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公开(公告)号:US20250149371A1
公开(公告)日:2025-05-08
申请号:US18931528
申请日:2024-10-30
Applicant: SAMSUNG DISPLAY CO., LTD.
Inventor: TAEYOUNG PARK , MINSEOK KANG , MYUNG-HUN OH , TETSUYA OKAMOTO , BYUNG MOO KIM
IPC: H01L21/683 , B23Q3/15 , B32B37/00 , B32B37/10
Abstract: An electrostatic chuck unit includes a first electrostatic chuck that includes a first plate that includes a surface that is concavely curved in a first direction and a first electrode pattern disposed on the surface of the first plate, and a second electrostatic chuck spaced apart from the first electrostatic chuck in a second direction opposite to the first direction and that includes a second plate that includes a surface adjacent to the first electrostatic chuck and that is convexly curved in the first direction and a second electrode pattern disposed on the surface of the second plate. Each of the first electrode pattern and the second electrode pattern includes an electrode, and a width of the electrode is between 10 mm and 30 mm.
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公开(公告)号:US20240181766A1
公开(公告)日:2024-06-06
申请号:US18226458
申请日:2023-07-26
Applicant: Samsung Display Co., LTD.
Inventor: TAEYOUNG PARK , SUKJU KANG , TETSUYA OKAMOTO , BYUNG MOO KIM , SANG CHEOL KIM , MYUNG-HUN OH , DONGGUL LEE , JUN-HEE LEE
CPC classification number: B32B38/18 , B32B37/0046
Abstract: An alignment device includes: a first stage; a plurality of base plates disposed on the first stage and on which a material is placed; and a plurality of second stages disposed under the first stage, and connected to the plurality of base plates, respectively, and capable of aligning each of the plurality of base plates in X, Y, and ⊖ directions.
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公开(公告)号:US20210305201A1
公开(公告)日:2021-09-30
申请号:US17123836
申请日:2020-12-16
Applicant: Samsung Display Co., LTD.
Inventor: TAEYOUNG PARK , JUNGSEON PARK , JUN-HEE LEE , HYUNWOO LEE
Abstract: A method of fabricating a display device may include disposing a display panel on a stage to be parallel to an XZ-plane defined by a horizontal X-axis and a vertical Z-axis, measuring a height of a first side surface of the display panel in a direction of the Z-axis, rotating the stage such that the first side surface is parallel to a reference horizontal line in case that a result of the measured height indicates that the first side surface includes an inclined surface, moving the display panel in a direction of the Z-axis such that a first pad disposed on the first side surface overlaps the reference horizontal line, and bonding a second pad of a printed circuit board with the first pad.
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