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公开(公告)号：JP5953057B2
公开(公告)日：2016-07-13
申请号：JP2012023038
申请日：2012-02-06
Applicant: 東京エレクトロン株式会社
IPC: H01L21/318 , H01L21/31 , H05H1/46 , H01L21/316
CPC classification number: H01L21/02164 , H01J37/32201 , H01J37/32238 , H01J37/32266 , H01J37/32311 , H01L21/0217 , H01L21/02238 , H01L21/02247 , H01L21/02252 , H05H1/46 , H05H2001/463
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