Abstract:
An etchant for removing an indium oxide layer includes sulfuric acid as a main oxidizer, an auxiliary oxidizer such as H3PO4, HNO3, CH3COOH, HClO4, H2O2, and a Compound A that is obtained by mixing potassium peroxymonosulfate (2KHSO5), potassium bisulfate (KHSO4), and potassium sulfate (K2SO4) together in the ratio of 5:3:2, an etching inhibitor comprising an ammonium-based material, and water. The etchant may remove desired portions of the indium oxide layer without damage to a photoresist pattern or layers underlying the indium oxide layer.
Abstract translation:用于除去氧化铟层的蚀刻剂包括硫酸作为主要氧化剂,辅助氧化剂如H 3 PO 4,HNO 3, CH 3 COOH,HClO 4,H 2 O 2,以及通过将钾 过硫酸氢盐(2KHSO 5),硫酸氢钾(KHSO 4)和硫酸钾(K 2 SO 4) 一起以5:3:2的比例,包含铵基材料的蚀刻抑制剂和水。 蚀刻剂可以去除铟氧化物层的期望部分,而不损害光致抗蚀剂图案或氧化铟层下面的层。
Abstract:
An etchant according to exemplary embodiments of the present invention includes about 0.5 wt % to about 20 wt % of persulfate, about 0.01 wt % to about 2 wt % of a fluorine compound, about 1 wt % to about 10 wt % of inorganic acid, about 0.5 wt % to about 5 wt % of a cyclic amine compound, about 0.1 wt % to about 5 wt % of a chlorine compound, about 0.05 wt % to about 3 wt % of copper salt, about 0.1 wt % to about 10 wt % of organic acid or organic acid salt, and water.
Abstract:
An etchant includes: 5 to 20 wt % of persulfate, 1 to 10 wt % of at least one compound of an inorganic acid, an inorganic acid salt, or a mixture thereof, 0.3 to 5 wt % of a cyclic amine compound, 1 to 10 wt % of at least one compound of an organic acid, an organic acid salt, or a mixture thereof, 0.1 to 5 wt % of p-toluenesulfonic acid, and water, based on the total weight of the etchant. A copper-titanium etchant further includes 0.01 to 2 wt % of a fluoride-containing compound. A method of forming a display device using the etchant, and a display device, are also disclosed.
Abstract:
The present invention relates to a method and system for providing voice-based supplementary information service using road map data. The voice-based supplementary information service system includes a content registration server for receiving content for the voice-based supplementary information service, and converting the content into supplementary information data having voice data format. At least one GPS satellite detects a location of the mobile communication terminal and transmits GPS radio waves, including the location information. A mobile communication terminal receives the location information and requests the road guidance service and the supplementary information service. A relay server relays requests for the road guidance service and the supplementary information service. A road search server generates road map data and transmits the road map data to the relay server. A user management server determines whether the request for the supplementary information service exists in the road map data. An information provision server verifies the type of supplementary information service, receives supplementary information data corresponding to the type from the content registration server, and generates supplementary information-added data in which the supplementary information data is included in a data area of the road map data.
Abstract:
Provided are a method for automatically entering into a secure communication mode that can perform secured voice communication between a transmission terminal and a reception terminal without changing or pre-setting a conventional wireless mobile communication system by forming part of a voice signal as a token for attempting secured voice communication, and a computer-readable recording medium for recording a program that implements the method. The method of the present research includes the steps of: a) generating a token based on a data having the lowest frequency of generation among the voice data outputted from a vocoder of the wireless communication terminal; b) at a transmission terminal receiving a request for a secure communication from a user and transmitting the token to a reception terminal; and c) at the transmission terminal entering into a secure communication mode based on an acknowledge token transmitted from the reception terminal, and performing secure communication with the reception terminal.