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公开(公告)号：US20150219556A1
公开(公告)日：2015-08-06
申请号：US14414782
申请日：2013-06-14
Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION
Inventor： Sakuichiro Adachi , Hajime Yamazaki , Masahiko Iijima
CPC classification number: G01N21/49 , G01N15/1434 , G01N21/253 , G01N21/272 , G01N21/31 , G01N21/51 , G01N21/82 , G01N35/025 , G01N2021/4711 , G01N2021/825 , G01N2035/00396 , G01N2201/02 , G01N2201/062 , Y10T436/11
Abstract: To enable determination of if there is an influence of foreign-body reactions on the result of quantitative determination conducted with a scattered light measurement method. Proposed is an automatic analysis device including a light source configured to irradiate a reaction solution with light, a plurality of light receivers configured to receive scattered light generated from the reaction solution at different light-receiving angles, a first data processing unit configured to process reaction process data measured by one of the light receivers to quantitatively determine a concentration of a substance in the reaction solution, and a second data processing unit configured to determine if the quantitative determination of the concentration of the substance has been performed normally on the basis of a ratio of a plurality of computed values, the plurality of computed values having been calculated from a plurality of pieces of reaction process data measured by the respective light receivers.
Abstract translation: 为了能够确定异物反应对使用散射光测量方法进行的定量测定的结果是否有影响。 提出了一种自动分析装置，包括：被配置为用光照射反应溶液的光源;多个受光器，被配置为在不同的光接收角度处接收从反应溶液产生的散射光;第一数据处理单元，被配置为处理反应 由一个光接收器测量的过程数据，以定量地确定反应溶液中物质的浓度;以及第二数据处理单元，其被配置为基于以下方式确定物质浓度的定量确定是否正常进行： 多个计算值的多个计算值是根据由各个光接收器测量的多个反应过程数据计算出的。
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公开(公告)号：US20150185431A1
公开(公告)日：2015-07-02
申请号：US14573387
申请日：2014-12-17
Applicant: NUCTECH COMPANY LIMITED
Inventor： Ziran Zhao , Jianhong Zhang , Hongqiu Wang , Dong Lin , Shixin Zhang , Bin Hu , Yumin Yi
Abstract: An embodiment of the present invention provides an optical probe, comprising: a first sleeve in which a lens is contained, the first sleeve having a light transmission aperture from which an exciting light enters the first sleeve; a second sleeve movably engaged with the first sleeve and having a detection window from which the exciting light having passed through the first sleeve and focused by the lens exits the optical probe, the second sleeve being capable of moving with respect to the first sleeve from a first detection position to a second detection position or from the second detection position to the first detection position; and a positioning member configured to position the second sleeve at the first detection position or the second detection position with respect to the first sleeve.
Abstract translation: 本发明的一个实施例提供了一种光学探针，包括：第一套筒，其中容纳透镜，第一套筒具有透光孔，激发光从该光透射孔进入第一套筒; 第二套筒可移动地与第一套筒接合并且具有检测窗口，已经穿过第一套筒并被透镜聚焦的激发光从该检测窗口离开光学探针，第二套筒能够相对于第一套筒从一个 第一检测位置到第二检测位置或从第二检测位置到第一检测位置; 以及定位构件，其构造成将所述第二套筒相对于所述第一套筒定位在所述第一检测位置或所述第二检测位置。
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公开(公告)号：US20150177060A1
公开(公告)日：2015-06-25
申请号：US14407050
申请日：2013-06-07
Applicant: Labrox Oy
Inventor： Pauli Salmelainen , Antero Yli-Koski
CPC classification number: G01J1/4228 , G01J1/0444 , G01N21/645 , G01N21/6452 , G01N2021/6471 , G01N2201/02
Abstract: An apparatus for measuring an optical component (160, 170, 190) of the apparatus, the apparatus comprising a radiation source (130) configured to form a measuring beam in a measuring channel (140), wherein the measured optical component configured to be in a first position outside the measuring channel and in a second position in the measuring channel; a first detector (110) configured to receive beams in the measuring channel; a second detector (150) configured to receive beams in the measuring channel; at least one processor; and at least one memory including computer program code. The at least one memory and the computer program code are configured to, with the at least one processor, cause the apparatus at least to select at least one of the first detector and the second detector to receive beams in the measuring channel, the measuring channel (140) being integrated to a photometer or a fluorescence channel of the apparatus; receive a first beam, using the selected detector, in the measuring channel, wherein the measured optical component is in the first position; receive a second beam, using the selected detector, in the measuring channel, wherein the measured optical component is in the second position; and determine the characteristics of the optical component based on the first beam and the second beam.
