公开(公告)号：US07355780B2

公开(公告)日：2008-04-08

申请号：US11057392

申请日：2005-02-11

Applicant: Clarence Chui ,  Ming-Hau Tung

Inventor： Clarence Chui ,  Ming-Hau Tung

IPC: G02B26/00 ,  G02F1/03 ,  G02F2/00

CPC classification number: G02B26/001 ,  G09G3/3406 ,  G09G3/3466 ,  H04M1/22 ,  H04N5/7458 ,  H04W52/027 ,  Y02D70/1222 ,  Y02D70/142 ,  Y02D70/144 ,  Y02D70/164 ,  Y02D70/26 ,  Y10S359/90

Abstract: An interferometric modulator array device with backlighting is disclosed. The interferometric modulator array device comprises a plurality of interferometric modulator elements, wherein each of the interferometric modulator elements comprises an optical cavity. The interferometric modulator array includes an optical aperture region, and at least one reflecting element is positioned so as to receive light passing through the optical aperture region and reflect at least a portion of the received light to the cavities of the interferometric modulator elements. In some embodiments, the interferometric modulator elements may be separated from each other such that an optical aperture region is formed between adjacent interferometric modulator elements.

Abstract translation: 公开了具有背光的干涉式调制器阵列器件。 干涉式调制器阵列装置包括多个干涉式调制器元件，其中每个干涉式调制器元件包括光腔。 所述干涉式调制器阵列包括光学孔区域，并且至少一个反射元件被定位成接收穿过所述光学孔径区域的光，并将所接收的光的至少一部分反射到所述干涉式调制器元件的空腔。 在一些实施例中，干涉式调制器元件可以彼此分离，使得在相邻的干涉式调制器元件之间形成光学孔径区域。

公开(公告)号：US07310179B2

公开(公告)日：2007-12-18

申请号：US11193012

申请日：2005-07-29

Applicant: Clarence Chui ,  Manish Kothari

Inventor： Clarence Chui ,  Manish Kothari

IPC: G02B26/00 ,  H01L29/84

CPC classification number: G02B26/001

Abstract: The width and location of a hysteresis window of an interferometric modulator may be altered by adjusting various physical characteristics of the interferometric modulator. Thus, depending on the particular application for which the interferometric modulators are manufactured, the width and location of the hysteresis window may be altered. For example, in some applications, reducing the power required to operate an array of interferometric modulators may be an important consideration. In other applications, the speed of the interferometric modulators may be of more importance, where the speed of an interferometric modulator, as used herein, refers to the speed of actuating and relaxing the moveable mirror. In other applications, the cost and ease of manufacturing may be of most importance. Systems and methods are introduced that allow selection of a width and location of a hysteresis window by adjusting various physical characteristics.

Abstract translation: 可以通过调整干涉式调制器的各种物理特性来改变干涉式调制器的滞后窗的宽度和位置。 因此，根据制造干涉式调制器的特定应用，可以改变滞后窗口的宽度和位置。 例如，在某些应用中，降低操作干涉式调制器阵列所需的功率可能是重要的考虑因素。 在其他应用中，干涉式调制器的速度可能更为重要，其中如本文所使用的干涉式调制器的速度是指致动和放松可移动反射镜的速度。 在其他应用中，制造的成本和易用性可能是最重要的。 引入了通过调整各种物理特性来选择滞后窗口的宽度和位置的系统和方法。

公开(公告)号：US20070170568A1

公开(公告)日：2007-07-26

申请号：US11653088

申请日：2007-01-12

Applicant: Lauren Palmateer ,  Brian Gally ,  William Cummings ,  Manish Kothari ,  Clarence Chui

Inventor： Lauren Palmateer ,  Brian Gally ,  William Cummings ,  Manish Kothari ,  Clarence Chui

IPC: H01L23/02

CPC classification number: G02B26/001

Abstract: A package is made of a transparent substrate having an interferometric modulator and a back plate. A non-hermetic seal joins the back plate to the substrate to form a package, and a desiccant resides inside the package. A method of packaging an interferometric modulator includes providing a transparent substrate and manufacturing an interferometric modulator array on a backside of the substrate. A back plate is provided and a desiccant is applied to the back plate. The back plate is sealed to the backside of the substrate with a back seal in ambient conditions, thereby forming a package.

