公开(公告)号：US20180100874A1

公开(公告)日：2018-04-12

申请号：US15290991

申请日：2016-10-11

Applicant: Analog Devices, Inc.

Inventor： Jianglong Zhang

IPC: G01P15/097

CPC classification number: G01P15/097 ,  G01P2015/0871

Abstract: A microelectromechanical systems (MEMS) sensor device with a compound folded tether is disclosed. The compound folded tether connects a movable proof mass to a substrate, and includes folds composed of multiple short segments aligned with each other to form a longer composite segment having multiple breaks along its length. The use of multiple short segments to create a longer composite segment of the folded tether provides the tether with increased stiffness without altering the fundamental resonance frequency of the tether. The increased stiffness can beneficially lower the occurrence of stiction. Moreover, such a tether configuration provides larger separation between the tether's fundamental resonance frequency and higher order resonant mode frequencies, meaning that the higher order modes may be suppressed in typical operation of the MEMS sensor device.

公开(公告)号：US11733263B2

公开(公告)日：2023-08-22

申请号：US16138091

申请日：2018-09-21

Applicant: Analog Devices, Inc.

Inventor： Jianglong Zhang ,  Xin Zhang

IPC: G01P15/125 ,  G01P15/08 ,  G01P15/18

CPC classification number: G01P15/125 ,  G01P15/0802 ,  G01P15/18 ,  G01P2015/084 ,  G01P2015/0862

Abstract: A three-axis accelerometer includes a single, integrated mass including at least one lateral (x-y) proof mass and at least one vertical (z) proof mass. The vertical proof mass is arranged as a teeter-totter mass, which is located within the lateral proof mass. The vertical proof mass is mechanically coupled to the lateral proof mass with one or more torsional springs, and the lateral proof mass is mechanically coupled to one or more anchors with one or more lateral springs. The at least one vertical proof mass may be symmetrically positioned about one or more axes of the three-axis accelerometer, so that the 3-axis accelerometer has in-plane symmetry. The three-axis accelerometer may be less susceptible for mechanical cross-talk or noise and may provide a smaller packaged solution for sensing acceleration in three directions.

公开(公告)号：US11714102B2

公开(公告)日：2023-08-01

申请号：US17342484

申请日：2021-06-08

Applicant: Analog Devices, Inc.

Inventor： Jianglong Zhang ,  Xin Zhang

IPC: G01P15/125 ,  G01P15/18 ,  B81B3/00

CPC classification number: G01P15/125 ,  B81B3/0021 ,  G01P15/18 ,  B81B2201/0235

Abstract: Disclosed herein are aspects of a multiple-mass, multi-axis microelectromechanical systems (MEMS) accelerometer sensor device with a fully differential sensing design that applies differential drive signals to movable proof masses and senses differential motion signals at sense fingers coupled to a substrate. In some embodiments, capacitance signals from different sense fingers are combined together at a sensing signal node disposed on the substrate supporting the proof masses. In some embodiments, a split shield may be provided, with a first shield underneath a proof mass coupled to the same drive signal applied to the proof mass and a second shield electrically isolated from the first shield provided underneath the sense fingers and biased with a constant voltage to provide shielding for the sense fingers.

公开(公告)号：US10078098B2

公开(公告)日：2018-09-18

申请号：US14747456

申请日：2015-06-23

Applicant: Analog Devices, Inc.

Inventor： Jianglong Zhang

IPC: G01P15/125 ,  G01P15/08

CPC classification number: G01P15/125 ,  B81B2203/0181 ,  G01P2015/0831

Abstract: A teeter-totter type accelerometer includes one or more platforms configured so as to move in proportion to deformation of the substrate and/or anchor(s). The platform(s) may be in a fixed position relative to the substrate, e.g., by being fixedly attached to the anchor(s) or by being fixedly attached to the substrate, or the platform(s) may be movable relative to the substrate, e.g., by being tethered to the anchor(s) so as to allow the platform(s) to pivot relative to the anchor(s). Electrodes are placed on the substrate underlying the platform(s) for sensing position of the platform(s) relative to the underlying substrate. The teeter-totter proof mass is configured such that it can rotate relative to the platform(s), e.g., by being tethered to the platform(s) or by being tethered to one or more anchors separate from the platform(s). The output of the accelerometer is adjusted based on signals from these platform-sensing electrodes in order to reduce or eliminate offset drift.

公开(公告)号：US20180058853A1

公开(公告)日：2018-03-01

申请号：US15253792

申请日：2016-08-31

Applicant: Analog Devices, Inc.

Inventor： Kemiao Jia ,  Xin Zhang ,  Jianglong Zhang ,  Jinbo Kuang

IPC: G01C19/5712

CPC classification number: G01C19/5712 ,  G01C19/5705

Abstract: A two-axis microelectromechanical systems (MEMS) gyroscope having four proof masses disposed in respective quadrants of a plane is described. The quad proof mass gyroscope may comprise an inner coupler passing between a first and a third proof mass and between a second and a fourth proof mass, and coupling the four proof masses with one another. The quad proof mass gyroscope may further comprising a first outer coupler coupling the first and the second proof masses and a second outer coupler coupling the third and the fourth proof masses. The outer couplers may have masses configured to balance the center of masses of the four proof masses, and may have elastic constants matching the elastic constant of the inner coupler. The quad gyroscope may further comprise a plurality of sense capacitors configured to sense angular rates.

