, and to provide a manufacturing method thereof. SOLUTION: This field emission display element is equipped with a first metallic film 32 for a cathode electrode formed on a lower substrate 30, and an insulating film pattern 34a and a second metallic film pattern 36a, formed on the first metallic film 32 and having a plurality of minute holes 40. A conductive polymer film 42 is formed in each minute hole 40, and nanotubes 44 for use as emitter chips are vertically embedded in each conductive polymer film 42. The second metallic film pattern 36a is provided with a spacer, and the spacer is provided with an upper substrate attached with a transparent electrode and a phosphor. The area of this field emission display element can be enlarged by the manufacturing method of dispersing the carbon nanotubes 44 in the fine holes 40 after the fine holes 40 are formed in the second metallic film and in the insulating film.

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