HETEROGENEOUS SUBSTRATE BONDING FOR PHOTONIC INTEGRATION

    公开(公告)号:US20230124445A1

    公开(公告)日:2023-04-20

    申请号:US17949022

    申请日:2022-09-20

    Abstract: A method of fabricating a composite integrated optical device includes providing a substrate comprising a silicon layer, forming a waveguide in the silicon layer, and forming a layer comprising a metal material coupled to the silicon layer. The method also includes providing an optical detector, forming a metal-assisted bond between the metal material and a first portion of the optical detector, forming a direct semiconductor-semiconductor bond between the waveguide, and a second portion of the optical detector.

    MULTISTAGE SPOT SIZE CONVERTER IN SILICON PHOTONICS

    公开(公告)号:US20190170944A1

    公开(公告)日:2019-06-06

    申请号:US16171132

    申请日:2018-10-25

    Abstract: A device is provided for optical mode spot size conversion to optically couple a semiconductor waveguide with an optical fiber. The device includes a waveguide comprising a waveguide taper region, which comprises a shoulder portion and a ridge portion above the shoulder portion. The ridge portion has a width that tapers to meet a width of the shoulder portion. The waveguide taper region comprises a first material. The device also has a mode converter coupled to the waveguide. The mode converter includes a plurality of stages, and each of the plurality of stages tapers in a direction similar to a direction of taper of the waveguide taper region. The mode converter is made of a second material different from the first material.

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