High-temperature capacitance type static pressure/dynamic pressure sensor and method of manufacturing the same
    1.
    发明专利
    High-temperature capacitance type static pressure/dynamic pressure sensor and method of manufacturing the same 审中-公开
    高温电容型静态压力/动态压力传感器及其制造方法

    公开(公告)号:JP2012032397A

    公开(公告)日:2012-02-16

    申请号:JP2011158751

    申请日:2011-07-20

    Inventor: GUO SHUWEN

    CPC classification number: G01L9/0075 G01L19/04 Y10T29/49002

    Abstract: PROBLEM TO BE SOLVED: To provide a capacitance type pressure probe or sensor for use at high temperature.SOLUTION: The capacitance type pressure sensor 100 includes a sapphire diaphragm 42 which is arranged in an internal detection chamber 30 of a probe housing, and has a first electrode 52 formed on a center part of the diaphragm 42. The center part of the diaphragm 42 and the first electrode 52 are adapted and configured to bend reacting to encountered pressure variation in the internal detection chamber 30 and through the pressure sensor 100. A sapphire substrate 46 having a second electrode 54 formed thereupon is fused to the sapphire diaphragm 42 mainly around a periphery thereof so as to form a sapphire stack and define a reference chamber 80 between the sapphire substrate 46 and the sapphire diaphragm 42. Before the sapphire diaphragm 42 is fused to the sapphire substrate 46, all contact surfaces are chemically treated and prepared using plasma excitation so as to form a bonding stack and lower the temperature needed for the fusion.

    Abstract translation: 要解决的问题:提供在高温下使用的电容式压力探测器或传感器。 电容型压力传感器100包括布置在探针外壳的内部检测室30中的蓝宝石膜片42,并且具有形成在隔膜42的中心部分上的第一电极52。 隔膜42和第一电极52适于和构造成弯曲,以响应于内部检测室30中和通过压力传感器100的压力变化。其上形成有第二电极54的蓝宝石衬底46与蓝宝石隔膜42熔合 主要围绕其周边,以便形成蓝宝石堆叠并在蓝宝石衬底46和蓝宝石光阑42之间限定参考室80.在将蓝宝石隔膜42熔合到蓝宝石衬底46之前,所有接触表面被化学处理和制备 使用等离子体激发以形成粘合堆叠并降低熔化所需的温度。 版权所有(C)2012,JPO&INPIT

    Pendulous accelerometer with balanced gas damping
    2.
    发明专利
    Pendulous accelerometer with balanced gas damping 审中-公开
    平衡加速度计与平衡气体阻尼

    公开(公告)号:JP2009109494A

    公开(公告)日:2009-05-21

    申请号:JP2008272656

    申请日:2008-10-23

    Inventor: GUO SHUWEN

    CPC classification number: G01P15/125 G01P15/0802 G01P15/131 G01P2015/0831

    Abstract: PROBLEM TO BE SOLVED: To provide a pendulous accelerometer with balanced gas damping.
    SOLUTION: The pendulous capacitive accelerometer 10 includes: a substrate 14 having a substantially planar upper surface with an electrode section; and a sensing plate having a central anchor portion 16 supported on the upper surface of the substrate 14 to define a hinge axis x. The sensing plate 12 includes: a solid proof mass 22 on a first side of the central anchor portion 16; and a substantially hollow proof mass 20 on a second side of the central anchor portion 16, providing for reduced overall chip size and balanced gas damping. The solid proof mass 22 has a first lower surface with a first electrode element thereon, and the substantially hollow proof mass 20 has a second lower surface with a second electrode element thereon. Both the solid proof mass 22 and the hollow proof mass 20 have the same capacitive sensing area. The sensing plate 12 rotates about the hinge axis x relative to the upper surface of the substrate 14 in response to an acceleration.
    COPYRIGHT: (C)2009,JPO&INPIT

    Abstract translation: 要解决的问题:提供具有平衡气体阻尼的下摆加速度计。 解决方案:下摆电容加速度计10包括:具有基本平坦的上表面的电极部分的基板14; 以及感测板,其具有支撑在基板14的上表面上以限定铰链轴线x的中心锚定部分16。 感测板12包括:在中心锚固部分16的第一侧上的固体质量块22; 以及在中心锚固部分16的第二侧上的基本上中空的质量块20,提供减小的总体切屑尺寸和平衡的气体阻尼。 固体质量块22具有在其上具有第一电极元件的第一下表面,并且基本上中空的质量块20具有在其上的第二电极元件的第二下表面。 固体质量块22和中空证明块20均具有相同的电容感测区域。 感测板12响应于加速度而相对于基板14的上表面围绕铰链轴线x旋转。 版权所有(C)2009,JPO&INPIT

    Force balanced impeller flow meter for mass flow rate control
    3.
    发明专利
    Force balanced impeller flow meter for mass flow rate control 审中-公开
    用于大量流量控制的平衡式叶轮流量计

