公开(公告)号：US20030098767A1

公开(公告)日：2003-05-29

申请号：US10303466

申请日：2002-11-25

Applicant: MEMSCAP (Societe anonyme)

Inventor： Lionel Girardie ,  Jean-Baptiste David

IPC: H01F005/00

CPC classification number: H01L23/53228 ,  H01F41/042 ,  H01L23/5227 ,  H01L23/53295 ,  H01L2924/0002 ,  H01L2924/00

Abstract: The invention relates to a process for fabricating electronic components incorporating an inductive microcomponent placed on top of a substrate. Such a component comprises: a layer (10) of material having a low relative permittivity, lying on the top face of the substrate (1); a number of metal turns (30-31) defined on top of the layer (10) of material having a low relative permittivity; and a copper-diffusion barrier layer (15) interposed between the metal turns (30-31) and the layer of material having a low relative permittivity.

公开(公告)号：US20020109956A1

公开(公告)日：2002-08-15

申请号：US09989584

申请日：2001-11-20

Applicant: MEMSCAP

Inventor： Bertrand Guillon ,  Pierre Blondy

IPC: H01G005/14

CPC classification number: H01G5/16 ,  H01G5/38

Abstract: A microcomponent including a capacitive component, wherein the capacitive component consists of at least two elementary capacitors (C1, C2, C3, C4) connected in series, each elementary capacitor comprising two plates, namely: a plate (10) fixed with respect to the rest of the microcomponent; a second plate (12), part of which is capable of being displaced with respect to the first fixed plate (10) due to the effect of a control signal, so as to vary the value of the capacitance of the elementary capacitor C1, and wherein the control signals for the various elementary capacitors are generated independently so as to vary the overall capacitance of the capacitor by independent variation of the capacitances of each elementary capacitor.

Abstract translation: 一种包括电容分量的微组件，其中所述电容分量由串联连接的至少两个基本电容器（C1，C2，C3，C4）组成，每个元件电容器包括两个板，即：相对于所述电容元件固定的板（10） 其余微量元件; 第二板（12），其部分能够由于控制信号的影响而相对于第一固定板（10）移位，以便改变基本电容器C1的电容值，以及 其中独立产生各种基本电容器的控制信号，以便通过每个基本电容器的电容的独立变化来改变电容器的整体电容。

公开(公告)号：US20030138611A1

公开(公告)日：2003-07-24

申请号：US10328881

申请日：2002-12-24

Applicant: MEMSCAP

Inventor： Lionel Girardie

IPC: B32B009/00

CPC classification number: H01L21/022 ,  C23C16/40 ,  C23C16/45529 ,  C23C16/45531 ,  H01L21/02194 ,  H01L21/0228 ,  H01L21/28194 ,  H01L21/31604 ,  H01L29/513 ,  H01L29/517 ,  Y10T428/24975

Abstract: Multilayer structure, used especially as a material of high relative permittivity, characterized in that it comprises a plurality of separate layers, each having a thickness of less than 500 null, and some of which are based on aluminium, hafnium and oxygen and especially based on hafnium dioxide (HfO2) and on alumina (Al2O3). In practice, the hafnium dioxide and alumina layers form alloys of formula HfxAlyOz. Advantageously, the stoichiometry of the HfxAlyOz varies from one layer to another.

Abstract translation: 特别是特别用作高相对介电常数的材料的多层结构，其特征在于它包括多个分开的层，每个层具有小于500埃的厚度，其中一些层基于铝，铪和氧，特别是基于 二氧化铪（HfO 2）和氧化铝（Al 2 O 3）。 实际上，二氧化铪和氧化铝层形成式为Hf x Al y O z的合金。 有利地，Hf x Al y O z的化学计量从一层到另一层不同。