Abstract translation: 一种用于测量装置的光学部件（160,170,190）的装置，该装置包括被配置成在测量通道（140）中形成测量光束的辐射源（130），其中被测量的光学部件配置成 测量通道外的第一位置和测量通道中的第二位置; 被配置为在所述测量通道中接收波束的第一检测器（110） 被配置为在所述测量通道中接收波束的第二检测器（150） 至少一个处理器; 以及包括计算机程序代码的至少一个存储器。 所述至少一个存储器和所述计算机程序代码被配置为与所述至少一个处理器一起使所述设备至少选择所述第一检测器和所述第二检测器中的至少一个以接收所述测量通道中的波束，所述测量通道 （140）被集成到所述装置的光度计或荧光通道中; 在测量通道中接收使用所选择的检测器的第一光束，其中所测量的光学部件处于第一位置; 在测量通道中接收使用所选择的检测器的第二光束，其中所测量的光学部件处于第二位置; 并基于第一光束和第二光束确定光学部件的特性。
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公开(公告)号：US20150168304A1
公开(公告)日：2015-06-18
申请号：US14632486
申请日：2015-02-26
Applicant: KLA-Tencor Corporation
Inventor： Christophe Wouters , Steven Boeykens , Carl Smets
IPC: G01N21/64 , G01N21/958 , G01N21/95
CPC classification number: G01N21/6489 , G01N21/8806 , G01N21/9501 , G01N21/958 , G01N2201/02 , G01N2201/061 , G01N2201/06113 , G01N2201/06193 , G01N2201/062
Abstract: An object carrier, a system and a method is disclosed for the back light inspection of transparent or semitransparent objects. The carrier has a carrier base layer with photo luminescent properties which carries the transparent or semitransparent object on top of the layer. The transparent or semitransparent object could be a wafer and the object carrier could be a wafer chuck. At least one light source being arranged above the object carrier such that excitation light emitted from the at least one light source is directed through the transparent or semitransparent object to the layer with photo luminescent properties. The light returned from the layer with photo luminescent properties is collected by an objective and registered by a sensor.
Abstract translation: 公开了用于透明或半透明物体的背光检查的物体载体，系统和方法。 载体具有带有光致发光性质的载体基层，其在层的顶部承载透明或半透明物体。 透明或半透明物体可以是晶片，物体载体可以是晶片卡盘。 至少一个光源布置在物体载体上方，使得从至少一个光源发射的激发光通过透明或半透明物体被引导到具有光发光性质的层。 由具有光发光性质的层返回的光被物镜收集并由传感器记录。
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105.发明申请公开(公告)号：US20150160138A1
公开(公告)日：2015-06-11
申请号：US14377725
申请日：2012-02-10
Applicant: Shimadzu Corporation
Inventor： Yoshio Takami
CPC classification number: G01N21/8803 , G01M11/00 , G01N21/8806 , G01N21/894 , G01N21/9501 , G01N21/9505 , G01N2201/02 , G01N2201/04 , G01N2201/061 , H01L31/18 , H02S50/10
Abstract: An inspection apparatus 1 for solar cells 100 includes: a visible light source 11 adapted to irradiate visible light; a CCD camera 15 adapted to measure a reflection image based on the visible light reflected by an antireflective film of a solar cell 100; an infrared light source 13 adapted to irradiate the solar cell 100 with infrared light; and a CCD camera 16 adapted to measure a transmission image based on the infrared light transmitting through the solar cell 100. In the inspection apparatus 1, as a result of comparing the reflection image and the transmission image with each other, of areas respectively appearing as bright spots in the reflection image, an area appearing as a dark spot in the transmission image is determined as an area including a particle, whereas of the areas respectively appearing as the bright spots in the reflection image, an area other than the area determined as the area including the particle is determined as an area including a pinhole.
