公开(公告)号：US20040036877A1

公开(公告)日：2004-02-26

申请号：US10441889

申请日：2003-05-20

Inventor： Alexander V. Sergienko ,  Bahaa E.A. Saleh ,  Malvin C. Teich ,  Kimani C. Toussaint JR. ,  Ayman F. Abouraddy

IPC: G01J004/00

CPC classification number: G01N21/211

Abstract: A system for obtaining ellipsometric data from a sample. The system includes a source for providing a monochromatic light beam. The system also includes a nonlinear crystal for converting the monochromatic light beam into photon pairs by disintegrating photons from the monochromatic light beam, such that each of the photon pairs exhibits entanglement properties, wherein one of the photons of the pair is directed to the sample and the other of the photons of the pair is not directed to the sample. The system further includes a circuit for calculating the coincidence of one of the photons of the photon pair reflected from the sample and the other of the photons of the photon pair, wherein the measurements of the sample are obtained by analyzing the coincidence and the entanglement properties between one of the photons of the photon pair reflected from the sample and the other of the photons of the photon pair.

Abstract translation: 用于从样本获取椭圆数据的系统。 该系统包括用于提供单色光束的源。 该系统还包括用于通过从单色光束分解光子将单色光束转换成光子对的非线性晶体，使得每个光子对显示出缠绕性质，其中该对中的一个光子被引导到样品， 该对的另一个光子不指向样品。 该系统还包括一个电路，用于计算从样品反射的光子对的一个光子与光子对中的另一个光子之间的一个光子的一致性，其中通过分析样品的一致性和缠结性质来获得样品的测量值 在从样品反射的光子对的光子之一和光子对的另一个光子之间。

公开(公告)号：US20040036855A1

公开(公告)日：2004-02-26

申请号：US10362390

申请日：2003-06-30

Inventor： Erling Hammer ,  Erik Mucunguzi ,  Eirik Abro

IPC: G01N033/28 ,  G01J004/00 ,  G01N021/85

CPC classification number: G01N21/21 ,  G01N33/1833

Abstract: It is disclosed a device and a method for the on-line determination of the concentration of oil in a water solution by the angle of rotation of plane polarized light.

Abstract translation: 公开了通过平面偏振光的旋转角度在线确定水溶液中的油的浓度的装置和方法。

公开(公告)号：US20030227621A1

公开(公告)日：2003-12-11

申请号：US10171570

申请日：2002-06-11

Inventor： John L. Johnson

IPC: G01J004/00

CPC classification number: G01N21/23

Abstract: A method and an apparatus for measuring the density variations, static and dynamic, in substances that are at least partially transparent to electromagnetic waves is disclosed. A special birefringement crystal phase shifting assembly encodes the angle of incidence resulting from the refractive effects of the electromagnetic waves having passed through a density variation. The angle of incidence is encoded as a poralization phase shift. Specifically, the poralization phase shift is between the ordinary and the extraordinary rays. That poralization phase shift has a known and definable relationship to the gas density experienced by the electromagnetic wave during its path.

Abstract translation: 公开了一种用于测量对电磁波至少部分透明的物质中的静态和动态密度变化的方法和装置。 特殊的双折射晶体相移组件对通过密度变化的电磁波的折射效应产生的入射角进行编码。 入射角被编码为电化相移。 具体来说，通化相移在普通和非凡光线之间。 该通化相移与其在其路径中的电磁波所经历的气体密度具有已知和可定义的关系。