公开(公告)号：US20030129446A1

公开(公告)日：2003-07-10

申请号：US10328880

申请日：2002-12-24

Applicant: MEMSCAP Le Parc Technologique des Fontaines

Inventor： Lionel Girardie

IPC: B32B003/00

CPC classification number: H01L21/28194 ,  C23C16/40 ,  C23C16/45529 ,  C23C16/45531 ,  H01L21/02178 ,  H01L21/02181 ,  H01L21/02183 ,  H01L21/02186 ,  H01L21/02189 ,  H01L21/02194 ,  H01L21/022 ,  H01L21/0228 ,  H01L21/31604 ,  H01L21/31616 ,  H01L21/31683 ,  H01L28/40 ,  H01L29/513 ,  H01L29/517

Abstract: Multilayer structure, used especially as a material of high relative permittivity, characterized in that it comprises a plurality of superposed elementary layers, each with a thickness of less than about 500 null, among which there are two layers based on an alloy of titanium dioxide (TiO2) and tantalum pentoxide (Ta2O5), these layers being separated by an interlayer of an alloy based on at least hafnium dioxide (HfO2) an alumina (Al2O3).

Abstract translation: 特别是作为高相对介电常数的材料使用的多层结构，其特征在于，它包括多个重叠的基本层，每个层厚度小于约500埃，其中有两层是基于二氧化钛合金 TiO 2）和五氧化二钽（Ta 2 O 5），这些层由基于至少二氧化铪（HfO 2），氧化铝（Al 2 O 3）的合金中间层分开。

公开(公告)号：US20030030527A1

公开(公告)日：2003-02-13

申请号：US10213928

申请日：2002-08-06

Applicant: MEMSCAP Parc Technologique des Fontaines

Inventor： Ahmed Mhani ,  Jean-Marc Fedeli

IPC: H01F021/06

CPC classification number: H03H9/02259 ,  H03H9/02377 ,  H03H2009/02496

Abstract: A microelectromechanical component (1) providing filtering functions, produced on a semiconductor-based substrate (10) and comprising two input terminals (7, 8) and two output terminals (26, 27), which also comprises: a metal input coil (2), connected to the input coils (7, 8) and capable of producing a magnetic field when a current flows through it; a movable element (3), connected to the substrate by at least one deformable portion and including at least one region (11, 12) made of a ferromagnetic material, said movable element (3) being capable of moving under the effect of the force, to which the region (11) made of a ferromagnetic material is subject, generated by the magnetic field produced by the input coil (2); an output member (4) forming a magnetic sensor, connected to the output terminals (26, 27) and capable of producing an electrical signal that can be varied according to the movement of the movable element (3).

Abstract translation: 一种提供过滤功能的微机电部件（1），其在基于半导体的基板（10）上产生并且包括两个输入端子（7,8）和两个输出端子（26,27），其还包括：金属输入线圈 ），连接到输入线圈（7,8），并且当电流流经时产生磁场; 可移动元件（3），其通过至少一个可变形部分连接到所述基板并且包括由铁磁材料制成的至少一个区域（11,12），所述可移动元件（3）能够在所述力的作用下移动 由铁磁材料制成的区域（11）由输入线圈（2）产生的磁场产生; 形成磁传感器的输出构件（4），连接到输出端子（26,27），并且能够产生可根据可移动元件（3）的移动而改变的电信号。

公开(公告)号：US20030027370A1

公开(公告)日：2003-02-06

申请号：US10205724

申请日：2002-07-26

Applicant: MEMSCAP(Societe Anonyme)

Inventor： Philippe Helin

IPC: H01L031/00 ,  H01L027/14 ,  H01L029/82 ,  H01L021/00

CPC classification number: G02B6/3584 ,  G02B6/266 ,  G02B6/3514 ,  G02B6/3546 ,  G02B6/357 ,  G02B26/0841 ,  G02B2006/12104

Abstract: Process for fabricating a microelectromechanical optical component (1) produced from a silicon substrate, comprising: optical propagation guides (2-5); a wall (6) which can move with respect to the propagation guides (2-5); and an electrostatic actuator (10) associated with return means formed by at least one beam (15, 16) which is capable of causing the moving wall (6) to move with respect to the rest of the substrate. According to the invention: the substrate used is made of single-crystal silicon, the (111) crystalographic planes of which are parallel to the plane of the substrate; the process comprises a first series of deep reactive ion etching steps during which the heights of the moving wall (6), of the electrodes of the actuator (11, 12), and of the beams (15, 16) of the return means of the actuator are defined with different values; and the process comprises a second wet etching step, making it possible to free the moving wall (6), the electrodes (11, 12) and the beams (15, 16) from the rest of the substrate

