公开(公告)号：WO2003025505A1

公开(公告)日：2003-03-27

申请号：PCT/GB2002/004066

申请日：2002-09-06

Applicant: BAE SYSTEMS PLC ,  FELL, Christopher, Paul ,  ELEY, Rebecka ,  FOX, Colin, Henry, John ,  MCWILLIAM, Stewart

Inventor： FELL, Christopher, Paul ,  ELEY, Rebecka ,  FOX, Colin, Henry, John ,  MCWILLIAM, Stewart

IPC: G01C19/56

CPC classification number: G01C19/5684

Abstract: A three axis rate sensor includes a substantially planar vibratory resonator (5) having a substantially ring or hoop-like structure with inner (6) and outer peripheries extending around a common axis, drive means (22) for causing the resonator to vibrate in a Cos2θ vibration mode, carrier mode pick-off means (23) for sensing movement of the resonator (5) in response to the applied drive means, x-axis, y-axis and z-axis response mode, pick-off means (25, 27, 31) for detecting movement of the resonator in response to rotation about the x-axis, y-axis and z-axis, x-axis, y-axis and z-axis response mode drive means (24, 26, 30) for nulling said motion and support means (9) for flexibly supporting the resonator and for allowing the resonator (5) to vibrate relative to the support means (9) in response to the drive means (22) and the applied rotation wherein the support means (9) comprises only L support beams, where L ≠ 2 k , and k = 0, 1, 2 or 3.

Abstract translation: 三轴速率传感器包括具有基本环形或环状结构的基本上平面的振动谐振器（5），其具有围绕公共轴线延伸的内部（6）和外周边;驱动装置（22），用于使谐振器振动 Cos2theta振动模式，用于响应于所施加的驱动装置感测谐振器（5）的运动的载波模式拾取装置（23），x轴，y轴和z轴响应模式，拾取装置（25 ，27,31），用于响应于围绕x轴，y轴和z轴，x轴，y轴和z轴响应模式驱动装置（24,26,30）的旋转来检测谐振器的运动 ），用于使所述运动零点和用于灵活地支撑谐振器的支撑装置（9），并且响应于驱动装置（22）和所施加的旋转，允许谐振器（5）相对于支撑装置（9）振动，其中支撑 装置（9）仅包括L个支撑梁，其中L NOTEQUAL 2 和k = 0,1,2或3。

公开(公告)号：WO2003025501A1

公开(公告)日：2003-03-27

申请号：PCT/GB2002/004051

申请日：2002-09-06

Applicant: BAE SYSTEMS PLC ,  FELL, Christopher, Paul ,  ELEY, Rebecka ,  FOX, Colin, Henry, John ,  MCWILLIAM, Stewart

Inventor： FELL, Christopher, Paul ,  ELEY, Rebecka ,  FOX, Colin, Henry, John ,  MCWILLIAM, Stewart

IPC: G01C19/56

CPC classification number: G01C19/5684

Abstract: A single axis rate sensor including a substantially planar vibratory resonator (1) having a substantially ring or hoop-like structure with inner and outer peripheries (1a, 1b) extending around a common axis (z) drive means (6) for causing the resonator (1) to vibrate in a Cos2θ vibration mode, carrier mode pick-off means (7) for sensing movement of the resonator (1) in response to said drive means pick-off means (9) for detecting Sin2θ vibration mode motion induced by rotation around the Z-axis, Sin2θ vibration mode drive means (8) for nulling said motion and support means (2) for flexibly supporting the resonator (1) and for allowing the resonator (1) to vibrate relative to the support means (2) in response to the drive means, or to applied rotation wherein the support means comprises only L support beams, where L ≠ 2 K , and K = 0, 1, 2 or 3.

Abstract translation: 单轴速率传感器包括具有基本上环形或环形结构的基本上平面的振动谐振器（1），其具有围绕公共轴线（z）延伸的内周和外周（1a，1b），用于使谐振器 （1）以Cos2θ振动模式振动，响应于用于检测Sin2θ振动模式运动的所述驱动装置检测装置（9），用于感测谐振器（1）的移动的载体模式拾取装置（7） 通过围绕Z轴的旋转引起的Sin2θ振动模式驱动装置（8），用于使所述运动零点和用于灵活地支撑谐振器（1）的支撑装置（2），并且允许谐振器（1）相对于支撑件振动 装置（2）响应于驱动装置或施加的旋转，其中支撑装置仅包括L支撑梁，其中L> 2K，K = 0,1,2或3。

