公开(公告)号：US20130153552A1

公开(公告)日：2013-06-20

申请号：US13325578

申请日：2011-12-14

Applicant: Sungho JEONG ,  Seokhee Lee ,  Hee-Sang Shim

Inventor： Sungho JEONG ,  Seokhee Lee ,  Hee-Sang Shim

IPC: B23K26/36 ,  B23K26/40

CPC classification number: B23K26/032 ,  B23K26/364

Abstract: A scribing apparatus having a function to analyze distribution of a material forming a semiconductor or solar cell in real-time in a process producing the semiconductor or solar cell of is disclosed. The scribing apparatus having the analysis function of material distribution comprises: a laser irradiation unit, which conducts scribing by irradiating laser to a position to be scribed of an analysis subject; a spectrum detection optical unit, which detects a spectrum generated from plasma, which is produced by the irradiated laser; a spectrum information storage, which stores spectrum state information of each material forming the analysis subject; and a spectrum analysis unit, which analyzes distribution state information of the material by comparing the spectrum state information and the detected spectrum.

Abstract translation: 公开了一种在制造半导体或太阳能电池的过程中实时分析形成半导体或太阳能电池的材料的分布的功能的划线装置。 具有材料分布分析功能的划线装置包括：激光照射单元，其通过将激光照射到待分析对象的位置进行划线; 光谱检测光学单元，其检测由照射的激光产生的等离子体产生的光谱; 频谱信息存储器，其存储形成分析对象的各种材料的频谱状态信息; 以及频谱分析单元，其通过比较频谱状态信息和检测到的频谱来分析材料的分布状态信息。