公开(公告)号：US20190265288A1

公开(公告)日：2019-08-29

申请号：US16283371

申请日：2019-02-22

Applicant: APPLIED MATERIALS, INC.

Inventor： Chuang-Chia Lin ,  Upendra Ummethala ,  Andrew Choe

IPC: G01R29/08 ,  H01Q1/38 ,  H01L21/66

Abstract: Embodiments include systems and methods for determining a processing parameter of a processing operation utilizing micro resonator sensors. Some embodiments include a diagnostic substrate comprising a substrate, a circuit layer over the substrate, a cavity in the circuit layer, a capping layer over the circuit layer, a resonating body in or over the cavity, one or more electrodes in the cavity, and circuitry for driving and sensing the resonant frequency of the resonating body. In an embodiment, the circuitry comprises a biasing circuitry block configured to provide a bias voltage to the one or more electrodes, a frequency generator circuitry block configured to provide a signal with a varying frequency to the one or more electrodes, and a sensing circuitry block configured to detect a value correlated to oscillation of the resonating body.

公开(公告)号：US11009538B2

公开(公告)日：2021-05-18

申请号：US16283371

申请日：2019-02-22

Applicant: APPLIED MATERIALS, INC.

Inventor： Chuang-Chia Lin ,  Upendra Ummethala ,  Andrew Choe

IPC: G01R29/08 ,  H01L21/66 ,  H01Q1/38

Abstract: Embodiments include systems and methods for determining a processing parameter of a processing operation utilizing micro resonator sensors. Some embodiments include a diagnostic substrate comprising a substrate, a circuit layer over the substrate, a cavity in the circuit layer, a capping layer over the circuit layer, a resonating body in or over the cavity, one or more electrodes in the cavity, and circuitry for driving and sensing the resonant frequency of the resonating body. In an embodiment, the circuitry comprises a biasing circuitry block configured to provide a bias voltage to the one or more electrodes, a frequency generator circuitry block configured to provide a signal with a varying frequency to the one or more electrodes, and a sensing circuitry block configured to detect a value correlated to oscillation of the resonating body.