公开(公告)号：US11038046B2

公开(公告)日：2021-06-15

申请号：US16527042

申请日：2019-07-31

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Po-Yu Yang

IPC: H01L29/778 ,  H01L21/762 ,  H01L29/20 ,  H01L29/66

Abstract: A high electron mobility transistor, including an active area, a buffer layer on the active area, a channel layer on the buffer layer, a barrier layer on the channel layer, and gate, source and drain on the barrier layer, and a trench isolation structure adjacent and surrounding the channel layer and the barrier layer to apply stress and modify two-dimension electron gas (2DEG) or two-dimension hole gas (2DHG) of the high electron mobility transistor.

公开(公告)号：US10985271B2

公开(公告)日：2021-04-20

申请号：US16411053

申请日：2019-05-13

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Po-Yu Yang

IPC: H01L29/778 ,  H01L21/02 ,  H01L29/205 ,  H01L29/40 ,  H01L29/417 ,  H01L29/423 ,  H01L29/66

Abstract: A method for fabricating high electron mobility transistor (HEMT) includes the steps of: forming a buffer layer on a substrate; forming a first barrier layer on the buffer layer; forming a patterned mask on the first barrier layer; forming a second barrier layer adjacent to two sides of the patterned mask; removing the patterned mask to form a recess; forming a gate electrode in the recess; and forming a source electrode and a drain electrode adjacent to two sides of the gate electrode.

公开(公告)号：US20200220027A1

公开(公告)日：2020-07-09

申请号：US16819148

申请日：2020-03-15

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Po-Yu Yang

IPC: H01L29/786 ,  H01L29/78 ,  H01L29/66 ,  H01L29/775 ,  H01L29/06 ,  H01L27/088 ,  H01L27/12 ,  H01L27/092 ,  H01L29/423

Abstract: A nanowire transistor structure includes a substrate. A first nanowire is suspended on the substrate. A first gate line crosses and surrounds the first nanowire. The first gate line includes a first end and a second end. A second gate line crosses and surrounds the first nanowire. The second gate line includes a third end and a fourth end. An interlayer dielectric encapsulates the first end, the second end, the third end and the fourth end. A first distance between the first end and the first nanowire is smaller than a third distance between the third end and the first nanowire.

公开(公告)号：US20190318964A1

公开(公告)日：2019-10-17

申请号：US16297702

申请日：2019-03-10

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Wei-Chi Lee ,  Han-Tsun Wang ,  Chang-Hung Chen ,  Po-Yu Yang ,  Mei-Ying Fan ,  Mu-Kai Tsai ,  Guan-Shyan Lin ,  Tsz-Hui Kuo ,  Cheng-Hsiung Chen

IPC: H01L21/8234 ,  H01L27/11 ,  H01L27/088

Abstract: An inverter structure includes a first fin structure and a second fin structure respectively disposed within a P-type transistor region and an N-type transistor region on a substrate. Agate line is disposed on the substrate. A first end of the gate line is within the P-type transistor region, and a second end of the gate line is within the N-type transistor region. Two dummy gate lines are disposed at two sides of the gate line. Each dummy gate line has a third end within the P-type transistor region, and a fourth end within the N-type transistor region. A distance between the first end and the first fin structure is greater than a distance between the third end and the first fin structure. The distance between the second end and the second fin structure is smaller than a distance between the fourth end and the second fin structure.

公开(公告)号：US12266722B2

公开(公告)日：2025-04-01

申请号：US17207719

申请日：2021-03-21

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Po-Yu Yang ,  Hsun-Wen Wang

IPC: H01L29/778 ,  H01L29/66

Abstract: The present disclosure relates to a semiconductor device and its manufacturing method, and the semiconductor device includes a substrate, a channel layer, a gate electrode, a first electrode, a second electrode, and a metal plate. The channel layer is disposed on the substrate, and the gate electrode is disposed on the channel layer. The first electrode and the second electrode are disposed on the channel layer, at two opposite sides of the gate electrode respectively. The metal plate is disposed over the channel layer, between the first electrode and the gate electrode. The metal plate includes a first extending portion and a second extending portion, wherein the second extending portion extends towards the substrate without contacting the channel layer, and the first extending portion extends toward and directly contacts the first electrode or the second electrode.