公开(公告)号：US20030214654A1

公开(公告)日：2003-11-20

申请号：US10400369

申请日：2003-03-27

Inventor： Lanhua Wei ,  Hanyou Chu ,  Jon Opsal

IPC: G01J004/00

CPC classification number: G01N21/211 ,  G01B11/065 ,  G01N21/9501 ,  H01L22/12

Abstract: This invention relates to ellipsometry and reflectometry optical metrology tools that are used to evaluate semiconductor wafers and is directed to reducing errors associated with material surrounding a desired measurement area or pad, either by minimizing the uncertainties in positioning the measurement beam or by taking into account the effects of the surrounding material in analyzing the measured data. One aspect the present invention utilizes a technique where initially one purposefully aims to place the optical spot of the measurement beam a few microns away from the center of the target pad. Then a series of measurements are made with each measurement separated by a small stage jog as the optical spot is scanned over the measurement pad. Provided the surrounding material is the same on both sides of the pad, one finds that the data invariably has either a cup or inverted nullUnull shape or an inverted cup or nullUnull shape when viewed as a function of position. The minimum or maximum of the curve is then used to identify the center of the pad. Another aspect the present invention makes use of a novel method of data analysis that allows for the correction of the effects of the surrounding material in analyzing the data. In essence, the data collected at the center of the pad is treated as being created by a superposition of light coming from the pad material itself and light coming from the surrounding material. The influence of the two materials is weighted by the proportion of the light that reflects off the pad as compared with the light that reflects off of the surrounding material. Given knowledge of both the dimensions of the pad and the size and profile of the beam spot, the resulting signal may be mathematically modeled according to the present invention to account for both the contribution of the light reflected from the pad and the light reflected from the surrounding material.

公开(公告)号：US20030206299A1

公开(公告)日：2003-11-06

申请号：US10428387

申请日：2003-05-02

Inventor： Jon Opsal ,  Youxian Wen

IPC: G01J004/00

CPC classification number: G01N21/211 ,  G01N21/8422 ,  G01N25/72

Abstract: A system is disclosed for evaluating nitrogen levels in thin gate dielectric layers formed on semiconductor samples. In one embodiment, a tool is disclosed which includes both a narrow band ellipsometer and a broadband spectrometer for measuring the sample. The narrowband ellipsometer provides very accurate information about the thickness of the thin film layer while the broadband spectrometer contains information about the nitrogen levels. In another aspect of the subject invention, a thermal and/or plasma wave detection system is used to provide information about the nitrogen levels and nitration processes.

Abstract translation: 公开了一种用于评估在半导体样品上形成的薄栅极电介质层中的氮含量的系统。 在一个实施例中，公开了一种工具，其包括窄带椭偏仪和用于测量样品的宽带光谱仪。 窄带椭偏仪提供关于薄膜层的厚度的非常准确的信息，而宽带光谱仪包含关于氮水平的信息。 在本发明的另一方面，使用热和/或等离子体波检测系统来提供关于氮水平和硝化过程的信息。

公开(公告)号：US20030184750A1

公开(公告)日：2003-10-02

申请号：US10253037

申请日：2002-09-24

Inventor： David M. Aikens ,  Jay J. Chen ,  Lanhua Wei

IPC: G01J004/00

CPC classification number: G01J4/00 ,  G01J3/0229 ,  G01N21/211

Abstract: An ellipsometer or reflectometer includes a light source creating a mono or polychromatic probe beam. The probe beam is focused by one or more lenses to create an illumination spot on the surface of the subject under test. A second lens (or lenses) images the illumination spot (or a portion of the illumination spot) to a detector. The detector captures (or otherwise processes) the received image. A processor analyzes the data collected by the detector. An aperture is positioned along the beam bath between the light source and the detector. The aperture has an elliptical shape to give the image received by the detector a circular shape. The circular shape maximizes the amount of energy that may be received using a square test area.

Abstract translation: 椭偏仪或反射计包括产生单色或多色探针光束的光源。 探测光束被一个或多个透镜聚焦，以在待测物体的表面上产生照明斑点。 第二透镜（或透镜）将照明点（或照明点的一部分）图像到检测器。 检测器捕获（或以其他方式处理）接收到的图像。 处理器分析检测器收集的数据。 沿着光源和检测器之间的光束槽定位孔。 该孔具有椭圆形状，以使由检测器接收的图像呈圆形。 圆形形状使得可以使用平方测试区域可以接收的能量的量最大化。

公开(公告)号：US20030142312A1

公开(公告)日：2003-07-31

申请号：US10059612

申请日：2002-01-29

Inventor： Jeffrey H. Hunt

IPC: G01J004/00

CPC classification number: G01J9/00

Abstract: The system includes a first polarizing element; an electro-optically driven birefringent element; a second polarizing element; an optical assembly; and, an optical-to-electronic imaging sensor assembly. The first polarizing element receives an incoming optical wavefront and provides a linearly polarized output therefrom. The electro-optically driven birefringent element receives the linearly polarized output and produces two polarization eigenwaves, an output of the birefringent element being elliptically polarized. The second polarizing element has a polarization axis perpendicular to a polarization axis of the first polarizing element. The second polarizing element receives the output from the birefringent element and provides a linearly polarized output. The optical assembly receives the output of the second polarizing element and forms a real image therefrom. The optical-to-electronic imaging sensor assembly receives the real image and provides an electronic representation thereof, which may be used for real-time reconstruction of the incoming wavefront.

