Abstract:
An improved system and method for controlling ozone concentration in connection with a multi-chamber tool. The system and method involve a first and a second concentration controller in combination with an ozone generator. The first concentration controller detects an EVENT (i.e., one of the chambers in the multi-chamber tool coming on-line or off-line) and in response provides a power instruction to the ozone generator in accordance with a predictive control algorithm. The first concentration controller has a fast (i.e, about 1 second) response time. The second concentration controller is masked from the ozone generator during the EVENT, but otherwise controls the generator after an interval of time has lapsed after the EVENT. The second concentration controller has a slower response time than the first concentration controller, however the second concentration controller provides the system with long-term stability and can be used to provide updated data to the predictive control algorithm.
Abstract:
An ozone generator comprises a machine box, a cover, a high-voltage supply, an electrode device and a control circuit board. The electrode device has a set of discharging electrodes with pointed members and a guiding electrode. The guiding electrode further comprises a contact plate mounted on the machine box for grounding and an electrode board retained within said cover. The electrode board is provided with a plurality of round holes corresponding to the pointed members of the discharging electrode, Thereby, electric energy will be transported from the high-voltage supply to the electrode device, then emitting into the ozone generating chamber through discharging. The air flowing into the ozone generating chamber will be activated to form ozone gas that will be released to the surroundings. Further, as the cover is removed from the machine box, the discharging will be terminated automatically, ensuring the operational safety of the ozone generator.
Abstract:
An ozone generating system and an ozone generating method producing ozone at a high concentration and operating at high efficiency, in which a raw material gas with no nitrogen added and mainly containing oxygen is used. The amount of generation of NOX by-product is null. A raw material gas not containing nitrogen and mainly containing oxygen is supplied to an ozone generator, an AC voltage is applied to produce discharge light having wavelength of 428 nm to 620 nm, a catalytic material containing a photocatalytic material with a band gap energy of 2.0 eV to 2.9 eV is provided on an electrode or a dielectric in a discharge region, gas pressure is kept at 0.1 MPa to 0.4 MPa, and ozone is generated.
Abstract:
Systems and methods are provided for monitoring and suppressing arcing between a first electrode and a second electrode of an electro-kinetic system. A current (or voltage) associated with the electro-kinetic system is monitored in order to adjust a first count and a second count. Each time a monitored value reaches a threshold, the first count is incremented. Each time the first count reaches a first count threshold, the electro-kinetic system is temporarily shut down for a predetermined period, the second count is incremented, and the first count is re-initialized. The electro-kinetic system restarts after the predetermined period. When the second count reaches a second count threshold, the electro-kinetic system is shut-down until a reset condition is satisfied.
Abstract:
Systems and methods are provided for monitoring and suppressing arcing between a first electrode and a second electrode of an electro-kinetic system. A current (or voltage) associated with the electro-kinetic system is monitored in order to adjust a first count and a second count. Each time a monitored value reaches a threshold, the first count is incremented. Each time the first count reaches a first count threshold, the electro-kinetic system is temporarily shut down for a predetermined period, the second count is incremented, and the first count is re-initialized. The electro-kinetic system restarts after the predetermined period. When the second count reaches a second count threshold, the electro-kinetic system is shut-down until a reset condition is satisfied.
Abstract:
Oxygen in the air passing through the duct, is converted into ozone for delivery to combustion and oxygenation processes. A conducting element 12 supported on an insulated standoff 13 within a conducting duct 11 has a voltage applied between element 12 and duct 11. This voltage produces a corona on the element whereby ozone is generated. Addition of a grid 24 enhances ozone production. In addition, a provision to vary the voltage on grid 24 whereby the ozone production is controlled further enhances the device. In addition standoff 13 carries supply wire 14 whereby the electrical connection to element 12 is facilitated.
Abstract:
An apparatus for generating ozone and anion capable of respectively controlling an ozone generator and an anion generator is disclosed. The apparatus includes an ozone generator, an ozone generator-driving portion, a second power source supplying power to the ozone generator-driving portion, an anion generator, an anion generator-driving portion, a circulating fan circulating the generated anion, a first power source supplying power to the anion generator-driving portion, a selecting valve selectively discharging the anion generated from the anion generator to a water purifier 100 or an ozone container, an activated carbon filter removing smell of the ozone introduce through the selecting valve into the water purifier, a controlling portion controlling the anion generator-driving portion and the ozone generator-driving portion, an operating portion inputting an external instruction to the controlling portion, and a timer controlling a reserving function of the operating portion.
Abstract:
There is disclosed an apparatus for generating ozone and anion, which is capable of respectively controlling an ozone generator and an anion generator according to a using purpose and also conveniently controlling various functions. The apparatus comprises an ozone generator 50 for generating ozone having a desired concentration, an ozone generator-driving portion 40 for driving the ozone generator, a second power source 45 for supplying power to the ozone generator-driving portion 40, an anion generator 35 for generating anion having a desired quantity of electric charge, an anion generator-driving portion 20 for driving the anion generator 35, a circulating fan 30 for facilely circulating the anion generated from the anion generator 35 to an outside, a first power source 25 for supplying power to the anion generator-driving portion 20, a selecting valve 60 for selectively discharging the anion generated from the anion generator 50 to the water purifier 100 or the ozone container 300, an activated carbon filter 55 for removing specific smell of the ozone introduce through the selecting valve 60 into the water purifier 100, a controlling portion 15 for controlling the entire portions including the anion generator-driving portion 20 and the ozone generator-driving portion 40, an operating portion 10 for inputting an external instruction to the controlling portion 15, and a timer 75 for controlling a reserving function of the operating portion 10.
Abstract:
An odor-eliminating apparatus that is disposed in or affixed to the inside of a container door or the underside of a container lid and adapted to emit an odor-eliminating gas every time the closed door or lid is opened and reclosed. In the preferred embodiment, the apparatus comprises a battery operated ozone-generating module adapted for attachment to the inner surface of the container lid and including an orientation sensor that reacts to the door opening/closing and triggers the module to generate a predetermined amount of ozone gas and release it into the container. The ozone gas reacts with the organic odor molecules in the container to destroy the odor molecules and create therefrom a healthful mixture of oxygen and carbon dioxide.
Abstract:
An automated air treating apparatus and method therefor for purifying ambient air with ozone. Ozonized air is added to the return air stream of an air handling system and automatically circulated throughout the air handling system and returned to the ambient air.