WIRELESS RESONANT MAGNETIC ACUTATION FOR UNTETHERED MICROROBOTS
    91.
    发明申请
    WIRELESS RESONANT MAGNETIC ACUTATION FOR UNTETHERED MICROROBOTS 有权
    无线通信微波无线共振磁共振

    公开(公告)号:US20100264776A1

    公开(公告)日:2010-10-21

    申请号:US12667162

    申请日:2008-06-30

    CPC classification number: H02K33/00 H02K99/00 H02K2201/18

    Abstract: The invention concerns a novel magnetic actuator mechanism suitable for use on untethered microrobots. It relies on the interaction of magnetic bodies in an external magnetic field. By an oscillating field, the bodies are driven to oscillatory motion, and the energy stored in the oscillation is harnessed. The untethered wireless microactuator according to the invention comprises a mechanical system with at least two magnetic bodies resiliently connected to one another, wherein the mechanical system is capable of being oscillated, in particular driven to resonance, by an oscillating external magnetic field. The actuation system according to the invention comprises such a microrobot as well as a magnetic field generator with adjustable field direction and oscillation frequency. The actuation method comprises exciting two or more magnetic bodies with an oscillating magnetic field such that they perform mechanical oscillations, and harnessing this energy for propulsion of the device or to fulfill other tasks.

    Abstract translation: 本发明涉及一种新颖的磁致动器机构,适用于无阻尼微型机器人。 它依赖于磁体在外部磁场中的相互作用。 通过振荡场,机体被驱动到振荡运动,并且利用存储在振荡中的能量。 根据本发明的无捆绑式无线微型致动器包括具有彼此弹性连接的至少两个磁体的机械系统,其中机械系统能够通过振荡的外部磁场而被振荡,特别是被驱动以进行谐振。 根据本发明的致动系统包括这种微型机器人以及具有可调的场方向和振荡频率的磁场发生器。 致动方法包括激励具有振荡磁场的两个或更多个磁体,使得它们执行机械振荡,并利用该能量来推动装置或完成其它任务。

    LINEAR MOTOR, AND STAGE APPARATUS, EXPOSURE APPARATUS, AND METHOD FOR MANUFACTURING DEVICE USING THE SAME
    92.
    发明申请
    LINEAR MOTOR, AND STAGE APPARATUS, EXPOSURE APPARATUS, AND METHOD FOR MANUFACTURING DEVICE USING THE SAME 有权
    线性电动机和阶段装置,曝光装置以及使用该装置制造装置的方法

    公开(公告)号:US20100253930A1

    公开(公告)日:2010-10-07

    申请号:US12749954

    申请日:2010-03-30

    Applicant: Atsushi Ito

    Inventor: Atsushi Ito

    Abstract: A linear motor is provided with a first member including a magnet and a second member including a coil facing the magnet, which are moved relative to each other. The second member includes a thermal conduction member, a thermal insulation member, the coil, and a first cooling unit, which are disposed in this order from the magnet side, and a second cooling unit configured to cool the thermal conduction member being disposed outside an area in which the magnet and the coil face each other.

    Abstract translation: 线性马达设置有包括磁体的第一构件和包括相对于彼此移动的面对磁体的线圈的第二构件。 第二构件包括从磁体侧依次设置的导热构件,绝热构件,线圈和第一冷却单元,以及第二冷却单元,其被配置为将布置在外部的导热构件 磁体和线圈彼此面对的区域。

    Driving apparatus, exposure apparatus, and device manufacturing method
    93.
    发明授权
    Driving apparatus, exposure apparatus, and device manufacturing method 有权
    驱动装置,曝光装置和装置的制造方法

    公开(公告)号:US07800258B2

    公开(公告)日:2010-09-21

    申请号:US12203771

    申请日:2008-09-03

    Applicant: Atsushi Ito

    Inventor: Atsushi Ito

    Abstract: A driving apparatus includes a mover having a magnet, and a stator having a coil. The driving apparatus is adapted to control the electric current to be applied to the coil to cause relative movement between the mover and the stator. The stator includes a coil holding member configured to hold the coil, a supporting member configured to support the coil holding member movably in first and second directions, a restriction member configured to restrict movement of the coil holding member in the first direction and to allow movement of the coil holding member in the second direction, and a biasing unit configured to press the coil holding member against the restriction member.