Abstract translation: 封装由具有干涉式调制器和背板的透明基板制成。 非气密密封件将背板连接到基板以形成包装，并且干燥剂驻留在包装内。 封装干涉式调制器的方法包括提供透明衬底并在衬底的背面制造干涉式调制器阵列。 设置背板，并将干燥剂施加到背板上。 背板在环境条件下用背密封件密封到基板的背面，由此形成封装。

公开(公告)号：US20070024550A1

公开(公告)日：2007-02-01

申请号：US11511908

申请日：2006-08-28

Applicant: Clarence Chui ,  Manish Kothari ,  Marc Mignard ,  Mithran Mathew ,  Jeffrey Sampsell

Inventor： Clarence Chui ,  Manish Kothari ,  Marc Mignard ,  Mithran Mathew ,  Jeffrey Sampsell

IPC: G09G3/34

CPC classification number: G09G3/3466 ,  G02B26/001 ,  G09G3/3618 ,  G09G2300/0473 ,  G09G2300/06 ,  G09G2310/0254 ,  G09G2310/0267 ,  G09G2310/0275 ,  G09G2310/0278 ,  G09G2310/06 ,  G09G2320/029 ,  G09G2330/021 ,  G09G2330/12

Abstract: Embodiments of exemplary MEMS interferometric modulators are arranged at intersections of rows and columns of electrodes. In certain embodiments, the column electrode has a lower electrical resistance than the row electrode. A driving circuit applies a potential difference of a first polarity across electrodes during a first phase and then quickly transition to applying a bias voltage having a polarity opposite to the first polarity during a second phase. In certain embodiments, an absolute value of the difference between the voltages applied to the row electrode is less than an absolute value of the difference between the voltages applied to the column electrode during the first and second phases.

Abstract translation: 示例性MEMS干涉式调制器的实施例布置在电极的行和列的交叉处。 在某些实施例中，列电极具有比行电极更低的电阻。 驱动电路在第一阶段期间在电极之间施加第一极性的电位差，然后在第二阶段期间快速转换到施加极性与第一极性相反的偏置电压。 在某些实施例中，施加到行电极的电压之差的绝对值小于在第一和第二相期间施加到列电极的​​电压之差的绝对值。

公开(公告)号：US07164520B2

公开(公告)日：2007-01-16

申请号：US10844819

申请日：2004-05-12

Applicant: Lauren Fay Palmateer ,  Brian James Gally ,  William J. Cummings ,  Manish Kothari ,  Clarence Chui

Inventor： Lauren Fay Palmateer ,  Brian James Gally ,  William J. Cummings ,  Manish Kothari ,  Clarence Chui

IPC: G02F1/03

CPC classification number: G02B26/001

Abstract: A package is made of a transparent substrate having an interferometric modulator and a back plate. A non-hermetic seal joins the back plate to the substrate to form a package, and a desiccant resides inside the package. A method of packaging an interferometric modulator includes providing a transparent substrate and manufacturing an interferometric modulator array on a backside of the substrate. A back plate is provided and a desiccant is applied to the back plate. The back plate is sealed to the backside of the substrate with a back seal in ambient conditions, thereby forming a package

Abstract translation: 封装由具有干涉式调制器和背板的透明基板制成。 非气密密封件将背板连接到基板以形成包装，并且干燥剂驻留在包装内。 封装干涉式调制器的方法包括提供透明衬底并在衬底的背面制造干涉式调制器阵列。 设置背板，并将干燥剂施加到背板上。 背板在环境条件下用背密封件密封到基板的背面，从而形成封装

公开(公告)号：US07161094B2

公开(公告)日：2007-01-09

申请号：US11436345

申请日：2006-05-18

Applicant: Manish Kothari ,  Clarence Chui ,  Lauren Palmateer

Inventor： Manish Kothari ,  Clarence Chui ,  Lauren Palmateer

IPC: H01L23/18

CPC classification number: G02B26/001 ,  B81B7/0038

Abstract: A MEMS device is packaged with a control material that is included in the package to affect an operation of a moveable element of the device. The control material may affect operational characteristics including actuation and release voltages and currents, mechanical affects including damping and stiffness, lifetime of the device, optical properties, thermal affects and corrosion. The control material may be inserted into the package as part of any of several structural components of the package or the MEMS device.

