公开(公告)号：US06549860B1

公开(公告)日：2003-04-15

申请号：US09687857

申请日：2000-10-13

Applicant: Raymond Y. Lillard

Inventor： Raymond Y. Lillard

IPC: G06F1711

CPC classification number: B08B3/12 ,  B06B1/0253 ,  B06B2201/55 ,  B06B2201/71

Abstract: A method and apparatus for selecting an optimum frequency for driving a transducer in a megasonic cleaning system. The method comprises the steps of selecting a plurality of frequency values that span a frequency range containing an optimum frequency for driving a piezoelectric crystal, determining the reflection coefficient at each frequency value, fitting the data set to a function, obtaining the first derivative equation of the function, finding the roots of the first derivative equation to yield a set of roots, and selecting the optimum frequency from the set of roots. The reflection coefficient is defined as the reflected power divided by the forward power. The apparatus comprises a microprocessor, a frequency generator, a directional coupler/detector and an analog to digital converter circuit. Software running on the microprocessor uses a forward power signal and a reflected power signal from the analog to digital converter circuit to generate the reflection coefficient and to calculate the optimum frequency for driving the megasonic transducer.

Abstract translation: 一种选择在兆声波清洗系统中驱动换能器的最佳频率的方法和装置。 该方法包括以下步骤：选择跨越包含用于驱动压电晶体的最佳频率的频率范围的多个频率值，确定每个频率值处的反射系数，将该数据集拟合到函数中，获得一阶导数方程 该函数找到一阶导数方程的根，以产生一组根，并从根组中选择最佳频率。 反射系数定义为反射功率除以正向功率。 该装置包括微处理器，频率发生器，定向耦合器/检测器和模数转换器电路。 在微处理器上运行的软件使用来自模数转换器电路的正向功率信号和反射功率信号来产生反射系数并计算驱动兆声换能器的最佳频率。

公开(公告)号：US06313565B1

公开(公告)日：2001-11-06

申请号：US09504567

申请日：2000-02-15

Applicant: William L. Puskas

Inventor： William L. Puskas

IPC: H01L4108

CPC classification number: B06B1/0269 ,  B06B2201/71 ,  B08B3/12

Abstract: The invention utilizes multiple frequency sound in liquids to improve the cleaning or processing effect. The sound frequencies are produced in two or more non-overlapping continuous frequency ranges. The sound frequencies are controlled to change frequency within the frequency ranges and the sound frequencies are programmed by a digital code to jump amongst the frequency ranges. The sound frequencies may change continuously within the frequency ranges, and the sound frequencies may jump discontinuously from one frequency range to another. The frequency ranges may also be within different, non-contiguous and non-overlapping frequency bands.

Abstract translation: 本发明利用液体中的多频声音来改善清洗或处理效果。 声音频率在两个或多个不重叠的连续频率范围内产生。 控制声音频率以在频率范围内改变频率，并通过数字代码对声音频率进行编程，以在频率范围内跳转。 声音频率可能在频率范围内连续变化，声音频率可能从一个频率范围不连续地跳跃到另一个频率范围。 频率范围也可以在不同的，不连续的和不重叠的频带内。

公开(公告)号：US06242847B1

公开(公告)日：2001-06-05

申请号：US09370301

申请日：1999-08-09

Applicant: William L. Puskas

Inventor： William L. Puskas

IPC: H01L4108

CPC classification number: B01J19/10 ,  B06B1/0276 ,  B06B1/0284 ,  B06B1/0618 ,  B06B1/0622 ,  B06B2201/71 ,  B08B3/12 ,  B08B2203/002 ,  G01N27/06 ,  G01N29/032 ,  G01N29/222 ,  G01N29/348 ,  G01N2291/02818 ,  G01N2291/02863 ,  G10K11/004 ,  G10K11/006

Abstract: The invention provides systems, methods and apparatus for processing delicate parts within a process tank such as an ultrasonic tank. Typically, one or more transducers connect to the tank and respond to drive signals from a generator to produce ultrasound within process liquid within the tank. Specific features of the invention include: (1) a power up-sweep ultrasonic system for moving contaminants upwards within the tank by sweeping transducer drive signals from an upper frequency to a lower frequency without sweeping from the lower frequency to the upper frequency; (2) a multi-generator system for producing ultrasound at selected different frequencies within the tank by switching a common transducer bank to one of the generators in response to remote relays initiated by the user; (3) a probe sensing system for sensing process conditions within the tank including an enclosure for housing a sample liquid and one or more sensing transducers within the sample liquid, the transducers generating signals indicative of characteristics of the sample liquid, a subsystem analyzing the signals in feedback with the generator to modify process conditions; (4) variable voltage ultrasonic generator systems to accommodate varying world-wide voltage supplies; (5) a laminar process tank for efficiently pushing contaminants upwards in a tank; (6) a quick dump rinse tank including a pressure cavity to accelerate dumping processes; (7) an ultrasonic generating unit formed of a printed circuit board (PCB) and multiple transducers within the PCB; (8) an AC power system to produce an AC voltage at frequency f that is impressed across a capacitive element; and (9) various configurations of transducers, including acid-safe transducers, double-compression transducers, and transducers with increased reliability.