公开(公告)号：WO2021240151A1

公开(公告)日：2021-12-02

申请号：PCT/GB2021/051277

申请日：2021-05-26

Applicant: BAE SYSTEMS PLC

Inventor： ELEY, Rebecka ,  BALMOND, Mark, David ,  FIGGURES, Christopher, Colin ,  STURLAND, Ian Michael ,  CHURCH, Simon Robert

IPC: G01N17/04

Abstract: Specimens for evaluating corrosion protection of substrates due, at least in part, to coatings applied thereupon are described. A specimen (1) comprises: a first coating (10), comprising a first set of layers (11) including a first layer (11A), on a first substrate (12); and a first set of perforations (100), including a first perforation (100A) and a second perforation (100B), in the first coating (10), wherein the first perforation (100A) has a first depth D1 through the first coating (10) and a first dimension W1 transverse to the first depth, wherein the second perforation (100B) has a second depth D2 through the first coating (10) and a second dimension W2 transverse to the second depth D2 and wherein the first dimension W1 and the second dimension W2 are different.

公开(公告)号：WO2011064569A1

公开(公告)日：2011-06-03

申请号：PCT/GB2010/051939

申请日：2010-11-22

Applicant: BAE SYSTEMS plc ,  ELEY, Rebecka ,  HUCKER, Martyn John ,  STURLAND, Ian Michael

Inventor： ELEY, Rebecka ,  HUCKER, Martyn John ,  STURLAND, Ian Michael

IPC: B81B3/00 ,  H01L41/09 ,  H01L41/22

CPC classification number: H02N2/043 ,  B81B3/0021 ,  B81B2201/032 ,  B81B2203/0109 ,  H01L41/0933 ,  H01L41/22

Abstract: A MEMS device, and method of fabrication thereof, comprising: a wall arranged as a closed loop(for example, comprising a plurality of interconnected lengths (11-18)); and a bridging portion (54) having two ends and an intermediate portion between these ends; the bridging portion (54) is connected at one end to a first portion of the wall and at the other end to a second portion of the wall non-contiguous to the first; whereby when the intermediate portion is displaced in a direction through a plane defined between the two ends, the portions of the wall connected to the bridging portion (54) are each displaced in a respective direction in the plane, and at least one further portion of the wall is displaced in a direction that is in the plane and that is different to the directions that the two portions connected to the bridging portion (54) are displaced in.

Abstract translation: MEMS器件及其制造方法，包括：布置为闭环（例如，包括多个互连长度（11-18））的壁; 以及桥接部分（54），其具有两个端部和在这些端部之间的中间部分; 桥接部分（54）在一端连接到壁的第一部分，而另一端连接到不与第一部分邻接的壁的第二部分; 由此当中间部分沿着穿过限定在两端之间的平面的方向移位时，连接到桥接部分（54）的壁的部分各自在平面中的相应方向上移位，并且至少另外一部分 壁在平面内的方向上移位，并且不同于连接到桥接部分（54）的两个部分移位的方向。

公开(公告)号：WO2011064568A1

公开(公告)日：2011-06-03

申请号：PCT/GB2010/051936

申请日：2010-11-22

Applicant: BAE SYSTEMS PLC ,  HUCKER, Martyn John ,  STURLAND, Ian Michael ,  ELEY, Rebecka

Inventor： HUCKER, Martyn John ,  STURLAND, Ian Michael ,  ELEY, Rebecka

IPC: B81B3/00 ,  H01L41/09 ,  H01L41/22

CPC classification number: H01L41/313 ,  B81B3/0021 ,  B81B2201/032 ,  B81B2203/0118 ,  B81B2203/051 ,  H01L41/096

Abstract: A MEMS device (e.g. a piezoelectric actuator), and method of fabrication thereof, having a moveable portion comprising a layer of material (6) (e.g. a substrate layer formed from a substrate wafer) having relatively low rigidity in a direction in the plane of a surface of the layer of material (6), and relatively high rigidity in a direction through the plane; wherein the relatively low rigidity is provided by ridges and grooves (60) in a further surface of the layer of material (6), the further surface of the material (6) being substantially perpendicular to the direction in the plane. The MEMS device may comprise a layer of piezoelectric material (2) bonded to the surface of the layer of material (6). Actuation of the MEMS device (e.g. actuation in the plane of the surface of the layer of material (6)) may be performed by applying an electrical field across the piezoelectric material.

