Abstract:
An adhering detection apparatus includes a light source to emit probe light to a light translucent object during an emission period, and to stop an emission of the probe light to the light translucent object during a non-emission period, a light receiver to receive light coming from the light translucent object during the emission period and the non-emission period of the light source, and an adhering detection processor to perform an adhering detection processing for detecting a substance adhering to the light translucent object based on light quantity of the light coming from the light translucent object and received by the light receiver, and to output a detection result of the adhering detection processing. The adhering detection processor selectively performs one or more processes depending on the light quantity of the light received by the light receiver during the non-emission period of the light source.
Abstract:
A polarized light imaging apparatus is provided. In an embodiment, the apparatus comprises a light source for producing light beams; an illumination optic coupled to the light source for guiding the light beams towards the sample; a linear polarizer coupled to the illumination optic and configured to produce a linearly polarized light towards the sample respective of the light beams; a TIR birefringent polarizing prism (BPP) coupled to the sample to maximize a refraction difference between ordinary waves and extraordinary waves of light returning from the sample; and a detection optic unit coupled to the non-TIR BPP for guiding the light waves returning from the sample towards a single polarization sensitive sensor element (SE), the SE is configured to capture at least one frame of the sample respective of the light waves returning from the superficial single-scattering layer of the sample apart from the deeper diffuse layer.
Abstract:
The disclosed device, which, using an electron microscope or the like, minutely observes defects detected by an optical appearance-inspecting device or an optical defect-inspecting device, can reliably insert a defect to be observed into the field of an electron microscope or the like, and can be a device of a smaller scale. The electron microscope, which observes defects detected by an optical appearance-inspecting device or by an optical defect-inspecting device, has a configuration wherein an optical microscope that re-detects defects is incorporated, and a spatial filter and a distribution polarization element are inserted at the pupil plane when making dark-field observations using this optical microscope. The electron microscope, which observes defects detected by an optical appearance-inspecting device or an optical defect-inspecting device, has a configuration wherein an optical microscope that re-detects defects is incorporated, and a distribution filter is inserted at the pupil plane when making dark-field observations using this optical microscope.
Abstract:
An illumination apparatus including: a traveling wave forming unit that is disposed in an optical path of a light flux emitted from a light source unit and that is configured to form a sonic traveling wave in a direction traversing the emitted light flux; and an illumination optical system that is configured to form, on a plane to be observed, position-variable interference fringes caused by a plurality of diffracted light beams generated from the traveling wave forming unit.
Abstract:
Disclosed herein is an apparatus for and method of measuring bio-chips, which can implement an illumination method of a novel type that illuminates a bio sample (which may be also referred to as a “bio specimen”) through a side face of a substrate using a diffusion plate to form an evanescent field by the illumination light over the entire surface of a substrate so as to uniformly secure brightness of the illuminated light over a wide area of a substrate, thereby more efficiently measuring fluorescence information of a bio-chip over a wide field of view.