Abstract translation: 一种由硅衬底制造的微电子机械光学部件（1）的制造方法，包括：光学传播引导件（2-5）; 相对于传播引导件（2-5）移动的壁（6）; 以及与由至少一个梁（15,16）形成的返回装置相关联的静电致动器（10），其能够使所述移动壁（6）相对于所述基板的其余部分移动。 根据本发明：所使用的基板由单晶硅制成，（111）晶体平面平行于基板的平面; 该过程包括第一系列深反应离子蚀刻步骤，在该步骤期间，移动壁（6）的高度，致动器（11,12）的电极和返回装置的梁（15,16）的高度 致动器用不同的值定义; 并且该方法包括第二湿蚀刻步骤，使得可以将移动壁（6），电极（11,12）和光束（15,16）从基板的其余部分

公开(公告)号：US20020097975A1

公开(公告)日：2002-07-25

申请号：US10024682

申请日：2001-12-18

Applicant: MEMSCAP

Inventor： Arnaud Delpoux ,  Jean-Michel Karam ,  Marie-Ange Iannello ,  Nan Zhang ,  Gary Nault

IPC: G02B006/00 ,  G02B006/36

CPC classification number: G02B6/3636 ,  G02B6/3502 ,  G02B6/357 ,  G02B6/3584 ,  G02B6/3652

Abstract: Device allowing the end (4) of an optical fiber (3) to be positioned and held in place inside a substrate (1), wherein: the substrate (1) has a groove (2) intended to accommodate the end (4) of the optical fiber (3), said groove (2) possessing at least one plane wall (8) perpendicular to the principal plane (9) of the substrate (1); the groove (2) includes a moveable part (5), located on the face opposite the plane wall (8) and capable of moving toward said plane wall (8) between two positions, namely; a retracted position in which the end of the optical fiber (3) can penetrate freely into the groove (2); a locked position in which the moveable part (5) comes into contact with the optical fiber (3) in order to press it against said plane wall (8); it includes means (21, 24) allowing a force to be exerted on the moveable part (5) in order to cause it to move with respect to the plane wall (8)

Abstract translation: 允许光纤（3）的端部（4）被定位并保持在基板（1）内的位置的装置，其中：所述基板（1）具有用于容纳端部（4）的槽（2） 所述光纤（3），所述槽（2）具有垂直于所述基板（1）的主平面（9）的至少一个平面壁（8）; 所述槽（2）包括位于与所述平面壁（8）相对的表面上且能够在两个位置之间朝向所述平面壁（8）移动的可移动部分（5） 缩回位置，其中光纤（3）的端部可以自由地穿入凹槽（2）中; 其中可移动部分（5）与光纤（3）接触以便将其压靠在所述平面壁（8）上的锁定位置; 它包括允许力施加在可移动部分（5）上以使其相对于平面壁（8）移动的装置（21,24）

公开(公告)号：US20020050906A1

公开(公告)日：2002-05-02

申请号：US09870819

申请日：2001-05-31

Applicant: MEMSCAP, S.A.

Inventor： Jean-Marc Fedeli ,  Bertrand Guillon

IPC: H01F038/20

CPC classification number: H01F3/14 ,  H01F17/0006 ,  H01F17/0033 ,  H01F27/34

Abstract: Inductive microcomponent (1), such as a microinductor or microtransformer, comprising a metal winding (2) having the shape of a solenoid and a magnetic core (4) made of a ferromagnetic material positioned at the center of the solenoid (2), wherein the core (4) consists of several sections (13-16) separated by cutouts (17-19) oriented parallel to the main axis (20) of the solenoid (4).