Abstract translation: MEMS装置与包含在包装中的控制材料一起被包装以影响装置的可移动元件的操作。 控制材料可能影响操作特性，包括致动和释放电压和电流，机械影响包括阻尼和刚度，器件寿命，光学性能，热影响和腐蚀。 控制材料可以作为封装或MEMS器件的几个结构部件中的任何一个插入到封装中。

公开(公告)号：US20060256420A1

公开(公告)日：2006-11-16

申请号：US11396245

申请日：2006-03-31

Applicant: Mark Miles ,  Brian Gally ,  Clarence Chui

Inventor： Mark Miles ,  Brian Gally ,  Clarence Chui

IPC: G02B26/00

CPC classification number: B81C1/00182 ,  B81B2201/047 ,  B81C1/0038

Abstract: This invention provides a precursor film stack for use in the production of MEMS devices. The precursor film stack comprises a carrier substrate, a first layer formed on the carrier substrate, a second layer of an insulator material formed on the first layer, and a third layer of a sacrificial material formed on the second layer.

公开(公告)号：US20060077518A1

公开(公告)日：2006-04-13

申请号：US11173551

申请日：2005-07-01

Applicant: Clarence Chui ,  Jeffrey Sampsell

Inventor： Clarence Chui ,  Jeffrey Sampsell

IPC: G02B26/00

CPC classification number: G02B26/0841 ,  G02B26/001

Abstract: Described herein are systems, devices, and methods relating to packaging electronic devices, for example, microelectromechanical systems (MEMS) devices, including optical modulators such as interferometric optical modulators. The interferometric modulator disclosed herein comprises a movable mirror. Some embodiments of the disclosed movable mirror exhibit a combination of improved properties compared to known mirrors, including reduced moving mass, improved mechanical properties, and reduced etch times.

Abstract translation: 这里描述了与包装电子设备有关的系统，设备和方法，例如包括光学调制器（例如干涉式光学调制器）的微机电系统（MEMS）设备。 本文公开的干涉式调制器包括可移动反射镜。 所公开的可移动镜的一些实施例与已知反射镜相比具有改进的性能的组合，包括减少的移动质量，改进的机械性能和减少的蚀刻时间。

公开(公告)号：US20060067648A1

公开(公告)日：2006-03-30

申请号：US11198925

申请日：2005-08-05

Applicant: Clarence Chui ,  Manish Kothari

Inventor： Clarence Chui ,  Manish Kothari

IPC: G02B6/00

CPC classification number: G02B26/001 ,  G02B26/0833 ,  G02B26/0841

Abstract: MEMS switches are formed with membranes or layers that are deformable upon the application of a voltage. In some embodiments, the application of a voltage opens switch contacts.

Abstract translation: MEMS开关由在施加电压时可变形的膜或层形成。 在一些实施例中，电压的施加打开开关触点。

公开(公告)号：US20060067647A1

公开(公告)日：2006-03-30

申请号：US11183049

申请日：2005-07-15

Applicant: Clarence Chui

Inventor： Clarence Chui

IPC: G02B6/00

CPC classification number: G02B26/0841

Abstract: The time required for an interferometric modulator to switch from a state with a collapsed cavity to a state with an open cavity or vice versa, i.e., the switch time, is decreased by decreasing the viscosity of the gas filling the cavity. The viscosity is decreased by forming at least a partial vacuum in the cavity. The partial vacuum is formed, in turn, by forming a cavity in a housing holding the interferometric modulator. The vacuum can be generated by a vacuum pump. By decreasing the switch time, interferometric modulators in an array of interferometric modulators can be switched more quickly, thereby advantageously increasing the refresh rate for a display using the array.