    公开(公告)号:JP2009053192A

    公开(公告)日:2009-03-12

    申请号:JP2008210255

    申请日:2008-08-19

    CPC classification number: G01F1/28 G01F1/78

    Abstract: PROBLEM TO BE SOLVED: To provide a mass flow meter for accurate mass flow rate measurement suitable for small flow rate application.
    SOLUTION: A force balanced mass flow meter 10 comprises a cylindrical sensor housing 12 having an interior bore 12a; an impeller body 18 supported for axial rotation within the interior bore 12a of the sensor housing 12 and having a means for converting fluid inertia into flow induced torque when a fluid flows; a proximity sensor 60 for measuring a rotation angle of the impeller body 18 relative to the sensor housing 12; an electromagnetic means for generating a magnetic field around the sensor housing 12 to prevent rotation of the impeller body 18; an electronic circuit for determining electrical values from the proximity sensor 60 when the fluid flows relative to the impeller body; and a proportional-integral-derivative controller for adjusting an electric amount supplied to the electromagnetic means.
    COPYRIGHT: (C)2009,JPO&INPIT

    Abstract translation: 要解决的问题:提供适合于小流量应用的质量流量计的质量流量计。 力平衡质量流量计10包括具有内孔12a的圆柱形传感器壳体12; 叶轮本体18被支撑以在传感器壳体12的内孔12a内轴向旋转,并且具有用于当流体流动时将流体惯性转换成流动感应扭矩的装置; 用于测量叶轮本体18相对于传感器壳体12的旋转角度的接近传感器60; 用于在传感器壳体12周围产生磁场以防止叶轮体18旋转的电磁装置; 用于当所述流体相对于所述叶轮本体流动时,确定来自所述接近传感器60的电值的电子电路; 以及用于调节供给电磁装置的电量的比例积分微分控制器。 版权所有(C)2009,JPO&INPIT

    Air temperature sensor arrangement for vehicle and method of measuring air temperature
    5.
    发明专利
    Air temperature sensor arrangement for vehicle and method of measuring air temperature 有权
    用于车辆的空气温度传感器布置和测量空气温度的方法

    公开(公告)号:JP2014119451A

    公开(公告)日:2014-06-30

    申请号:JP2013255522

    申请日:2013-12-11

    CPC classification number: G01K13/02 G01K13/028

    Abstract: PROBLEM TO BE SOLVED: To provide an air temperature sensor arrangement for a vehicle and a method for measuring air temperature proximate to a vehicle.SOLUTION: An air temperature sensor arrangement for a vehicle includes a temperature sensor housing having a base portion, an inlet and an outlet. Also included is a main flow path defined by a continuously curvilinear wall, the main flow path extending from the inlet to the outlet for separating particulate matter from an inlet airflow. Further included is a temperature sensor disposed within an internal cavity of the temperature sensor housing.

    Abstract translation: 要解决的问题:提供一种用于车辆的空气温度传感器装置和用于测量靠近车辆的空气温度的方法。解决方案:用于车辆的空气温度传感器装置包括温度传感器壳体,其具有基部,入口和 一个出口。 还包括由连续曲线壁限定的主流路,主流路从入口延伸到出口,用于将颗粒物质与入口气流分离。 还包括设置在温度传感器壳体的内部空腔内的温度传感器。

    Microstructure devices with stress isolation
    6.
    发明专利
    Microstructure devices with stress isolation 有权
    具有应力隔离的微结构器件

    公开(公告)号:JP2013152228A

    公开(公告)日:2013-08-08

    申请号:JP2013005060

    申请日:2013-01-16

    CPC classification number: B81B7/0048

    Abstract: PROBLEM TO BE SOLVED: To isolate stress sensitive microstructure devices from packaging stress and the like.SOLUTION: A bracket 102 is housed in a package housing 104, and includes a bracket base 108 with a first bracket arm 110 and a second bracket arm 112. A channel is defined between the first bracket arm 110 and the second bracket arm 112. The first bracket arm 110 defines a first mounting surface 116 facing inward with respect to the channel. The second bracket arm 112 defines a second mounting surface 118 facing outward with respect to the channel. The second mounting surface 118 of the bracket is mounted to the package housing 104. A microstructure device 106 is mounted to the first mounting surface 116 in the channel.

    Abstract translation: 要解决的问题:将应力敏感的微结构器件与包装应力等隔离。解决方案:托架102容纳在封装壳体104中,并且包括具有第一支架臂110和第二支架臂112的托架基座108。 在第一支架臂110和第二支架臂112之间限定通道。第一支架臂110限定相对于通道面向内的第一安装表面116。 第二支架臂112限定相对于通道面向外的第二安装表面118。 支架的第二安装表面118安装到包装壳体104.微通道装置106安装在通道中的第一安装表面116上。

    System and method for sensing liquid level having differential output
    8.
    发明专利
    System and method for sensing liquid level having differential output 审中-公开
    用于感应具有差分输出的液位的系统和方法

    公开(公告)号:JP2012027024A

    公开(公告)日:2012-02-09

    申请号:JP2011158749

    申请日:2011-07-20

    CPC classification number: G01F23/242 G01F23/243 G01F23/247 G01F23/248

    Abstract: PROBLEM TO BE SOLVED: To provide a liquid level sensing system for providing a sufficiently fast response time with much higher resistance while having sufficient strength which is resistant to the high degree of a mechanical impact.SOLUTION: This liquid level sensing system 100 is provided with: a casing 108 configured so as to hold liquid; a first temperature sensor 104 connected to the casing, and configured so as to output a first signal showing a first temperature measured by the first temperature sensor; a second temperature sensor 106 connected to the casing, and configured so as to output a second signal showing a second temperature measured by the second temperature sensor; and a circuit 124 configured so as to receive the first and second signals as input, and to provide an output signal which is proportional to the time variation rate of a difference between the first signal and the second signal.

