Abstract:
PROBLEM TO BE SOLVED: To provide a method for forming a film which protects a semiconductor device against water and reduces reflection of incident light. SOLUTION: An SiNx:H layer is formed on a semiconductor substrate by PECVD method comprising a step for placing a substrate (1) in a processing chamber (5) having specified dimensions of internal processing chamber, e.g. at least one internal length, internal width, internal height and/or inside diameter, a step for sustaining the pressure in the processing chamber at a relatively low level, a step for sustaining the processing temperature of the substrate (1) at a specified level, a step for generating plasma (P) from at least on plasma sustention source (3) fixed to the processing chamber (5) while spaced apart by a specified distance (L) from the surface of the substrate, a step for touching at least a part of the plasma (P) generated from the plasma sustention source (3) to the surface of the substrate, and a step for supplying a flow of cyan and ammonia to a part of the plasma (P). COPYRIGHT: (C)2005,JPO&NCIPI
Abstract:
Method for manufacturing an organic light emitting device or a blank for forming therefrom an organic light emitting device as well as such a OLED or blank, the organic light emitting device having a light emitting area with two opposite first sides and two opposite second sides, the method comprising at least the following steps: providing a substrate; depositing and partly removing a layer of transparent conductive material on the substrate for forming parallel anode lines which extend between the first sides; depositing and partly removing at least one conductive layer for forming contacts which are connected anode lines; wherein a photoresist layer is deposited so that it fully extends over contacts adjacent the at least one second side except for at least one contact position per cathode line, via which an electric contact between a respective cathode line to be formed and a respective contact is established.
Abstract:
PROBLEM TO BE SOLVED: To provide a method for manufacturing an organic light emitting device or a blank for forming an organic light emitting device as well as such a OLED or blank.SOLUTION: An organic light emitting device has two first opposite side surfaces and two second opposite side surfaces. A method comprises at least the following steps: providing a substrate; depositing and partially removing a transparent conductive material layer on the substrate for forming parallel anode lines which extend between the first side surfaces; depositing and partially removing at least one conductive layer for forming contacts which are connected to anode lines. A photoresist layer is deposited so that it fully extends over the contacts adjacent to at least the one second side surface except for at least one contact position for every cathode line, via which an electric contact between a respective cathode line to be formed and a respective contact is established.
Abstract:
PROBLEM TO BE SOLVED: To provide a manufacturing method of a display including a substrate which is provided with a structure with partitioned areas such as, for instance, a matrix structure in relief, with an inkjet printhead used to deposit a constant amount of liquid substantially in each area, an apparatus and a method for depositing the liquid to each area with due accuracy. SOLUTION: Described is a method wherein at least one sensor 7, 8, is used to measure the substrate 1 to determine the position of a respective area, and the printhead 5 is controlled on the basis of the thus determined position to deliver an amount of liquid at the correct place. Also described are an apparatus for carrying out the method, a substrate for use in the method and a display obtained with the method. COPYRIGHT: (C)2004,JPO&NCIPI