公开(公告)号：US09620341B2

公开(公告)日：2017-04-11

申请号：US15189871

申请日：2016-06-22

Applicant: KLA-Tencor Corporation

Inventor： Yung-Ho Alex Chuang ,  David L. Brown ,  John Fielden

IPC: H01J40/06 ,  H01J43/08 ,  H01L31/0216 ,  H01L31/103

CPC classification number: H01J40/06 ,  H01J43/08 ,  H01L31/02161 ,  H01L31/103

Abstract: A system for inspecting a sample including a detector, either a photomultiplier tube or an electron-bombarded image sensor, that is positioned to receive light from the sample. The detector includes a semiconductor photocathode and a photodiode. Notably, the photodiode includes a p-doped semiconductor layer, an n-doped semiconductor layer formed on a first surface of the p-doped semiconductor layer to form a diode, and a pure boron layer formed on a second surface of the p-doped semiconductor layer. The semiconductor photocathode includes silicon, and further includes a pure boron coating on at least one surface.

公开(公告)号：US09543130B2

公开(公告)日：2017-01-10

申请号：US14934107

申请日：2015-11-05

Applicant: KLA-Tencor Corporation

Inventor： Derek Cameron Mackay

IPC: H01J43/18 ,  H01J43/10 ,  H01J43/08

CPC classification number: H01J43/10 ,  H01J43/08 ,  H01J43/18

Abstract: An internal portion of a photomultiplier tube (PMT) having a reflective photocathode array, and a method for manufacturing the same, are provided. The internal portion of the PMT comprises the reflective photocathode array and at least one dynode structure corresponding to the array of reflective photocathodes. Each reflective photocathode receives light and from the light, generates photoelectrons which then travel towards the at least one dynode structure. Upon the photoelectrons making contact with the at least one dynode structure, the photoelectrons are multiplied.

Abstract translation: 提供了具有反射光电阴极阵列的光电倍增管（PMT）的内部部分及其制造方法。 PMT的内部部分包括反射光电阴极阵列和对应于反射光电阴极阵列的至少一个倍增极结构。 每个反射光电阴极接收光并且从光产生光电子，然后光电子朝向至少一个倍增电极结构行进。 当光电子与至少一个倍增极结构接触时，光电子被倍增。

公开(公告)号：US09329285B2

公开(公告)日：2016-05-03

申请号：US14597129

申请日：2015-01-14

Applicant: Rapiscan Systems, Inc.

Inventor： Tsahi Gozani ,  Michael Joseph King ,  Donald Bennett Hilliard ,  Joseph Bendahan ,  William Gerhardus Johannes Langeveld

IPC: G01T1/164 ,  G01T3/06 ,  G01T1/20 ,  G01T1/203 ,  G01T3/00

CPC classification number: G01T3/06 ,  G01T1/167 ,  G01T1/2008 ,  G01T1/203 ,  G01T3/008 ,  G01V5/0075 ,  G01V5/0091 ,  H01J43/08 ,  H01J43/30

Abstract: The present invention provides a gamma-neutron detector based on mixtures of thermal neutron absorbers that produce heavy-particle emission following thermal capture. In one configuration, B-10 based detector is used in a parallel electrode plate geometry that integrates neutron moderating sheets, such as polyethylene, on the back of the electrode plates to thermalize the neutrons and then detect them with high efficiency. The moderator can also be replaced with plastic scintillator sheets viewed with a large area photomultiplier tube to detect gamma-rays as well. The detector can be used in several scanning configurations including portal, drive-through, drive-by, handheld and backpack, etc.

公开(公告)号：US20160091618A1

公开(公告)日：2016-03-31

申请号：US14597129

申请日：2015-01-14

Applicant: Rapiscan Systems, Inc.