    Abstract translation: 驱动装置包括具有磁体的动子和具有线圈的定子。 驱动装置适于控制施加到线圈的电流以引起动子和定子之间的相对移动。 定子包括:线圈保持构件,其构造成保持线圈;支撑构件,其构造成在第一和第二方向上可移动地支撑线圈保持构件;限制构件,构造成限制线圈保持构件沿第一方向的移动并允许移动 所述线圈保持构件沿所述第二方向施加,所述施力单元构造成将所述线圈保持构件压靠在所述限制构件上。

    Linear motor, linear motor system, and electronic-circuit-component mounting machine including the linear motor
    94.
    发明申请
    Linear motor, linear motor system, and electronic-circuit-component mounting machine including the linear motor 有权
    直线电机,直线电机系统和包括线性电机的电子电路部件安装机

    公开(公告)号:US20100181848A1

    公开(公告)日:2010-07-22

    申请号:US12654688

    申请日:2009-12-29

    Applicant: Keiji Nagasaka

    Inventor: Keiji Nagasaka

    CPC classification number: H02K41/03 H02K9/18 H02K9/20 H02K9/22 H02K2201/18

    Abstract: A linear motor including permanent magnets fixed on an elongate yoke such that polarities of the permanent magnets alternately change, and an armature having cores and coils wound on the respective cores, wherein each row of the permanent magnets and the armature are moved relative to each other along a straight line by application of an electric current to the coils, each core extending in a first direction perpendicular to the permanent magnet row, the cores being arranged in a second direction perpendicular to the first direction and disposed on the cores such that the coils on the cores adjacent to each other are arranged in a zigzag pattern and spaced apart from each other in the first direction, with a gap left therebetween, wherein the armature includes a heat pipe having opposite end portions one of which is inserted in the gap and the other of which extends outwardly of the gap, and fins fixed to the other end portion of the heat pipe.

    Abstract translation: 一种线性电动机,其包括固定在细长磁轭上的永磁体,使得永磁体的极性交替变化,以及具有卷绕在各个芯上的磁芯和线圈的电枢,其中每排永磁体和电枢相对于彼此移动 通过向线圈施加电流沿着直线,每个芯沿垂直于永磁体列的第一方向延伸,芯沿垂直于第一方向的第二方向布置,并且设置在芯上,使得线圈 在彼此相邻的芯上排列成锯齿形图案并且在第一方向上彼此间隔开,间隙留在其间,其中电枢包括具有相对端部的热管,其中一个端部插入间隙中, 另一个从间隙向外延伸,翅片固定在热管的另一端部。

    MONOLITHIC STAGE POSITIONING SYSTEM AND METHOD
    95.
    发明申请
    MONOLITHIC STAGE POSITIONING SYSTEM AND METHOD 有权
    单片机定位系统及方法

    公开(公告)号:US20100164305A1

    公开(公告)日:2010-07-01

    申请号:US12347551

    申请日:2008-12-31

    Abstract: A magnetically levitated monolithic stage positioning system includes linear three phase motors and coil windings connected to the monolithic stage that interact with a ferromagnetic base. The linear three phase motors may be excited to provide motion in an X-axis direction, motion in a Y-axis direction, and rotation about a Z-axis. The monolithic stage is levitated on an air bearing. The plurality of coil windings connected to the monolithic stage may serve to magnetically preload the air bearing. The plurality of coil windings may be excited to provide motion in a Z-axis direction and rotation of the monolithic stage about the X-axis and about the Y-axis.

