System and method for using bent pipes in high-purity fluid handling systems
    152.
    发明申请
    System and method for using bent pipes in high-purity fluid handling systems 有权
    在高纯度流体处理系统中使用弯管的系统和方法

    公开(公告)号:US20020166590A1

    公开(公告)日:2002-11-14

    申请号:US09854132

    申请日:2001-05-11

    Abstract: A novel method for bending tubes suitable for use in high-purity fluid handling sygtems includes selecting a tube made from a material having a grain-size number of at least 5, and forming a bend in the tube with a bend radius of greater than 1.5 times the diameter of the tube. Tubes bent according to the present invention are incorporated into high-purity systems as supply lines, product lines, and vacuum forelines, without the need for post-bend heat treatment or polishing.

    Abstract translation: 适用于高纯度流体处理系统的弯曲管的新颖方法包括选择由具有至少5的晶粒数的材料制成的管,并且在弯曲半径大于1.5的管中形成弯曲 倍于管的直径。 根据本发明弯曲的管子作为供应管线,产品线和真空前沿线被并入高纯度系统中,而不需要后弯曲热处理或抛光。

    Gas pressure-regulating device for dispensing working fluid
    154.
    发明授权
    Gas pressure-regulating device for dispensing working fluid 有权
    用于分配工作流体的气体压力调节装置

    公开(公告)号:US06347641B2

    公开(公告)日:2002-02-19

    申请号:US09771720

    申请日:2001-01-30

    Inventor: Georges Guarneri

    Abstract: A system for providing gas to a container includes a source of gas under pressure, a container, and a pressure regulating device. The pressure-regulating device includes an inlet intended to be connected to a source of the gas under pressure, an outlet, connected by a duct to the inlet and intended to be placed in communication with the container, a first valve for limiting the pressure at the outlet to a predetermined maximum value Ps, which valve is a delivery valve placed in a first passage which connects the duct to an orifice for discharging inert gas. The device also includes a second valve for keeping the pressure at the outlet above a predetermined minimum value Pi, which valve is an intake valve placed in a second passage which connects the duct to an orifice that lets fluid into this duct.

    Abstract translation: 用于向容器提供气体的系统包括在压力下的气体源,容器和压力调节装置。 压力调节装置包括用于连接到压力下的气体源的入口,通过管道连接到入口并旨在与容器连通的出口,用于将压力限制在第一阀门 出口到预定的最大值Ps,该阀是放置在将管道连接到用于排放惰性气体的孔口的第一通道中的输送阀。 该装置还包括用于将出口处的压力保持在预定的最小值Pi以上的第二阀,该阀是放置在将管道连接到使流体进入该管道的孔口的第二通道中的进气阀。

    Method and apparatus for removing processing liquid from a processing liquid delivery line
    155.
    发明授权
    Method and apparatus for removing processing liquid from a processing liquid delivery line 失效
    从处理液体输送管线去除处理液体的方法和装置

    公开(公告)号:US06305392B1

    公开(公告)日:2001-10-23

    申请号:US09252717

    申请日:1999-02-19

    Abstract: A method and apparatus for desorbing processing liquid from a processing liquid delivery line is provided. Non-thermal energy, such as ultrasonic energy or electromagnetic energy, is applied to a processing liquid delivery line. The non-thermal energy may be applied directly to the processing liquid delivery line, or may be applied indirectly via a conducting medium which distributes the energy along the length of the processing liquid delivery line. When non-thermal energy in the form of electromagnetic energy is employed, the frequency of the electromagnetic energy is adjusted to match the vibrational frequency of the absorbed molecules of processing liquid.

    Abstract translation: 提供了一种从处理液体输送管线解吸处理液体的方法和装置。 将非热能,例如超声能量或电磁能量施加到处理液体输送管线。 非热能可以直接施加到处理液体输送管线,或者可以通过沿着处理液体输送管线的长度分配能量的导电介质间接地施加。 当采用电磁能形式的非热能时,电磁能的频率被调节以匹配被吸收的处理液分子的振动频率。

    Gas pressure-regulating device for dispensing working fluid
    156.
    发明申请
    Gas pressure-regulating device for dispensing working fluid 有权
    用于分配工作流体的气体压力调节装置

    公开(公告)号:US20010008146A1

    公开(公告)日:2001-07-19

    申请号:US09771720

    申请日:2001-01-30

    Inventor: Georges Guarneri

    Abstract: This pressure-regulating device (12) for supplying a gas to a container (4) comprises an inlet (14) intended to be connected to a source (7) of the said gas under pressure, an outlet (16), connected by a duct (31) to the said inlet (14) and intended to be placed in communication with the container (4), a first valve (36) for limiting the pressure at the said outlet (16) to a predetermined maximum value Ps, which valve (36) is a delivery valve placed in a first passage (34) which connects the said duct (31) to an orifice (27) for discharging inert gas. The device (12) also comprises a second valve (39) for keeping the pressure at the said outlet (16) above a predetermined minimum value Pi, which valve (39) is an intake valve placed in a second passage (35) which connects the said duct (31) to an orifice (27) that lets fluid into this duct. Application in the supply of working liquids in the electronics industry.

    Abstract translation: 用于向容器(4)供应气体的该压力调节装置(12)包括用于连接到压力下的所述气体源(7)的入口(14),出口(16),其通过 管道(31)连接到所述入口(14)并且旨在与容器(4)连通;第一阀(36),用于将所述出口(16)处的压力限制到预定的最大值Ps, 阀(36)是放置在第一通道(34)中的输送阀,其将所述管道(31)连接到用于排放惰性气体的孔口(27)。 装置(12)还包括用于将所述出口(16)处的压力保持在预定的最小值Pi以上的第二阀(39),该阀(39)是放置在第二通道(35)中的进气阀,其连接 所述管道(31)连接到使流体进入该管道的孔口(27)。 在电子工业中应用工作液体。

    Chemical reactor feed control
    160.
    发明授权
    Chemical reactor feed control 失效
    化学反应堆饲料控制

    公开(公告)号:US5671153A

    公开(公告)日:1997-09-23

    申请号:US393768

    申请日:1995-02-24

    Abstract: In a process for manufacture of a chemical product in which a plurality of individual reactant containing feedstreams are combined to form a mixed feedstream for a reactor, and wherein at least one of the plurality of feedstreams is subject to variations in reactant concentration, and another one of the plurality of feedstreams is essentially stable in reactant concentration, a desired ratio of relative reactant concentrations in the mixed feedstream is maintained by a control system which infers a reactant concentration ratio in the mixed feedstream based on process measurements and feed parameters related to the plurality of feedstock containing streams prior to their being combined. In use, flow rate of the feedstream which is essentially stable in reactant concentration is manipulated to maintain the inferred reactant concentrations in the mixed stream.

    Abstract translation: 在制造化学产品的方法中,其中将多个含有反应物的原料流混合以形成用于反应器的混合进料流,并且其中多个进料流中的至少一个受到反应物浓度的变化,另一个 多个进料流中的反应物浓度基本上是稳定的,通过控制系统维持混合进料流中相对反应物浓度的期望比例,该控制系统基于与多个流体相关的过程测量和进料参数推测混合进料流中的反应物浓度比 的原料含有物流之前的组合。 在使用中,操作基本上反应物浓度稳定的进料流的流速以维持混合流中推断的反应物浓度。

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