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公开(公告)号:US10768153B2
公开(公告)日:2020-09-08
申请号:US15748723
申请日:2016-08-01
Inventor: Yael Nemirovsky , Amikam Nemirovsky , Shmuel Melman
Abstract: A gas sensing device that includes a (a) gas reactive element that has a gas dependent temperature parameter; and (b) a semiconductor temperature sensing element that is spaced apart from the gas reactive element and is configured to sense radiation emitted from the gas reactive element and generate detection signals that are responsive to a temperature of the gas reactive element; wherein the gas reactive element and the semiconductor temperature sensing element are of microscopic scale.
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公开(公告)号:US20200088664A1
公开(公告)日:2020-03-19
申请号:US16580120
申请日:2019-09-24
Inventor: Yael Nemirovsky
Abstract: A gas sensing device, comprising a bulk and an array of gas sensing elements that are thermally isolated from the bulk, wherein each gas sensing element of a plurality of gas sensing elements of the array comprises (i) a gas reactive element that has a gas dependent temperature parameter; (ii) a semiconductor temperature sensing element that is thermally coupled to the gas reactive element and is configured to generate detection signals that are responsive to a temperature of the gas reactive element; and (iii) multiple heating elements that are configured to heat the gas reactive element to at least one predefined temperature.
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公开(公告)号:US20170205366A1
公开(公告)日:2017-07-20
申请号:US15312655
申请日:2015-05-19
Inventor: YAEL NEMIROVSKY
CPC classification number: G01N25/20 , G01K7/01 , G01K7/015 , G01N25/30 , G01N27/16 , G01N33/0031 , H01L21/764
Abstract: A method and a gas sensing device are provided. The gas sensing device may include a bulk and an array of gas sensing elements that are thermally isolated from the bulk, wherein each gas sensing element of a plurality of gas sensing elements of the array comprises (i) a gas reactive element that has a gas dependent temperature parameter; and (ii) a semiconductor temperature sensing element that is thermally coupled to the gas reactive element and is configured to generate detection signals that are responsive to a temperature of the gas reactive element.
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