Inventor： Tsahi Gozani ,  Michael Joseph King ,  Donald Bennett Hilliard ,  Joseph Bendahan

IPC: G01T3/06 ,  G01T1/203 ,  G01T3/00 ,  G01T1/20

CPC classification number: G01T3/06 ,  G01T1/167 ,  G01T1/2008 ,  G01T1/203 ,  G01T3/008 ,  G01V5/0075 ,  G01V5/0091 ,  H01J43/08 ,  H01J43/30

Abstract: The present invention provides a gamma-neutron detector based on mixtures of thermal neutron absorbers that produce heavy-particle emission following thermal capture. In one configuration, B-10 based detector is used in a parallel electrode plate geometry that integrates neutron moderating sheets, such as polyethylene, on the back of the electrode plates to thermalize the neutrons and then detect them with high efficiency. The moderator can also be replaced with plastic scintillator sheets viewed with a large area photomultiplier tube to detect gamma-rays as well. The detector can be used in several scanning configurations including portal, drive-through, drive-by, handheld and backpack, etc.

Abstract translation: 本发明提供了一种基于热中子吸收剂的混合物的γ中子检测器，其在热捕获之后产生重粒子发射。 在一种配置中，基于B-10的检测器用于平行电极板几何形状，其将中子调节片（例如聚乙烯）集成在电极板的背面上，以使中子热化，然后以高效率进行检测。 调节剂也可以用用大面积光电倍增管观察的塑料闪烁体片替代，以检测伽马射线。 检测器可用于多种扫描配置，包括门禁，驱动器，驱动器，手持和背包等。

公开(公告)号：US20150380224A1

公开(公告)日：2015-12-31

申请号：US14769003

申请日：2014-02-24

Applicant: HOYA CORPORATION

Inventor： Takashi FUSHIE

IPC: H01J43/08 ,  H01J9/12 ,  H01J47/02

CPC classification number: H01J43/08 ,  G01T1/28 ,  G01T1/2935 ,  H01J9/125 ,  H01J47/026 ,  H01J47/06

Abstract: An electronic amplifying substrate, including: a glass base material having an insulating property; conductive layers formed on both main surfaces of the glass base material; and a plurality of through holes formed on a lamination body of the glass base material and the conductive layer, wherein an electric field is formed in the through hole by a potential difference between both conductive layers during application of a voltage to a surface of the conductive layer so that an electron avalanche amplification occurs in the through hole, and an insulation part is formed on at least one main surface of the glass base material, with one of the end portions of the insulation part formed to surround an opening part of the through hole of the glass base material, and the other end portion formed in contact with the end portions of the conductive layers.

Abstract translation: 一种电子放大基板，包括：具有绝缘性的玻璃基材; 形成在玻璃基材的两个主表面上的导电层; 以及多个通孔，其形成在所述玻璃基材和所述导电层的层叠体上，其中，在对所述导电层的表面施加电压期间，通过所述两个导电层之间的电位差在所述通孔中形成电场 使得在通孔中发生电子雪崩放大，并且绝缘部分形成在玻璃基材的至少一个主表面上，绝缘部分的一个端部形成为围绕通孔的开口部分 玻璃基材的孔，另一端部形成为与导电层的端部接触。

公开(公告)号：US08993970B2

公开(公告)日：2015-03-31

申请号：US14082658

申请日：2013-11-18

Applicant: Rapiscan Systems, Inc.

Inventor： Edward James Morton

IPC: G01T1/161 ,  H01J43/30 ,  G01T1/167 ,  G01V5/00 ,  H01J43/08 ,  G01T3/06 ,  G01T1/16 ,  G01T1/208 ,  H01J40/04 ,  H01J43/18

CPC classification number: H01J43/30 ,  G01T1/16 ,  G01T1/167 ,  G01T1/208 ,  G01T3/06 ,  G01V5/0025 ,  G01V5/0091 ,  H01J40/04 ,  H01J43/08 ,  H01J43/18

Abstract: The invention provides a switchable photomultiplier switchable between a detecting state and a non-detecting state including a cathode upon which incident radiation is arranged to impinge. The photomultiplier also includes a series of dynodes arranged to amplify a current created at the cathode upon detection of photoradiation. The invention also provides a detection system arranged to detect radiation-emitting material in an object. The system includes a detector switchable between a detecting state in which the detector is arranged to detect radiation and a non-detecting state in which the detector is arranged to not detect radiation. The system further includes a controller arranged to control switching of the detector between the states such that the detector is switched to the non-detecting state while an external radiation source is irradiating the object.

