Abstract:
A MEMS sensor comprising preloaded suspension springs and a method for mechanically preloading suspension springs of a MEMS sensor are described. The MEMS sensor comprises a MEMS support structure; a plurality of suspension springs connected to said support structure; and, a proof mass flexibly suspended by said suspension springs; wherein at least one of said suspension springs is mechanically preloaded with a compressive force for reducing the natural frequency of said proof mass.
Abstract:
The present invention relates to methods and cross-linkers for the macrocyclization of proteins. The invention is useful for increasing the stability of a protein.
Abstract:
A metrology apparatus (302) includes a higher harmonic generation (HHG) radiation source for generating (310) EUV radiation. Operation of the HHG source is monitored using a wavefront sensor (420) which comprises an aperture array (424, 702) and an image sensor (426). A grating (706) disperses the radiation passing through each aperture so that the image detector captures positions and intensities of higher diffraction orders for different spectral components and different locations across the beam. In this way, the wavefront sensor can be arranged to measure a wavefront tilt for multiple harmonics at each location in said array. In one embodiment, the apertures are divided into two subsets (A) and (B), the gratings (706) of each subset having a different direction of dispersion. The spectrally resolved wavefront information (430) is used in feedback control (432) to stabilize operation of the HGG source, and/or to improve accuracy of metrology results.
Abstract:
A method for managing communication in a wireless mesh network comprising a plurality of wireless nodes and a wireless node for use in such network are described, wherein said method may comprise: providing a time slot schedule (frame), preferably a TDMA time slot schedule (frame), comprising one or more time slots, including a transmission time slot enabling a node to transmit a broadcast message, a reception time slot enabling a node to receive a broadcast message from one or more other nodes; and/or a sleep time slot for configuring said node in an idle state; and, assigning said time slots to nodes in said network on the basis of the position of said nodes in said network.
Abstract:
Disclosed is a method for obtaining a computationally determined interference electric field describing scattering of radiation by a pair of structures comprising a first structure and a second structure on a substrate. The method comprises determining a first electric field relating to first radiation scattered by the first structure; determining a second electric field relating to second radiation scattered by the second structure; and computationally determining the interference of the first electric field and second electric field, to obtain a computationally determined interference electric field.
Abstract:
Described is a metrology system for determining a characteristic of interest relating to at least one structure on a substrate, and associated method. The metrology system comprises a processor being configured to computationally determine phase and amplitude information from a detected characteristic of scattered radiation having been reflected or scattered by the at least one structure as a result of illumination of said at least one structure with illumination radiation in a measurement acquisition, and use the determined phase and amplitude to determine the characteristic of interest.
Abstract:
The present invention relates to the fields of medicine and molecular diagnostics. In particular, it relates to a novel method for the treatment, prevention and/or delay of cancer and to a diagnostic method involving detection of a novel auto-active and intracellular mutant of MET.
Abstract:
In an inspection apparatus, a target on the surface is illuminated with illuminating radiation that comprises first and second illuminating components. The illuminating components form one or more periodic illuminating patterns on the surface. A plurality of scattered radiation patterns formed by the illuminating radiation after scattering by the target is captured at a detector for a number of values of a controllable characteristic of at least one of the illuminating components. The captured radiation is then used to reconstruct data describing the target.
Abstract:
The present invention relates to a method for identifying Leukemic stem cells (LSC), based on measurement of the presence of a specific set of markers. The invention further relates to a container for use in performing the method. Also provided is application of the method for predicting response to therapy and/or chance of relapse of Acute Myeloid Leukemia, and application of the method in the context of screening for compounds that specifically eradicate Leukemic cells and not benign cells.
Abstract:
A microscopic imaging apparatus to provide an image of a sample. The apparatus includes an illumination system to provide an illumination beam with radiation; and a sensor constructed and arranged to receive: a first image of a first diffraction pattern created by diffraction of the illumination beam on the sample; and a second image of a second diffraction pattern created by diffraction of the illumination beam on the sample.