    Abstract translation: 磁悬浮单片级定位系统包括连接到与铁磁基座相互作用的单片级的线性三相电动机和线圈绕组。 可以激励线性三相电动机以提供X轴方向的运动,Y轴方向的运动和围绕Z轴的旋转。 整体式悬挂在空气轴承上。 连接到单片级的多个线圈绕组可以用于磁性预加载空气轴承。 可以激励多个线圈绕组以提供Z轴方向的运动和单片级围绕X轴和Y轴的旋转。

    Actuator having an inputting function
    96.
    发明授权
    Actuator having an inputting function 有权
    具有输入功能的执行器

    公开(公告)号:US07719516B2

    公开(公告)日:2010-05-18

    申请号:US10909329

    申请日:2004-08-03

    CPC classification number: H02K41/0354 H02K2201/18

    Abstract: An actuator includes: a magnetic field generator that has different magnetic poles alternately arranged in a plane, with a predetermined position being the center of the magnetic poles; a coil holder that holds a plurality of coils that are radially arranged and face the magnetic field generator, relative motion being caused between the magnetic field generator and the coil holder; and an electromagnetic conversion unit that detects the relative motion and is mounted on either the magnetic field generator or the coil holder.

    Abstract translation: 致动器包括:具有交替布置在平面中的不同磁极的磁场发生器,其中预定位置是磁极的中心; 保持径向布置并面对磁场发生器的多个线圈的线圈架,在磁场发生器和线圈架之间产生相对运动; 以及电磁转换单元,其检测相对运动并安装在磁场发生器或线圈架上。

    Optical element driving device and imaging apparatus
    97.
    发明授权
    Optical element driving device and imaging apparatus 有权
    光学元件驱动装置及成像装置

    公开(公告)号:US07715124B2

    公开(公告)日:2010-05-11

    申请号:US12269355

    申请日:2008-11-12

    Applicant: Daisuke Ito

    Inventor: Daisuke Ito

    CPC classification number: G02B7/023 G02B7/102 H02K41/0356 H02K2201/18

    Abstract: A lens driving device includes a lens, a moving member that supports the lens, a stationary member that movably supports the moving member, a pitch drive mechanism that drives the moving member in the pitch correction direction, and a yaw drive mechanism that drives in the yaw correction direction. The pitch drive mechanism has first and second magnets provided to the stationary member, and first and second coils provided to the moving member. The yaw drive mechanism has a third magnet provided to the stationary member, and a third coil provided to the moving member. The first and second coils are arranged on opposite sides of the lens when viewed in a third direction that is perpendicular to the pitch and yaw correction directions, and the third coil is arranged on the same side as the first coil with respect to the lens when viewed in the third direction.

    Abstract translation: 透镜驱动装置包括透镜,支撑透镜的移动构件,可移动地支撑移动构件的静止构件,在俯仰校正方向上驱动移动构件的俯仰驱动机构,以及驱动在俯仰校正方向上的偏航驱动机构 偏航校正方向。 变桨驱动机构具有设置在固定构件上的第一和第二磁体,以及设置在移动构件上的第一和第二线圈。 偏转驱动机构具有设置在静止部件上的第三磁体和设置在移动部件上的第三线圈。 当从垂直于俯仰和偏航校正方向的第三方向观察时,第一和第二线圈布置在透镜的相对侧上,并且第三线圈相对于透镜布置在与第一线圈相同的一侧上 从第三个方向看。

    PLANAR MOTOR WITH WEDGE SHAPED MAGNETS AND DIAGONAL MAGNETIZATION DIRECTIONS
    98.
    发明申请
    PLANAR MOTOR WITH WEDGE SHAPED MAGNETS AND DIAGONAL MAGNETIZATION DIRECTIONS 审中-公开
    具有楔形磁铁的平面电机和对角磁化方向

