公开(公告)号：US20130294476A1

公开(公告)日：2013-11-07

申请号：US13875375

申请日：2013-05-02

Applicant: LAYTEC AG

Inventor： Joerg-Thomas ZETTLER ,  Christian KASPARI

IPC: G01J5/02 ,  H05B33/08

CPC classification number: G01J5/02 ,  G01J1/08 ,  G01J5/0007 ,  G01J5/0896 ,  G01J5/522 ,  H05B33/0854

Abstract: A flat light emitting plate, a method for calibrating a pyrometer and a method for determining the temperature of a semiconducting wafer inside a processing chamber by said pyrometer. The invention provides a method for calibrating a pyrometer by means of a cold source which is also applicable to processing chambers with a narrow slit. According to the invention, a flat light emitting plate for simulating thermal radiation is provided, comprising a main body made of a transparent material, a light emission area located on an upper surface of the light emitting plate for emitting light, at least one light source located on a lateral surface of the light emitting plate, at least one detector located on a lateral surface of the light emitting plate, and a regulating circuit for adjusting the intensity of light emitted by the light sources.

Abstract translation: 平板发光板，用于校准高温计的方法和通过所述高温计确定处理室内的半导体晶片的温度的方法。 本发明提供了一种通过冷源校准高温计的方法，冷源也适用于具有狭窄狭缝的处理腔室。 根据本发明，提供了一种用于模拟热辐射的平板发光板，包括由透明材料制成的主体，位于发光板的上表面上用于发光的发光区域，至少一个光源 位于所述发光板的侧表面上，位于所述发光板的侧表面上的至少一个检测器和用于调节由所述光源发射的光的强度的调节电路。