公开(公告)号：US20140208849A1

公开(公告)日：2014-07-31

申请号：US13751387

申请日：2013-01-28

Applicant: ANALOG DEVICES, INC.

Inventor： Jianglong Zhang

IPC: G01P15/125

CPC classification number: G01P15/125 ,  G01P2015/0834

Abstract: A balanced teeter-totter accelerometer has a mass suspended above a substrate, the mass having an axis of rotation that is parallel to the substrate and substantially geometrically centered with respect to the shape of the mass. A physical acceleration in a direction perpendicular to the substrate causes the mass to rotate about the axis of rotation. The rotation is sensed by measuring a change in capacitance of electrodes on the substrate. The accelerometer may be calibrated using the same sensing electrodes.

Abstract translation: 平衡的跷跷板加速度计具有悬浮在基板上方的质量，该质量具有平行于基底的旋转轴线，并且相对于质量块的形状基本上几何地居中。 在垂直于衬底的方向上的物理加速使质量围绕旋转轴线旋转。 通过测量基板上的电极的电容变化来感测旋转。 可以使用相同的感测电极校准加速度计。

公开(公告)号：US20250118715A1

公开(公告)日：2025-04-10

申请号：US18730912

申请日：2023-01-24

Applicant: Analog Devices, Inc.

Inventor： Xin Zhang ,  Jianglong Zhang ,  Li Chen ,  John C. Cowles ,  Michael Judy ,  Shafi Saiyed

IPC: H01L25/16 ,  B81B7/00 ,  H01L23/538

Abstract: Compact packages including microelectromechanical system (MEMS) devices and multiple application specific integrated circuits (ASICs) are described. These packages are sufficiently small to be applicable to contexts in which space requirements are particularly strict, such as in consumer electronics. These packages involve vertical die stacks. A first ASIC may be positioned on one side of the die stack and another ASIC may be positioned on the other side of the die stack. A die including a MEMS device (e.g., an accelerometer, gyroscope, switch, resonator, optical device) is positioned between the ASICs. Optionally, an interposer serving as cap substrate for the MEMS device is also positioned between the ASICs. In one example, a package of the types described herein has an extension of 2 mm×2 mm in the planar axes and less than 500-800 μm in height.

公开(公告)号：US20230234835A1

公开(公告)日：2023-07-27

申请号：US18100846

申请日：2023-01-24

Applicant: Analog Devices, Inc.

Inventor： Xin Zhang ,  Jianglong Zhang ,  Li Chen ,  John C. Cowles ,  Michael Judy ,  Shafi Saiyed

IPC: B81B7/00 ,  H01L23/00 ,  H01L23/498 ,  B81C1/00

CPC classification number: B81B7/0048 ,  H01L23/562 ,  H01L23/49827 ,  B81C1/00666

Abstract: Packaging of microfabricated devices, such as integrated circuits, microelectromechanical systems (MEMS), or sensor devices is described. The packaging is 3D heterogeneous packaging in at least some embodiments. The 3D heterogeneous packaging includes an interposer. The interposer includes stress relief platforms. Thus, stresses originating in the packaging do not propagate to the packaged device. A stress isolation platform is an example of a stress relief feature. A stress isolation platform includes a portion of an interposer coupled to the remainder of the interposer via stress isolation suspensions. Stress isolation suspensions can be formed by etching trenches through the interposer.

公开(公告)号：US20220390483A1

公开(公告)日：2022-12-08

申请号：US17342484

申请日：2021-06-08

Applicant: Analog Devices, Inc.

Inventor： Jianglong Zhang ,  Xin Zhang

IPC: G01P15/125 ,  G01P15/18 ,  B81B3/00

Abstract: Disclosed herein are aspects of a multiple-mass, multi-axis microelectromechanical systems (MEMS) accelerometer sensor device with a fully differential sensing design that applies differential drive signals to movable proof masses and senses differential motion signals at sense fingers coupled to a substrate. In some embodiments, capacitance signals from different sense fingers are combined together at a sensing signal node disposed on the substrate supporting the proof masses. In some embodiments, a split shield may be provided, with a first shield underneath a proof mass coupled to the same drive signal applied to the proof mass and a second shield electrically isolated from the first shield provided underneath the sense fingers and biased with a constant voltage to provide shielding for the sense fingers.

公开(公告)号：US10585111B2

公开(公告)日：2020-03-10

申请号：US15400109

申请日：2017-01-06

Applicant: Analog Devices, Inc.

Inventor： Xin Zhang ,  Jianglong Zhang

IPC: G01P15/125 ,  G01P15/08 ,  G01P15/02 ,  G01P15/18 ,  B81B3/00

Abstract: Angular accelerometers are described, as are systems employing such accelerometers. The angular accelerometers may include a proof mass and rotational acceleration detection beams directed toward the center of the proof mass. The angular accelerometers may include sensing capabilities for angular acceleration about three orthogonal axes. The sensing regions for angular acceleration about one of the three axes may be positioned radially closer to the center of the proof mass than the sensing regions for angular acceleration about the other two axes. The proof mass may be connected to the substrate though one or more anchors.