Abstract translation: MEMS器件（例如压电致动器）及其制造方法具有可移动部分，该可移动部分包括材料层（6）（例如，由衬底晶片形成的衬底层），该材料层在 材料层（6）的表面，并且在穿过该平面的方向上具有相对高的刚性; 其中相对较低的刚度由在所述材料层（6）的另一表面中的脊和槽（60）提供，所述材料（6）的另一表面基本上垂直于所述平面中的方向。 MEMS器件可以包括结合到材料层（6）的表面的压电材料层（2）。 可以通过在压电材料上施加电场来执行MEMS装置的致动（例如，材料层（6）的表面的平面中的致动）。

公开(公告)号：WO2003025504A1

公开(公告)日：2003-03-27

申请号：PCT/GB2002/004057

申请日：2002-09-06

Applicant: BAE SYSTEMS PLC ,  FELL, Christopher, Paul ,  ELEY, Rebecka ,  FOX, Colin, Henry, John ,  McWILLIAM, Stewart

Inventor： FELL, Christopher, Paul ,  ELEY, Rebecka ,  FOX, Colin, Henry, John ,  McWILLIAM, Stewart

IPC: G01C19/56

CPC classification number: G01C19/5684

Abstract: A three axis sensor including a substantially planar vibrator resonator (2) having a substantially ring or hoop like structure, drive means (4) for causing the resonator (2) to vibrate in an in plane cos2θ vibration mode, carrier mode pick-off means (5) for sensing movement of the resonator in response to said drive means, pick-off means (6) for sensing in plane sin2θ resonator motion induced by rotation about the z-axis, drive means (7) for nulling said motion, pick-off means (8) for sensing out of plane sin3θ resonator motion induced by rotation about the x-axis, drive means (9) for nulling said motion, pick-off means (10) for sensing out of plane cos3θ resonator motion induced by rotation about the y-axis, drive means (11) for nulling said motion, and support means (9) for flexibly supporting the resonator, wherein the support means comprises only L support beams, where L≠2 J x3 K and J=0,1 or 2 and K=0 or 1 with L>24.

Abstract translation: 一种三轴传感器，包括具有基本上环形或环形结构的基本上平面的振动器谐振器（2），用于使谐振器（2）以平面cos2theta振动模式振动的驱动装置（4），载波模式拾取装置 （5），用于响应于所述驱动装置感测所述谐振器的移动;用于感测由围绕z轴的旋转引起的平面sin2θ谐振器运动的拾取装置（6），用于使所述运动归零的驱动装置（7） 用于感测由围绕x轴的旋转引起的平面sin3θ谐振器运动的拾取装置（8），用于使所述运动归零的驱动装置（9），用于感测出平面外的cos3θ谐振器的拾取装置（10） 通过围绕y轴的旋转引起的运动，用于使所述运动零点的驱动装置（11）和用于灵活地支撑谐振器的支撑装置（9），其中支撑装置仅包括L个支撑梁，其中L> x3 和J = 0,1或2，K = 0或1，L> 24。

公开(公告)号：WO2003025503A1

公开(公告)日：2003-03-27

申请号：PCT/GB2002/004056

申请日：2002-09-06

Applicant: BAE SYSTEMS PLC ,  FELL, Christopher, Paul ,  ELEY, Rebecka ,  FOX, Colin, Henry, John ,  McWILLIAM, Stewart

Inventor： FELL, Christopher, Paul ,  ELEY, Rebecka ,  FOX, Colin, Henry, John ,  McWILLIAM, Stewart

IPC: G01C19/56

CPC classification number: G01C19/5677

Abstract: A two axis gyroscope including a planar vibratory resonator (5) having a ring or hoop-like structure, carrier mode drive means (22) for causing the resonator (5) to vibrate in a cosnθ vibration mode, carrier mode pick-off means (23) for sensing movement of the resonator (5), X-axis response mode pick-off means (25; 27) for detecting movement of the resonator in response to rotation about the x-axis and y-axis; x-axis and y-axis response mode drive means (24; 26) for nulling said motions and support means (9) for flexibly supporting the resonator (5) and for allowing the resonator to vibrate relative to the support means (9) in response to the drive means (22) and to applied rotation; wherein the support (9) means comprises only L legs, where, when L is even: L=2N/K, and where, when L is odd: L=N/K, where K is an integer, L > 2 and N is the carrier mode order.

Abstract translation: 包括具有环形或环状结构的平面振动谐振器（5）的双轴陀螺仪，用于使谐振器（5）以谐振振动模式振动的载体模式驱动装置（22），载波模式拾取装置 用于感测谐振器（5）的移动的X轴响应模式拾取装置（25; 27），用于响应于围绕x轴和y轴的旋转检测谐振器的移动; x轴和y轴响应模式驱动装置（24; 26），用于使所述运动零点和支撑装置（9）用于柔性地支撑谐振器（5）并且允许谐振器相对于支撑装置（9）振动 响应于驱动装置（22）并施加旋转; 其中，所述支撑件（9）仅包括L脚，其中当L为偶数时：L = 2N / K，并且其中当L为奇数时：L = N / K，其中K是整数，L> 2和N 是载波模式的顺序。