公开(公告)号：US12255245B2

公开(公告)日：2025-03-18

申请号：US18590985

申请日：2024-02-29

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Po-Yu Yang

IPC: H01L29/423 ,  H01L27/092 ,  H01L29/786

Abstract: A manufacturing method of a semiconductor device includes the following steps. A first transistor is formed on a substrate. The first transistor includes a first semiconductor channel structure and two first source/drain structures. The first semiconductor channel structure includes first horizontal portions and a first vertical portion. The first horizontal portions are stacked in a vertical direction and separated from one another. Each of the first horizontal portions is elongated in a horizontal direction. The first vertical portion is elongated in the vertical direction and connected with the first horizontal portions. The two first source/drain structures are disposed at two opposite sides of each of the first horizontal portions in the horizontal direction respectively. The two first source/drain structures are connected with the first horizontal portions. A top surface of the first vertical portion in and a top surface of one of the first horizontal portions are coplanar.

公开(公告)号：US20250040195A1

公开(公告)日：2025-01-30

申请号：US18917979

申请日：2024-10-16

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Po-Yu Yang

IPC: H01L29/423 ,  H01L29/66 ,  H01L29/792

Abstract: A semiconductor structure includes a substrate, an insulating layer disposed on the substrate, an active layer disposed on the insulating layer and including a device region, and a charge trap layer in the substrate and extending between the insulating layer and the substrate and directly under the device region. The charge trap layer includes a plurality of n-type first doped regions and a plurality of p-type second doped regions alternately arranged and directly in contact with each other to form a plurality of interrupted depletion junctions.

公开(公告)号：US12142676B2

公开(公告)日：2024-11-12

申请号：US18227329

申请日：2023-07-28

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Po-Yu Yang ,  Hsun-Wen Wang

IPC: H01L29/778 ,  H01L29/06 ,  H01L29/66

Abstract: A method for forming a high electron mobility transistor includes the steps of forming an epitaxial stack on a substrate, forming a gate structure on the epitaxial stack, forming an insulating layer covering the epitaxial stack and the gate structure, forming a passivation layer on the insulating layer, forming an opening on the gate structure and through the passivation layer to expose the insulating layer, and removing a portion of the insulating layer through the opening to form an air gap between the gate structure and the passivation layer.

公开(公告)号：US20240355920A1

公开(公告)日：2024-10-24

申请号：US18761282

申请日：2024-07-01

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Po-Yu Yang ,  Hsun-Wen Wang

IPC: H01L29/778 ,  H01L29/06 ,  H01L29/66

CPC classification number: H01L29/7786 ,  H01L29/0649 ,  H01L29/66462 ,  H01L29/6656

Abstract: A high electron mobility transistor includes an epitaxial stack on a substrate, a gate structure on the epitaxial stack, a passivation layer on the epitaxial stack and the gate structure, and an air gap between the passivation layer and the gate structure. The gate structure includes a semiconductor gate layer and a metal gate layer on the semiconductor gate layer. The air gap is in direct contact with a sidewall of the passivation layer, a sidewall of the metal gate layer, a sidewall and a top surface of the semiconductor gate layer.

公开(公告)号：US12051740B2

公开(公告)日：2024-07-30

申请号：US17367640

申请日：2021-07-06

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Po-Yu Yang ,  Hsun-Wen Wang

IPC: H01L29/778 ,  H01L29/06 ,  H01L29/66

CPC classification number: H01L29/7786 ,  H01L29/0649 ,  H01L29/66462 ,  H01L29/6656

Abstract: A high electron mobility transistor includes an epitaxial stack on a substrate, a gate structure on the epitaxial stack, a passivation layer on the epitaxial stack and covering the gate structure, and an air gap between the passivation layer and the gate structure.