Abstract translation: 本发明提供了一种可切换的光电倍增器，其可在检测状态和非检测状态之间切换，包括入射辐射被布置成入射的阴极。 光电倍增管还包括一系列倍增电极，其布置成在检测到光辐射时放大阴极产生的电流。 本发明还提供了一种检测系统，用于检测物体中的辐射发射材料。 该系统包括可在检测器被布置成检测辐射的检测状态和检测器被布置为不检测辐射的非检测状态之间切换的检测器。 该系统还包括控制器，其被布置成控制检测器在状态之间的切换，使得当外部辐射源照射对象时，检测器切换到非检测状态。

公开(公告)号：US20110221336A1

公开(公告)日：2011-09-15

申请号：US13113604

申请日：2011-05-23

Applicant: Hiroyuki KYUSHIMA ,  Hideki Shimoi ,  Akihiro Kageyama ,  Keisuke Inoue ,  Masuo Ito

Inventor： Hiroyuki KYUSHIMA ,  Hideki Shimoi ,  Akihiro Kageyama ,  Keisuke Inoue ,  Masuo Ito

IPC: H01J40/06

CPC classification number: H01J43/08 ,  H01J9/26 ,  H01J43/04 ,  H01J43/24

Abstract: The present invention relates to a photomultiplier having a structure for making it possible to easily realize high detection accuracy and fine processing, and a method of manufacturing the same. The photomultiplier comprises an enclosure having an inside kept in a vacuum state, whereas a photocathode emitting electrons in response to incident light, an electron multiplier section multiplying in a cascading manner the electron emitted from the photocathode, and an anode for taking out a secondary electron generated in the electron multiplier section are arranged in the enclosure. A part of the enclosure is constructed by a glass substrate having a flat part, whereas each of the electron multiplier section and anode is two-dimensionally arranged on the flat part in the glass substrate.

Abstract translation: 本发明涉及具有能够容易地实现高检测精度和精细处理的结构的光电倍增管及其制造方法。 光电倍增管包括具有内部保持在真空状态的外壳，而响应于入射光发射电子的光电阴极，电子倍增器部分以级联方式从光电阴极发射的电子和用于取出二次电子的阳极 在电子倍增器部分中产生的电极被布置在外壳中。 外壳的一部分由具有平坦部分的玻璃基板构成，而电子倍增器部分和阳极中的每一个二维地布置在玻璃基板的平坦部分上。

公开(公告)号：US07462090B1

公开(公告)日：2008-12-09

申请号：US09811095

申请日：2001-03-16

Applicant: Joseph P. Estrera ,  Adriana Giordana ,  John W. Glesener

Inventor： Joseph P. Estrera ,  Adriana Giordana ,  John W. Glesener

IPC: H01J9/02

CPC classification number: H01J31/507 ,  H01J43/08 ,  H01J43/246 ,  H01J2231/50073 ,  H01J2231/5016

Abstract: A method for detecting radiation is disclosed that includes forming a detector having a photocathode (22) with a protective layer (22c) of cesium, oxygen and fluorine; a microchannel plate (MCP) (24); and an electron receiver (26). Radiation is received at the photocathode (22). The photocathode (22) discharges electrons (34) in response to the received photons. Discharged electrons (34) are accelerated from the photocathode (22) to the input face (24a) of the microchannel plate (24). The electrons (34) are received at the input face (24a) of the microchannel plate (24). A cascade of secondary emission electrons (36) is generated in the microchannel plate (24) in response to the received electrons (34). The secondary emission electrons (36) are emitted from the output face (24b) of the microchannel plate (24). Secondary emission electrons (36) are received at the electron receiver (26). An output characteristic of the secondary emission electrons (36) is produced.

Abstract translation: 公开了一种用于检测辐射的方法，包括形成具有光电阴极（22）的检测器，其具有铯，氧和氟的保护层（22c）; 微通道板（MCP）（24）; 和电子接收器（26）。 在光电阴极（22）处接收辐射。 光电阴极（22）响应于接收到的光子而放电电子（34）。 放电的电子（34）从光电阴极（22）被加速到微通道板（24）的输入面（24a）。 电子（34）被容纳在微通道板（24）的输入面（24a）处。 响应于所接收的电子，在微通道板（24）中产生级联的二次发射电子（36）。 二次发射电子（36）从微通道板（24）的输出面（24b）发射。 二次发射电子（36）被接收在电子接收器（26）处。 产生二次发射电子（36）的输出特性。