Abstract translation: 本发明提供了用于处理诸如超声波罐的处理罐内的精密部件的系统，方法和装置。 通常，一个或多个换能器连接到油箱并响应来自发电机的驱动信号，以在罐内的处理液体内产生超声波。 本发明的具体特征包括：（1）上行扫描超声波系统，用于通过从较高频率向较低频率扫描换能器驱动信号而不用从较低频率扫频到上频频率来将污染物向上移动; （2）多发生器系统，用于响应由用户发起的远程继电器，通过将公共换能器组切换到发电机中的一个，在罐内以选定的不同频率产生超声波; （3）用于感测罐内的工艺条件的探针感测系统，包括用于容纳样品液体和样品液体内的一个或多个感测传感器的外壳，换能器产生指示样品液体特性的信号，分析信号的子系统 用发电机反馈修改工艺条件; （4）可变电压超声波发生器系统，以适应不同的世界范围的电压源; （5）用于在罐中有效地将污染物向上推动的层流工艺罐; （6）快速倾倒冲洗槽，包括压力腔，以加速倾倒过程; （7）由印刷电路板（PCB）和PCB内的多个换能器构成的超声波发生单元; （8）交流电力系统，以产生跨过电容元件施加的频率f的交流电压; 和（9）各种配置的传感器，包括耐酸性传感器，双压缩传感器和具有更高可靠性的传感器。

公开(公告)号：US06181051B2

公开(公告)日：2001-01-30

申请号：US09066158

申请日：1998-04-24

Applicant: William L. Puskas

Inventor： William L. Puskas

IPC: H01L4106

CPC classification number: B01J19/10 ,  B06B1/0276 ,  B06B1/0618 ,  B06B1/0622 ,  B06B2201/71 ,  G10K11/004 ,  G10K11/006

Abstract: The invention utilizes harmonics of certain clamped ultrasound transducers to generate ultrasound within the liquid of an ultrasonic tank and in a frequency range of between about 100 khz to 350 khz (i.e., “microsonic” frequencies). The application of microsonic frequencies to liquid preferably occurs simultaneously with a sweeping of the microsonic frequency within the transducer's harmonic bandwidth to reduce or eliminate (a) standing waves within the liquid, (b) other resonances, (c) high energy cavitation implosion, and (d) non-uniform sound fields, each of which is undesirable for cleaning and/or processing of semiconductor wafers and other delicate parts. The invention can also drive ultrasonic transducers such that the frequency of applied energy has a sweep rate within the ultrasonic bandwidth of the transducers; and that sweep rate is also varied so that the sweep rate is substantially non-constant during operation. This reduces or eliminates resonances which are created by transducers operating with a single sweep rate. An ultrasound generator of the invention sometimes utilizes amplitude modulation (AM), and the AM frequency is swept over time so as to reduce resonances. AM control is preferably provided by selecting a portion of the rectified power line frequency. In applications which utilize multiple generators, multiple transducers, and one or more tanks, simultaneously, the invention synchronizes the operation of the generators to a common FM signal to reduce beat frequencies between generators. Each such generator can also be adjusted, through AM, to control the process characteristics within the associated tank. Two or more transducers are sometimes used by the invention, in combination, to broaden the overall bandwidth of acoustical energy applied to the liquid around the primary frequency or one of the harmonics. The bandwidths of the transducers are made to overlap such that an attached generator can drive the transducers, in combination, to deliver ultrasound to the liquid in a broader bandwidth. In a single chamber ultrasound system, two or more generators, each operating or optimized to generate a different range of frequencies, are connected to a multiplexer; and the desired frequency range is selected, and hence the right generator, according to the cavitation implosion energy that is desired within the tank chemistry.