Abstract translation: 太阳能电池100的检查装置1包括：适于照射可见光的可见光源11; 适于基于由太阳能电池100的抗反射膜反射的可见光测量反射图像的CCD照相机15; 适于用太阳能电池100照射红外光的红外光源13; 以及适于基于通过太阳能电池100透射的红外线来测量透射图像的CCD照相机16.在检查装置1中，作为将反射图像和透射图像彼此进行比较的结果，分别表现为 反射图像中的亮点，作为透射图像中的暗点的区域被确定为包括粒子的区域，而在反射图像中分别出现为亮点的区域，除了被确定为 将包括粒子的区域确定为包括针孔的区域。
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Patent Agency Ranking
106.发明申请公开(公告)号：US20150153284A1
公开(公告)日：2015-06-04
申请号：US14619347
申请日：2015-02-11
Applicant: FUJIFILM Corporation
Inventor： Masayuki NAYA , Shogo YAMAZOE
CPC classification number: G01N21/658 , G01N21/01 , G01N2201/02 , G01N2201/06113
Abstract: An optical field enhancement device that generates an enhanced optical field on a surface of a metal film by an optical field enhancement effect of localized plasmon induced on the surface of the metal film by light projected onto a nanostructure on which the metal film is formed, the device including a transparent substrate having a transparent nanostructure on a surface, a metal film formed on a surface of the nanostructure, and a support member for supporting a subject at a position spaced apart from the surface of the metal film.
Abstract translation: 一种光场增强装置，其通过投射到其上形成有金属膜的纳米结构上的光而在金属膜的表面上诱导的局部等离子体激元的光场增强效应，在金属膜的表面上产生增强的光场， 包括在表面上具有透明纳米结构的透明基板，形成在纳米结构的表面上的金属膜，以及用于在与金属膜的表面间隔开的位置处支撑被检体的支撑部件。
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公开(公告)号：US20150153268A1
公开(公告)日：2015-06-04
申请号：US14620992
申请日：2015-02-12
Applicant: KLA-TENCOR CORPORATION
Inventor： Nuriel AMIR
CPC classification number: G01N21/01 , G01N21/9501 , G01N2201/02 , G01N2201/12 , G03F7/70616 , G06F17/5072 , G06F17/5081 , Y10T428/2457
Abstract: Multi-layered targets, design files and design and production methods thereof are provided. The multi-layered targets comprise process layers arranged to have parallel segmentation features at specified regions, and target layer comprising target elements which are perpendicular to the parallel segmentation features of the process layers at the specified regions.
Abstract translation: 提供了多层目标，设计文件及其设计和制作方法。 多层目标包括布置成在特定区域具有平行分割特征的处理层，目标层包括与指定区域处理层的平行分割特征垂直的目标元素。
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公开(公告)号：US20150116727A1
公开(公告)日：2015-04-30
申请号：US14390821
申请日：2013-04-03
Applicant: Siemens VAI Metals Technologies GmbH
Inventor： Laurent Dorel
IPC: G01B11/30 , G01N21/89 , G01N21/86 , G01N21/892
CPC classification number: G01B11/303 , G01B11/2522 , G01B11/306 , G01N21/86 , G01N21/8901 , G01N21/8914 , G01N21/892 , G01N2021/8918 , G01N2201/02 , G01N2201/06113
Abstract: A method measures the flatness of a metal product and an associated device. The method applies to a metal product, in the form of either a strip or a plate from a metallurgical processing line. The product to be measured being, by default, free of external traction. The method contains the following steps: a) illuminating a portion of a face of the product under uniform intensity; b) capturing an image of a light line of the illuminated portion; c) relatively moving the illuminated portion and the light line in a defined direction in relation to the product; d) repeating steps a), b), c); and e) collecting the images of lines in a two-dimensional distribution of intensities and selecting a strand direction of the product in which, if at least one wave of intensities is detected, a local amplitude variation of the wave delivers a local strand flatness defect value.
