SUBSTRATE BONDING SYSTEM AND MOBILE CHAMBER USED THERETO
    12.
    发明申请
    SUBSTRATE BONDING SYSTEM AND MOBILE CHAMBER USED THERETO 有权
    基板接合系统和移动电话室

    公开(公告)号:US20120298306A1

    公开(公告)日:2012-11-29

    申请号:US13577458

    申请日:2010-11-26

    CPC classification number: H01L21/6776 H01L21/67092 H01L21/6719

    Abstract: A substrate attachment system, including a portable chamber for receiving a pair of substrates which are aligned; a conveyor transportation device which continuously moves the portable chamber and to which a vacuum generator that is connected to a vacuum port of the portable chamber to evacuate the inside of the portable chamber is provided; and a heating device for performing a heating process in which the aligned substrates are attached to each other in the portable chamber, wherein the conveyor transportation device is arranged to pass through the heating device. The substrate attachment system may contribute to high attachment accuracy, and also, since the size of a chamber is reduced, a spatial utilization rate may be high, and also, since an attachment process is continuously performed by using a conveyor transportation device, a process time may be reduced.

    Abstract translation: 一种基板连接系统,包括用于接收对准的一对基板的便携式室; 提供了一种输送机输送装置,其连续地移动便携式室,并且提供连接到便携式室的真空端口以抽真空便携式室的内部的真空发生器。 以及用于进行加热处理的加热装置,其中对准的基板在便携式室中彼此附接,其中输送机输送装置布置成穿过加热装置。 衬底附着系统可以有助于高附着精度,并且由于室的尺寸减小,空间利用率可能高,并且由于通过使用输送机输送装置连续地执行附接过程,因此, 时间可能会减少。

    Substrate bonding system and mobile chamber used thereto
    16.
    发明授权
    Substrate bonding system and mobile chamber used thereto 有权
    基板接合系统和移动室

    公开(公告)号:US08999099B2

    公开(公告)日:2015-04-07

    申请号:US13577458

    申请日:2010-11-26

    CPC classification number: H01L21/6776 H01L21/67092 H01L21/6719

    Abstract: A substrate attachment system, including a portable chamber for receiving a pair of substrates which are aligned; a conveyor transportation device which continuously moves the portable chamber and to which a vacuum generator that is connected to a vacuum port of the portable chamber to evacuate the inside of the portable chamber is provided; and a heating device for performing a heating process in which the aligned substrates are attached to each other in the portable chamber, wherein the conveyor transportation device is arranged to pass through the heating device. The substrate attachment system may contribute to high attachment accuracy, and also, since the size of a chamber is reduced, a spatial utilization rate may be high, and also, since an attachment process is continuously performed by using a conveyor transportation device, a process time may be reduced.

    Abstract translation: 一种基板连接系统,包括用于接收对准的一对基板的便携式室; 提供了一种输送机输送装置,其连续地移动便携式室,并且提供连接到便携式室的真空端口以抽真空便携式室的内部的真空发生器。 以及用于进行加热处理的加热装置,其中对准的基板在便携式室中彼此附接,其中输送机输送装置布置成穿过加热装置。 衬底附着系统可以有助于高附着精度,并且由于室的尺寸减小,空间利用率可能高,并且由于通过使用输送机输送装置连续地执行附接过程,因此, 时间可能会减少。

    Gas supplying apparatus
    17.
    发明授权
    Gas supplying apparatus 失效
    供气装置

    公开(公告)号:US07303141B2

    公开(公告)日:2007-12-04

    申请号:US10801852

    申请日:2004-03-17

    CPC classification number: C23C16/4558

    Abstract: A gas supplying apparatus for supplying deposition gas onto a substrate surface, the gas supplying apparatus comprising: a gas supplying ring with one or more gas supplying channels formed along the interior of the gas supplying ring and with a plurality of gas distribution channels directed toward a center of the gas supplying ring; and a plurality of adapters with gas nozzles connecting to the gas distribution channels, respectively, that detachably connect to the interior of the gas supplying ring, wherein the gas nozzles have a variety of injection configurations.

    Abstract translation: 一种用于将沉积气体供应到基板表面上的气体供应装置,所述气体供应装置包括:气体供给环,其具有沿着所述气体供应环的内部形成的一个或多个气体供应通道,以及多个朝向 供气环中心; 以及分别具有连接到气体分配通道的气体喷嘴的多个适配器,其可拆卸地连接到气体供应环的内部,其中气体喷嘴具有各种喷射构型。

    Variable alignment-type optical fiber block
    18.
    发明授权
    Variable alignment-type optical fiber block 失效
    可变对准型光纤块

    公开(公告)号:US06920268B2

    公开(公告)日:2005-07-19

    申请号:US10439028

    申请日:2003-05-16

    CPC classification number: G02B6/12016 G02B6/1203 G02B6/30

    Abstract: Disclosed is a variable alignment-type optical fiber block in which alignment of waveguides can be changed according to temperature. The optical fiber block includes: a substrate having a receiving section formed at one end of the substrate, the receiving section having a predetermined volume; a ferrule seated in the receiving section, the ferrule having a hole in which an optical fiber is inserted; a first expandable block disposed between one side surface of the ferrule and an inner wall surface of the receiving section, which are opposed to each other, the first expandable block having a first thermal expansive coefficient; and, a second expandable block disposed between the other side surface of the ferrule and another inner wall surface of the receiving section, which are opposed to each other, the second expandable block having a second thermal expansive coefficient.

    Abstract translation: 公开了可以根据温度改变波导对准的可变对准型光纤块。 所述光纤块包括:具有形成在所述基板的一端的接收部的基板,所述接收部具有预定的体积; 安装在所述接收部中的套圈,所述套圈具有插入光纤的孔; 第一可膨胀块,其设置在所述套圈的一个侧表面和所述接收部分的彼此相对的内壁表面之间,所述第一可膨胀块具有第一热膨胀系数; 以及第二可膨胀块,其设置在所述套圈的另一侧表面和所述接收部分的另一内壁表面之间,所述第二可膨胀块彼此相对,所述第二可膨胀块具有第二热膨胀系数。

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