公开(公告)号：US5676015A

公开(公告)日：1997-10-14

申请号：US301194

申请日：1994-09-06

Applicant: Shuh-Haw Sheen ,  Hual-Te Chien ,  Apostolos C. Raptis

Inventor： Shuh-Haw Sheen ,  Hual-Te Chien ,  Apostolos C. Raptis

IPC: B06B1/02 ,  G01N29/11 ,  G01N5/02

CPC classification number: G01N29/11 ,  B06B1/0246 ,  B06B2201/71 ,  G01N2291/015 ,  G01N2291/0237 ,  G01N2291/02491 ,  G01N2291/02845 ,  G01N2291/0421

Abstract: A method and apparatus are provided for monitoring a fabric. An acoustic probe generates acoustic waves relative to the fabric. An acoustic sensor, such as an accelerometer is coupled to the acoustic probe for generating a signal representative of cavitation activity in the fabric. The generated cavitation activity representative signal is processed to indicate moisture content of the fabric. A feature of the invention is a feedback control signal is generated responsive to the generated cavitation activity representative signal. The feedback control signal can be used to control the energy level of the generated acoustic waves and to control the application of a cleaning solution to the fabric.

Abstract translation: 提供了一种用于监测织物的方法和装置。 声学探针产生相对于织物的声波。 诸如加速度计的声学传感器耦合到声学探针，用于产生表示织物中气蚀活性的信号。 产生的气蚀活性代表信号被处理以指示织物的水分含量。 本发明的一个特征是响应于产生的气穴活动代表信号产生反馈控制信号。 反馈控制信号可用于控制产生的声波的能量水平并且控制清洁溶液在织物上的应用。

公开(公告)号：US5178173A

公开(公告)日：1993-01-12

申请号：US739227

申请日：1991-08-01

Applicant: John J. Erickson ,  Drew D. Erickson

Inventor： John J. Erickson ,  Drew D. Erickson

IPC: A61L12/02 ,  B06B1/02 ,  B08B3/12 ,  G02C13/00

CPC classification number: G02C13/008 ,  A61L12/026 ,  B06B1/0276 ,  B08B3/12 ,  B06B2201/55 ,  B06B2201/71 ,  B06B2201/76 ,  Y10S134/901

Abstract: An ultrasonic contact lens cleaning device has a housing with a hemispherical cover hingedly affixed to it. A container for a lens cleaning solution is mounted in the housing. An acoustic resonant structure in the housing is coupled to the container. The structure has piezoelectric components. A frequency modulated power circuit in the housing is electrically connected to and drives the acoustic resonant structure and provides a controlled level of ultrasonic cleaning energy.

Abstract translation: 超声波隐形眼镜清洁装置具有壳体，其具有铰接地固定到其上的半球形盖。 用于透镜清洁溶液的容器安装在壳体中。 壳体中的声学谐振结构耦合到容器。 该结构具有压电元件。 外壳中的调频电源电路电连接并驱动声谐振结构，并提供受控的超声波清洗能量。

公开(公告)号：US4431975A

公开(公告)日：1984-02-14

申请号：US250621

申请日：1981-04-16

Applicant: Richard J. Podlesny

Inventor： Richard J. Podlesny

IPC: B08B3/12 ,  B06B1/02 ,  B06B1/06 ,  H03B5/36 ,  H03B5/00

CPC classification number: B06B1/0276 ,  B06B2201/71

Abstract: An improved oscillator circuit, adapted especially for use in generating multi-frequency wave patterns occurring within the ultrasonic range, incorporates a transistor base drive network in which an alternate discharge path is used for coupling capacitors already known in circuits of this type. Power losses occurring in the transistors are lessened by employing transistors having reverse base-emitter breakdown voltage ratings that are higher than those conventionally employed. Use of the substituted transistors becomes possible by substituting the mentioned alternate discharge path, to compensate for the lower average discharge current that is known to pass through the base-emitter circuits of the transistors by reason of their higher reverse base-emitter breakdown voltages. The improved circuit in this way reduces power loss and its consequent temperature rise in the transistors and in their base and emitter resistors to increase output power to the accompanying reduction of transistor losses.

Abstract translation: 特别适用于产生超声波范围内发生的多频波形图案的改进的振荡器电路包括晶体管基极驱动网络，其中交替的放电路径用于耦合这种类型的电路中已知的电容器。 通过采用具有比通常采用的更高的基极 - 发射极击穿电压额定值的晶体管来减小在晶体管中发生的功率损耗。 通过用上述的交替放电路径来代替已知通过晶体管的基极 - 发射极电路的较低的平均放电电流，由于其较高的反向基极 - 发射极击穿电压，可以使用取代的晶体管。 改进的电路以这种方式降低了晶体管及其基极和发射极电阻中的功率损耗及随之而来的温度上升，从而增加输出功率，减少晶体管损耗。

