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公开(公告)号：JP5774538B2
公开(公告)日：2015-09-09
申请号：JP2012090202
申请日：2012-04-11
Applicant: TOWA株式会社
IPC: H01L21/56
CPC classification number: H01L21/565 , B29C45/14655 , B29C2045/14877 , H01L2924/0002
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