    Abstract translation: 要解决的问题:提供一种液位感测系统,其具有足够快的响应时间,具有非常高的阻力,同时具有足够的强度,耐受高度的机械冲击。 该液面感测系统100设置有:被配置为保持液体的壳体108; 第一温度传感器104,连接到壳体,并且被配置为输出表示由第一温度传感器测量的第一温度的第一信号; 第二温度传感器106,连接到壳体,并且被配置为输出表示由第二温度传感器测量的第二温度的第二信号; 以及被配置为接收第一和第二信号作为输入的电路124,并且提供与第一信号和第二信号之间的差的时间变化率成比例的输出信号。 版权所有(C)2012,JPO&INPIT

    Blade tip clearance measurement sensor and method for gas turbine engines
    9.
    发明专利
    Blade tip clearance measurement sensor and method for gas turbine engines 有权
    叶片间隙测量传感器和气体涡轮发动机的方法

    公开(公告)号:JP2010085405A

    公开(公告)日:2010-04-15

    申请号:JP2009221838

    申请日:2009-09-28

    CPC classification number: G01B7/14 F01D11/20 F01D21/003 F05D2270/305

    Abstract: PROBLEM TO BE SOLVED: To provide a sensor and a method for measuring blade tip clearance for a gas turbine engine.
    SOLUTION: An electromagnetic field sensor assembly 100 for blade tip clearance measurement in the gas turbine engine is disclosed. The electromagnetic field sensor assembly 100 includes ceramic sensor bodies 140a and 140b; a multi-layered wire coil 144a and 144b wound about a distal end portion of the sensor bodies 140a and 140b for producing an electromagnetic field; a ceramic well 130 enclosing the sensor bodies 140a and 140b and the coil; and a metallic housing surrounding the well 130 and having an open distal end.
    COPYRIGHT: (C)2010,JPO&INPIT

    Abstract translation: 要解决的问题:提供一种用于测量燃气涡轮发动机的叶片间隙的传感器和方法。 公开了一种用于燃气涡轮发动机中用于叶片顶端间隙测量的电磁场传感器组件100。 电磁场传感器组件100包括陶瓷传感器主体140a和140b; 围绕传感器主体140a和140b的远端部分缠绕以产生电磁场的多层线圈144a和144b; 包围传感器主体140a和140b以及线圈的陶瓷孔130; 以及围绕井130并具有敞开的远端的金属壳体。 版权所有(C)2010,JPO&INPIT

    High temperature electrostatic capacitive type static/dynamic pressure sensor
    10.
    发明专利
    High temperature electrostatic capacitive type static/dynamic pressure sensor 审中-公开
    高温静电电容式静态/动态压力传感器

    公开(公告)号:JP2009162751A

    公开(公告)日:2009-07-23

    申请号:JP2008326837

    申请日:2008-12-24

    Inventor: GUO SHUWEN

    CPC classification number: G01L23/125 G01L9/0072

    Abstract: PROBLEM TO BE SOLVED: To provide a high temperature electrostatic capacitive type static/dynamic pressure sensor for the use of a pressure probe which has a diaphragm composed in order to enable more exact measurement of pressure (dynamic or static) at high temperature. SOLUTION: The electrostatic capacitive type pressure probe is used for high temperature, such as for use in a gas turbine engine. The electrostatic capacitive type probe or pressure sensor 10 includes a sensor housing 20 that defines an interior detection chamber 42 having a pressure port 36 and an interior reference chamber 52 positioned adjacent to a detection electrode 62. The reference chamber 52 is separated from the detection chamber 42 by a flexible diaphragm 44 made from Haynes 230 alloy, wherein the deflection of the diaphragm 44 in response to an applied pressure in the detection chamber 42 corresponds to a change in electrostatic capacitive value by the detection electrode 62. COPYRIGHT: (C)2009,JPO&INPIT

    Abstract translation: 要解决的问题:提供一种高温静电电容式静态/动态压力传感器,用于使用压力探头,该压力探头具有隔膜,以便能够在高温下更准确地测量压力(动态或静态) 。

    解决方案:静电电容型压力探头用于高温,例如用于燃气涡轮发动机。 静电电容型探针或压力传感器10包括传感器外壳20,该传感器壳体限定具有压力端口36的内部检测室42和邻近检测电极62定位的内部参考室52.参考室52与检测室 42通过由Haynes 230合金制成的柔性隔膜44,其中响应于检测室42中施加的压力的隔膜44的偏转对应于检测电极62的静电电容值的变化。COPYRIGHT :(( C)2009年,JPO&INPIT

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