Abstract translation: 包括具有螺线管形状的金属绕组（2）和位于螺线管（2）中心的铁磁材料制成的磁芯（4）的微电感器或微型变压器的感应微元件（1），其中 芯部（4）包括由平行于螺线管（4）的主轴线（20）定向的切口（17-19）分开的几个部分（13-16）。

公开(公告)号：US20030207097A1

公开(公告)日：2003-11-06

申请号：US10425415

申请日：2003-04-29

Applicant: MEMSCAP Le Parc Technologique des Fountaines

Inventor： Lionel Girardie

IPC: B32B009/00

CPC classification number: H01L21/022 ,  C23C16/40 ,  C23C16/45529 ,  H01L21/02178 ,  H01L21/02181 ,  H01L21/02192 ,  H01L21/02194 ,  H01L21/0228 ,  H01L21/28167 ,  H01L21/28194 ,  H01L21/31604 ,  H01L29/513 ,  H01L29/517 ,  Y10T428/24975

Abstract: Multilayer structure, used especially as a material of high relative permittivity, characterized in that it comprises a plurality of separate layers, each having a thickness of less than 500 null. Some of those layers are based on aluminium, hafnium and oxygen and especially based on hafnium dioxide (HfO2) and on alumina (Al2O3). In practice, the hafnium dioxide and alumina layers form alloys of formula HfxAlyOz. Advantageously, the stoichiometry of the HfxAlyOz varies from one layer to another. Some of the layers containing HfxAlyOz alloys, or some of the layers between those containing HfxAlyOz alloys, also include a lanthanide element.

Abstract translation: 特别是特别用作高相对介电常数的材料的多层结构，其特征在于它包括多个单独的层，每个层具有小于500埃的厚度。 这些层中的一些基于铝，铪和氧，特别是基于二氧化铪（HfO 2）和氧化铝（Al 2 O 3）。 实际上，二氧化铪和氧化铝层形成式为Hf x Al y O z的合金。 有利地，Hf x Al y O z的化学计量从一层到另一层不同。 含有Hf x Al y O z合金的一些层，或含有Hf x Al y O z合金的层之间的一些层也包括镧系元素。

公开(公告)号：US20030194172A1

公开(公告)日：2003-10-16

申请号：US10391336

申请日：2003-03-18

Applicant: MEMSCAP

Inventor： Diaa Khalil ,  Kareem Madkour ,  Bassam Saadany ,  Tarek Badreldin ,  Philippe Helin

IPC: G02B006/35

CPC classification number: G02B6/3582 ,  G02B6/3512 ,  G02B6/3546 ,  G02B6/356 ,  G02B6/3584 ,  G02B6/3596

Abstract: An optical switching matrix, made from a semiconductor-D dielectric-based substrate, comprising: at least one set of optical input fibers (12) and at least one set of optical output fibers (14) oriented substantially perpendicular to each other, a set of moveable mirrors (5, 13) placed at the intersections of the directions defined by the various optical fibers, each mirror (13) being capable of moving in order to reflect a beam coming from an optical input fiber, bound for an optical output fiber, a set of channels defined between the mirrors, inside which the various beams are propagated before and after having encountered the mirrors, in which: the set of mirrors is made on a first substrate wafer (2), said first wafer being covered with a second substrate wafer (20), the various channels (38) are formed between protruding zones (34) present under the second substrate wafer, said protruding zones comprising housings (33) inside which the moveable mirrors are able to move.

Abstract translation: 一种由半导体-D电介质基底制成的光学开关矩阵，包括：至少一组光输入光纤（ 12）和至少一组光输出光纤（ 14 每个反射镜（ 13）定位成基本垂直的方向，一组位于由各种光纤限定的方向的交点处的可移动反射镜（ 5，13 ） ）能够移动，以便反射来自光输入光纤的束，光束输入光纤被限定在光输出光纤之间，在镜之间定义的一组通道，其中各个光束在遇到之前和之后传播 镜子，其中：一组镜子在第一衬底晶片（ 2 ）上制成，所述第一晶片被第二衬底晶片（ 20 ）覆盖， 在各个突出区域（ 34 ）之间形成各种通道（ 38 ） 在第二衬底晶片下面，所述突出区域包括可移动反射镜能够移动的壳体（ 33）。