公开(公告)号：US3842340A

公开(公告)日：1974-10-15

申请号：US1167470

申请日：1970-02-16

Applicant: PHILIPS CORP

Inventor： BRANDQUIST R

IPC: B05B17/06 ,  B06B1/02 ,  H02M7/00 ,  H01V7/00 ,  H02B9/00

CPC classification number: B06B1/0253 ,  B06B2201/71

Abstract: An ultrasonic generator with means for automatically adjusting the oscillation frequency to provide maximum power to the load. The generator includes a DC-AC converter operating into a resonant circuit that is coupled to the transducer. The converter includes first and second switching devices alternately switched by the frequency modulated output of a frequency controllable oscillator. The modulation frequency is derived across a resistor in the converter circuit and is compared with the modulation frequency in a phase detector to produce a control signal whose polarity is determined by the phase relationship of the compared signals. This control signal controls the oscillator to a frequency at which the transducer delivers maximum power to a load.

Abstract translation: 一种超声波发生器，具有用于自动调节振荡频率以为负载提供最大功率的装置。 发电机包括工作在耦合到换能器的谐振电路中的DC-AC转换器。 该转换器包括由频率可控振荡器的调频输出交替切换的第一和第二开关装置。 调制频率通过转换器电路中的电阻器导出，并与相位检测器中的调制频率进行比较，以产生其极性由比较信号的相位关系确定的控制信号。 该控制信号将振荡器控制到传感器向负载提供最大功率的频率。

公开(公告)号：US3761732A

公开(公告)日：1973-09-25

申请号：US3761732D

申请日：1972-09-15

Applicant: BENDIX CORP

Inventor： RATCLIFF H

IPC: B08B3/12 ,  B06B1/02 ,  H02J3/14

CPC classification number: B06B1/023 ,  B06B2201/20 ,  B06B2201/71 ,  Y10T307/484

Abstract: The output of a single sonic generator is rotated to different transducers separately located on a diaphragm of a tank containing cleaning fluid. The rotating of the output to different transducers establishes a ripple action in the cleaning fluid to vary energy levels at any given location within the tank. The varying energy levels allows the gas formed within the fluid to rise to the top of the cleaning fluid in a process called degassing. Rotation of the output may be accomp lished by interrupting the output of the sonic generator and, while the output is interrupted, to switch the connection to another transducer. The switching of the output of the sonic generator from transducer to transducer varies the standing wave pattern, thereby allowing the gas to rise to the surface. The interrupting of the sonic output and the switching action are accomplished by specially designed solid state circuits to obtain optimum performance.

Abstract translation: 单个声波发生器的输出旋转到分开位于包含清洁流体的罐的隔膜上的不同换能器。 输出到不同换能器的旋转在清洗流体中产生波纹作用，以改变罐内任何给定位置处的能量水平。 变化的能量水平允许在流体中形成的气体在称为脱气的过程中升高到清洁流体的顶部。 输出的旋转可以通过中断声波发生器的输出而伴随，并且当输出中断时，将连接切换到另一个换能器。 将声音发生器的输出从换能器切换到换能器会改变驻波图案，从而允许气体升至表面。 声音输出的中断和切换动作由专门设计的固态电路实现，以获得最佳性能。

公开(公告)号：US3638087A

公开(公告)日：1972-01-25

申请号：US3638087D

申请日：1970-08-17

Applicant: BENDIX CORP

Inventor： RATCLIFF HENRY KEVIN

IPC: B06B1/02 ,  H01V9/00

CPC classification number: B06B1/0215 ,  B06B2201/71

Abstract: A gated sonic power supply which permits selection of an optimum duty cycle and pulse repetition rate at which sonic energy must be pulsed to produce the most efficient degassing of tap water and/or uniform cavitation of a cleaning fluid. A pulse generator is used to trigger a gate within the sonic generator. The width of the pulse from the pulse generator determines the length of time that the sonic generator output signal is interrupted to give a pulse-modulated power output. The pulse width from the generator is variable to allow for the selection of a modulation width or duty cycle that gives a maximum efficiency of operation. Also, the frequency of the pulse from the pulse generator may be varied to select the optimum pulse repetition rate.

Abstract translation: 门控声音电源，其允许选择最佳占空比和脉冲重复频率，在该频率下必须脉冲声能以产生自来水的最有效的脱气和/或清洁液的均匀空化。 脉冲发生器用于触发声发生器内的门。 来自脉冲发生器的脉冲宽度决定了声音发生器输出信号被中断以给出脉冲调制功率输出的时间长度。 来自发生器的脉冲宽度是可变的，以允许选择最大的操作效率的调制宽度或占空比。 此外，可以改变来自脉冲发生器的脉冲的频率以选择最佳脉冲重复率。