公开(公告)号：US20080061690A1

公开(公告)日：2008-03-13

申请号：US10585355

申请日：2004-12-24

Applicant: Takayuki Ohmura ,  Suenori Kimura ,  Masuo Ito

Inventor： Takayuki Ohmura ,  Suenori Kimura ,  Masuo Ito

IPC: H01J43/18

CPC classification number: H01J43/08

Abstract: Therefore, use of the electron lens forming electrodes 115 and 117 flattens the potential distribution in the longitudinal direction of the first dynode 107a in front of the first dynode 107a, that is, between the dynodes 107a and 107b. As a result, both photoelectrons emitted from the peripheral edge of the cathode 3 and photoelectrons emitted from the center region of the cathode 3 travel substantially in a straight line from the first dynode 107a after being multiplied thereby to impinge on the second dynode 107b. Since this structure reduces deviation in the transit distance of photoelectrons based on the irradiated position of light on the cathode 3, the structure also reduces the cathode transit time difference (CTTD) according to the irradiated position of light and a transit time spread (TTS) when light is irradiated on the entire surface. In particular, since the transit distance between the dynodes 107a and 107b is greater than that between other dynodes, the CTTD and TTS can be effectively reduced by providing the electron lens forming electrodes 115 and 117.

Abstract translation: 因此，使用电子透镜形成电极115和117使第一倍增电极107a前面的第一倍增电极107a的长度方向上的电位分布平坦化，即在倍增电极107a和107b之间。 结果，从阴极3的周缘发射的光电子和从阴极3的中心区域发射的光电子从乘法后的第一倍增电极107a基本上以直线行进，从而撞击在第二倍增电极107b上 。 由于该结构基于阴极3上的照射位置减少光电子的传送距离的偏差，所以结构还根据光的照射位置和通过时间扩展（TTS）减小阴极通过时间差（CTTD） 当光照射在整个表面上时。 特别地，由于倍增电极107a和107b之间的传输距离大于其他倍增电极之间的传输距离，所以可以通过提供电子透镜形成电极115和117来有效地减小CTTD和TTS。

公开(公告)号：US20060038473A1

公开(公告)日：2006-02-23

申请号：US10969319

申请日：2004-10-21

Applicant: Tomoko Mochizuki ,  Minoru Niigaki ,  Toru Hirohata ,  Kuniyoshi Mori

Inventor： Tomoko Mochizuki ,  Minoru Niigaki ,  Toru Hirohata ,  Kuniyoshi Mori

IPC: H01J31/00 ,  H01J31/26 ,  H01J40/06

CPC classification number: H01J1/34 ,  H01J1/78 ,  H01J43/08 ,  H01J2231/50

Abstract: Provided are a photocathode plate capable of stably achieving a high sensitive property, and an electron tube using such a photocathode plate. In a photomultiplier tube 1, an insulating layer 63 is formed between a semiconductor electron emission layer 51 in a photocathode plate 23A, and a first electrode 65 electrically connected to an electron releasing portion 59. This insulating layer 63 permits the photocathode plate 23A to be cleaned by heat cleaning at a high temperature, in a stage before formation of an active layer 61 on an exposed region of the semiconductor electron emission layer 51 in the electron releasing portion 59. This makes it feasible to effectively clean the exposed region of the semiconductor electron emission layer 51 in the electron releasing portion 59 and to stabilize the physical properties of the exposed region. In consequence, a higher sensitive property can be stably achieved in the photocathode plate 23A and in the photomultiplier tube 1 using the photocathode plate 23A.

Abstract translation: 提供能够稳定地实现高灵敏度的光电阴极板和使用这种光电阴极板的电子管。 在光电倍增管1中，在光电阴极板23A中的半导体电子发射层51和与电子释放部分59电连接的第一电极65之间形成绝缘层63。 该绝缘层63允许在电子释放部分59中的半导体电子发射层51的暴露区域上形成有源层61之前的阶段，通过在高温下的热清洗来清洁光电阴极板23A。 这使得有效地清洁电子释放部分59中的半导体电子发射层51的暴露区域并且稳定暴露区域的物理性能是可行的。 因此，在光电阴极板23A和使用光电阴极板23A的光电倍增管1中可以稳定地实现更高的敏感性。