OPENING/CLOSING MECHANISM, EXHAUST SWITCHING MECHANISM, AND SUBSTRATE PROCESSING DEVICE

    公开(公告)号:US20250091024A1

    公开(公告)日:2025-03-20

    申请号:US18890722

    申请日:2024-09-19

    Inventor: Chiaki MORIYA

    Abstract: An opening/closing mechanism includes a base member that can be attached to attachment openings of a switching box, an upper support member provided on an upper surface of the base member, an actuator, a rod extended downward from the actuator while penetrating the base member and moved in an up-down direction by the actuator, a lower support member provided on a lower surface of the base member, a lid member provided below the base member and capable of closing a communication port, and a first link and a second link provided below the base member and configured to connect the rod, the lower support member, and the lid member. The movement of the rod is transmitted to the lid member via the first link and the second link, so that the lid member is switched between an open state and a closed state.

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