Abstract translation: 一种方法测量金属制品和相关装置的平整度。 该方法适用于来自冶金加工生产线的带状或板状的金属制品。 要测量的产品，默认情况下，没有外部牵引力。 该方法包括以下步骤：a）以均匀的强度照射产品的一部分面部; b）拍摄照明部分的光线的图像; c）相对于产品沿着规定的方向相对移动照明部分和光线; d）重复步骤a），b），c）; 以及e）以强度的二维分布收集线的图像并选择产品的股线方向，其中如果检测到至少一个强度波，则波的局部振幅变化传递局部股线平坦度缺陷 值。
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公开(公告)号：US20150108367A1
公开(公告)日：2015-04-23
申请号：US14579442
申请日：2014-12-22
Applicant: Singulex, Inc.
Inventor： Richard Livingston
CPC classification number: G01N21/6428 , B01L3/5085 , B01L2300/0654 , B01L2300/0829 , G01N15/14 , G01N15/1429 , G01N15/1434 , G01N15/1456 , G01N15/1463 , G01N21/64 , G01N21/645 , G01N21/6452 , G01N21/6458 , G01N33/53 , G01N2015/0038 , G01N2015/1402 , G01N2015/1447 , G01N2015/1452 , G01N2201/02 , G01N2201/06113 , G01N2201/062 , G01N2201/0697
Abstract: The invention encompasses analyzers and analyzer systems that include a single molecule analyzer, methods of using the analyzer and analyzer systems to analyze samples, either for single molecules or for molecular complexes. The single molecule uses electromagnetic radiation that is translated through the sample to detect the presence or absence of a single molecule. The single molecule analyzer provided herein is useful for diagnostics because the analyzer detects single molecules with zero carryover between samples.
Abstract translation: 本发明包括分析仪和分析仪系统，其包括单分子分析仪，使用分析仪和分析仪系统分析样品的单分子或分子复合物的方法。 单分子使用通过样品翻译的电磁辐射来检测单个分子的存在或不存在。 本文提供的单分子分析仪可用于诊断，因为分析仪检测样品之间具有零携带的单分子。
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公开(公告)号：US20150098081A1
公开(公告)日：2015-04-09
申请号：US14569043
申请日：2014-12-12
Applicant: KLA-Tencor Corporation
Inventor： Boris Golovanevsky
CPC classification number: G01N21/9501 , G01N2201/02 , H01L21/68764 , Y10T29/49
Abstract: Metrology tool stage configurations and respective methods are provided, which comprise a pivoted connection arranged to receive a wafer and enable rotation thereof about a pivot; a radial axis arranged to radially move the rotatable pivoted connection attached thereto; and optics having a stationary part configured to generate a collimated illumination beam. For example, the optics may be stationary and the radial axis may be centrally rotated to enable stage operation without requiring additional space for guiding systems. In another example, a part of the optics may be rotatable, when configured to receive illumination via a mechanically decoupled or empty region, receive power and control wirelessly and deliver data wirelessly. The disclosed configurations provide more compact and more robust stages which efficiently handle large wafers. Stage configurations may be horizontal or vertical, the latter further minimizing the tool's footprint.
Abstract translation: 提供了计量工具台结构和各自的方法，其包括布置成接收晶片并使其绕枢轴旋转的枢转连接; 径向轴线，其布置成径向移动附接到其上的可旋转枢转连接; 以及具有被配置为产生准直照明光束的静止部分的光学器件。 例如，光学器件可以是静止的，并且径向轴线可以被中心旋转以使得能够进行平台操作，而不需要用于引导系统的额外的空间。 在另一示例中，当被配置为经由机械解耦或空区域接收照明时，光学部件的一部分可以是可旋转的，以无线方式接收功率和控制并且传送数据。 所公开的配置提供了更有效地处理大晶片的更紧凑和更坚固的阶段。 舞台配置可以是水平的或垂直的，后者进一步最小化工具的占地面积。
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