公开(公告)号：WO2003025502A1

公开(公告)日：2003-03-27

申请号：PCT/GB2002/004053

申请日：2002-09-06

Applicant: BAE SYSTEMS PLC ,  FELL, Christopher, Paul ,  ELEY, Rebecka ,  FOX, Colin, Henry, John ,  MCWILLIAM, Stewart

Inventor： FELL, Christopher, Paul ,  ELEY, Rebecka ,  FOX, Colin, Henry, John ,  MCWILLIAM, Stewart

IPC: G01C19/56

CPC classification number: G01C19/5684

Abstract: A single axis rate sensor (10) including a substantially planar vibratory resonator (16) having a substantially ring or hoop-like structure with inner (24) and outer peripheries extending around a common axis, drive means (18) for causing the resonator to vibrate in a Cos3θ vibration mode, carrier mode pick-off means (20) for sensing movement of the resonator in response to said drive means (18), pick-off means (36) for sensing resonator movement induced in response to rotation of the rate sensor about the sensitive axis, drive means (38) for mulling said motion, and support means (22) for flexibly supporting the resonator (16) and for allowing the resonator (16) to vibrate relative to the support means (22) in response to the drive means, and to applied rotation wherein the support means (16) comprises only L support beams, where L ≠ 3 x 2 K-1 , L> 2 and K = 1, 2 or 3.

Abstract translation: 单轴速率传感器（10）包括具有基本环形或环形结构的基本上平面的振动谐振器（16），其具有围绕公共轴线延伸的内部（24）和外周边;驱动装置（18），用于使谐振器 以Cos3θ振动模式振动，用于响应于所述驱动装置（18）感测谐振器的移动的载体模式拾取装置（20），用于感测响应于旋转的谐振器运动而引起的谐振器运动的拾取装置（36） 关于感测轴的速率传感器，用于研磨所述运动的驱动装置（38）和用于灵活地支撑谐振器（16）并允许谐振器（16）相对于支撑装置（22）振动的支撑装置（22） 响应于驱动装置，并且施加旋转，其中支撑装置（16）仅包括L个支撑梁，其中L <3×2 ，L> 2和K = 1,2或3。

公开(公告)号：EP2504273B1

公开(公告)日：2016-01-27

申请号：EP10785498.6

申请日：2010-11-22

Applicant: BAE Systems PLC

Inventor： HUCKER, Martyn John ,  STURLAND, Ian Michael ,  ELEY, Rebecka

IPC: B81B3/00 ,  H01L41/09 ,  H01L41/313

CPC classification number: H01L41/313 ,  B81B3/0021 ,  B81B2201/032 ,  B81B2203/0118 ,  B81B2203/051 ,  H01L41/096

Abstract: A MEMS device (e.g. a piezoelectric actuator), and method of fabrication thereof, having a moveable portion comprising a layer of material (6) (e.g. a substrate layer formed from a substrate wafer) having relatively low rigidity in a direction in the plane of a surface of the layer of material (6), and relatively high rigidity in a direction through the plane; wherein the relatively low rigidity is provided by ridges and grooves (60) in a further surface of the layer of material (6), the further surface of the material (6) being substantially perpendicular to the direction in the plane. The MEMS device may comprise a layer of piezoelectric material (2) bonded to the surface of the layer of material (6). Actuation of the MEMS device (e.g. actuation in the plane of the surface of the layer of material (6)) may be performed by applying an electrical field across the piezoelectric material.

公开(公告)号：EP2504274B1

公开(公告)日：2016-04-20

申请号：EP10787532.0

申请日：2010-11-22

Applicant: BAE Systems PLC

Inventor： ELEY, Rebecka ,  HUCKER, Martyn John ,  STURLAND, Ian Michael

IPC: B81B3/00 ,  H01L41/09 ,  H01L41/22

CPC classification number: H02N2/043 ,  B81B3/0021 ,  B81B2201/032 ,  B81B2203/0109 ,  H01L41/0933 ,  H01L41/22

Abstract: A MEMS device, and method of fabrication thereof, comprising: a wall arranged as a closed loop(for example, comprising a plurality of interconnected lengths (11-18)); and a bridging portion (54) having two ends and an intermediate portion between these ends; the bridging portion (54) is connected at one end to a first portion of the wall and at the other end to a second portion of the wall non-contiguous to the first; whereby when the intermediate portion is displaced in a direction through a plane defined between the two ends, the portions of the wall connected to the bridging portion (54) are each displaced in a respective direction in the plane, and at least one further portion of the wall is displaced in a direction that is in the plane and that is different to the directions that the two portions connected to the bridging portion (54) are displaced in.