    公开(公告)号:US20100090545A1

    公开(公告)日:2010-04-15

    申请号:US12564578

    申请日:2009-09-22

    CPC classification number: H02K1/17 H02K1/278 H02K41/031 H02K2201/18

    Abstract: A planar motor (32) for positioning a stage (44) along a first axis, and along a second axis that is perpendicular to the first axis includes a conductor array (52) and a magnet array (34). The conductor array (52) includes at least one conductor (256). The magnet array (34) is positioned near the conductor array (52) and is spaced apart from the conductor array (52) along a third axis that is perpendicular to the first axis and the second axis. The magnet array (34) includes a first magnet unit (264) having a first diagonal magnet (D1) with a diagonal magnetization direction (268) that is diagonal to the first axis, the second axis and the third axis. This leads to strong magnetic fields above the magnet array (34) and strong force generation capability. Further, the planar motor (32) provided herein has less stray magnetic fields that extend beyond the magnet array (34) than a comparable prior art planar motor. Moreover, the first magnet unit (264) can include a second diagonal magnet (D2), a third diagonal magnet (D3), and a fourth diagonal magnet (D4) that cooperate to provide a first combined magnetic flux (276) that is somewhat aligned along the third axis in a first flux direction. In this embodiment, each diagonal magnet (D1) (D2) (D3) (D4) has the diagonal magnetization direction (268) that is diagonal to the first axis, the second axis and the third axis. Moreover, each diagonal magnet (D1) (D2) (D3) (D4) can be generally triangular wedge shaped and the diagonal magnets (D1) (D2) (D3) (D4) are arranged together into the shape of a parallelepiped.

    Abstract translation: 用于沿着第一轴定位台(44)并且沿着垂直于第一轴的第二轴定位的平面马达(32)包括导体阵列(52)和磁体阵列(34)。 导体阵列(52)包括至少一个导体(256)。 磁体阵列(34)位于导体阵列(52)附近,并且沿着垂直于第一轴线和第二轴线的第三轴线与导体阵列(52)间隔开。 磁体阵列(34)包括第一磁体单元(264),第一磁体单元(264)具有与第一轴线,第二轴线和第三轴线对角的具有对角线磁化方向(268)的第一对角磁体(D1)。 这导致磁体阵列(34)上方的强磁场和强力产生能力。 此外,本文提供的平面电动机(32)具有比可比现有技术的平面电动机更少的超过磁体阵列(34)的杂散磁场。 此外,第一磁体单元(264)可以包括第二对角磁体(D2),第三对角线磁体(D3)和第四对角线磁体(D4),其协作以提供稍微有点的第一组合磁通(276) 沿着第三轴在第一磁通方向对准。 在本实施例中,每个对角磁体(D1)(D2)(D3)(D4)具有与第一轴线,第二轴线和第三轴线对角的对角线磁化方向(268)。 此外,每个对角磁体(D1)(D2)(D3)(D4)可以是大致三角形的楔形,并且对角磁体(D1)(D2)(D3)(D4)被布置成平行六面体形状。

    Split coil linear motor for z force
    99.
    发明授权
    Split coil linear motor for z force 有权
    用于z力的分线圈线性电机

    公开(公告)号:US07656062B2

    公开(公告)日:2010-02-02

    申请号:US11425793

    申请日:2006-06-22

    CPC classification number: G03F7/70758 H02K41/03 H02K2201/18 H02N15/00

    Abstract: Methods and apparatus for enabling a coil to be used to provide a net force along more than one axis are disclosed. According to one aspect of the present invention, an actuator includes a magnet assembly and a coil assembly. The coil assembly moves at least partially within the magnet arrangement, and includes a top coil half and a bottom coil half. The top coil half and the bottom coil half are independently controllable such that a first current applied to the top coil half may be independently applied from a second current applied to the bottom coil half.

    Abstract translation: 公开了一种用于使线圈用于沿多于一个轴提供净力的方法和装置。 根据本发明的一个方面,致动器包括磁体组件和线圈组件。 线圈组件至少部分地在磁体布置内移动,并且包括顶部线圈半部和底部线圈半部。 顶部线圈半部和底部线圈一半可独立控制,使得施加到顶部线圈一半的第一电流可以从施加到底部线圈一半的第二电流独立地施加。

    Electromechanical transducing
    100.
    发明授权
    Electromechanical transducing 有权
    机电转换

    公开(公告)号:US07654540B2

    公开(公告)日:2010-02-02

    申请号:US10871230

    申请日:2004-06-18

    Abstract: An electromagnetic transducer including a stator and an armature, the armature defining a first axis and being driven to ride between first and second couplers back and forth relative to the stator along the first axis. The second coupler is configured to permit movement of the armature along a second axis orthogonal to the first axis.

    Abstract translation: 包括定子和电枢的电磁换能器,所述电枢限定第一轴线并被驱动以沿着所述第一轴线相对于所述定子前后相对地在第一和第二耦合器之间骑乘。 第二联接器构造成允许电枢沿着与第一轴正交的第二轴线移动。

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