Abstract translation: 该系统包括第一偏振元件; 电光驱动双折射元件; 第二偏振元件; 光学组件; 以及光电子成像传感器组件。 第一偏振元件接收入射光波阵面并从其提供线偏振输出。 电光驱动双折射元件接收线性偏振输出并产生两个偏振本征波，双折射元件的输出是椭圆极化的。 第二偏振元件具有与第一偏振元件的偏振轴垂直的偏振轴。 第二偏振元件接收来自双折射元件的输出并提供线偏振输出。 光学组件接收第二偏振元件的输出并从其形成实际图像。 光电子成像传感器组件接收真实图像并提供其电子表示，其可用于进入波前的实时重建。

公开(公告)号：US20030133124A1

公开(公告)日：2003-07-17

申请号：US10330131

申请日：2002-12-30

Applicant: HOYA CORPORATION

Inventor： Yukihiro Takahashi ,  Takeshi Mitsuishi ,  Kenichi Shinde

IPC: G01B009/02 ,  G01J004/00

CPC classification number: G02B1/11 ,  C23C14/547 ,  G02B1/10

Abstract: A process for forming a thin film is described that enables automatic formation of thin films having constant optical properties reliably and in large quantities with excellent reproducibility suitable for mass production. An apparatus for performing the process is also described. Generally, a material for vapor deposition is vaporized by an electron gun and an antireflection film forms by vapor deposition on lenses held by a coat dome. The electric power applied to the electron gun is controlled so that the amount of transmitted or reflected light continuously measured by an optical film thickness meter during thin film formation is compared to a reference amount of measured light stored in a means for storing data until the measured and reference amounts of measured light are close to, or the same as, one another.

Abstract translation: 描述了一种用于形成薄膜的方法，可以自动形成具有可靠且大量具有适合于批量生产的优异再现性的具有恒定光学特性的薄膜。 还描述了用于执行该处理的装置。 通常，用于气相沉积的材料通过电子枪蒸发，并且通过气相沉积在由罩罩保持的透镜上形成抗反射膜。 控制施加到电子枪的电力，使得在薄膜形成期间由光学膜厚度计连续测量的透射或反射光的量与存储在用于存储数据的装置中的测量光的参考量进行比较，直到测量 并且测量光的参考量彼此接近或相同。

公开(公告)号：US20030117626A1

公开(公告)日：2003-06-26

申请号：US10310195

申请日：2002-12-04

Inventor： Lanhua Wei

IPC: G01J004/00

CPC classification number: G01J4/00

Abstract: An ellipsometer capable of generating a small beam spot is disclosed. The ellipsometer includes a light source for generating a narrow bandwidth probe beam. An analyzer is provided for determining the change in polarization state of the probe beam after interaction with the sample. A lens is provided having a numerical aperture and focal length sufficient to focus the beam to a diameter of less than 20 microns on the sample surface. The lens is formed from a graded index glass wherein the index of refraction varies along its optical axis. The lens is held in a relatively stress free mount to reduce stress birefringence created in the lens due to changes in ambient temperature. The ellipsometer is capable of measuring features on semiconductors having a dimensions as small as 50null50 microns.

公开(公告)号：US20030112436A1

公开(公告)日：2003-06-19

申请号：US10290696

申请日：2002-11-08

Inventor： Xiaotian Steve Yao

IPC: G01J004/00

CPC classification number: G02B6/2706 ,  G02B6/2786 ,  G02B6/32 ,  G02B27/286 ,  H01S3/06712 ,  H04J14/06

Abstract: Techniques and devices for depolaring polarized light by using one or more birefringent optical elements in the optical path of light to scramble the state of polarization of light. Examples of devices for coupling with a fiber or a fiber device, and their applications in various fiber environments are also described.

Abstract translation: 通过在光的光路中使用一个或多个双折射光学元件去偏振偏振光的技术和装置来扰乱光的偏振状态。 还描述了用于与光纤或光纤设备耦合的设备及其在各种光纤环境中的应用的示例。