公开(公告)号：US20190084830A1

公开(公告)日：2019-03-21

申请号：US16030256

申请日：2018-07-09

Applicant: Hitachi, Ltd.

Inventor： Misuzu SAGAWA ,  Atsushi ISOBE

IPC: B81C99/00

CPC classification number: B81C99/006 ,  B81C99/0025 ,  B81C99/0065

Abstract: In a calculator in a MEMS manufacturing system, a stage control unit inclines a stage based on a stage angle 1 setting a stage inclination angle and a stage angle 2 of the inclination angle different from the stage angle 1. A stage-angle calculation unit calculates the stage inclination angles from first and second images acquired by a SEM apparatus when the stage control unit sets the stage at the stage angles 1 and 2. A 3D-data creation unit creates three-dimensional device data from a third image that is a device image acquired when the stage is set at the stage angle 1 and a fourth image that is a device image acquired when the stage is set at the stage angle 2. When the three-dimensional device data is created, a correction value calculated from the stage angles 1 and 2 and the first and second images is used.

公开(公告)号：US20180372774A1

公开(公告)日：2018-12-27

申请号：US16064562

申请日：2016-04-18

Applicant: HITACHI, LTD.

Inventor： Atsushi ISOBE ,  Takashi SHIOTA ,  Yuudai KAMADA ,  Chisaki TAKUBO ,  Noriyuki SAKUMA

IPC: G01P15/125 ,  G01P15/08

Abstract: An acceleration sensor has high sensitivity, low power consumption and high linearity of output to the applied acceleration under gravity. To solve the above problem, the acceleration sensor is provided with a movable section placed between a base substrate and a cap substrate and rotating about a rotation axis. A top left electrode included in the cap substrate and a left movable electrode included in the movable section form a left capacitor, and a top right electrode included in the cap substrate and a right movable electrode included in the movable section form a right capacitor. Then, a lateral width of a first detection region in which capacitance is detected between the top left electrode and the left movable electrode, and a lateral width of a second detection region in which capacitance is detected between the top right electrode and the right movable electrode are different from each other.

公开(公告)号：US20180252744A1

公开(公告)日：2018-09-06

申请号：US15671340

申请日：2017-08-08

Applicant: HITACHI, LTD.

Inventor： Yuudai KAMADA ,  Atsushi ISOBE ,  Noriyuki SAKUMA ,  Chisaki TAKUBO ,  Tomonori SEKIGUCHI

IPC: G01P15/125 ,  B81B3/00 ,  G01P15/08 ,  G01P15/18 ,  H01H1/00

CPC classification number: G01P15/125 ,  B81B3/0051 ,  B81B2201/0235 ,  G01P15/0802 ,  G01P15/18 ,  G01P2015/0871 ,  H01H1/0036 ,  H01H36/0006

Abstract: Provided is an acceleration sensor having a large mass in a movable portion, and realizing high impact resistance. An acceleration sensor element 10a includes an upper substrate 20, a lower substrate 21 spaced apart from the upper substrate 20, and an intermediate substrate 19 provided between the upper substrate 20 and the lower substrate 21. Each of a first movable portion 16, a second movable portion 17, a frame portion 12, a fixed portion 13, and a spring portion 14 constituting the intermediate substrate 19 is configured with two layers of an upper layer and a lower layer, and a stopper portion 18 is provided at one end of the frame portion 12. A distance 31 between an end portion of the first movable portion 16 or the second movable portion 17 and an end portion of the stopper portion 18 in the upper layer and a distance 32 between an end portion of the first movable portion 16 or the second movable portion 17 and an end portion of the stopper portion 18 in the lower layer are different from each other.

公开(公告)号：US20190162752A1

公开(公告)日：2019-05-30

申请号：US16127268

申请日：2018-09-11

Applicant: Hitachi, Ltd.

Inventor： Atsushi ISOBE ,  Yuudai KAMADA ,  Chisaki TAKUBO ,  Noriyuki SAKUMA ,  Tomonori SEKIGUCHI

IPC: G01P15/125 ,  G01P15/08 ,  G01P15/18 ,  G01H11/06

Abstract: In an acceleration sensor detecting a vibration acceleration by using torsion of a beam joining a fixed portion and a membrane, a spring constant of the beam is decreased while an increase in a chip size due to extension of the beam is prevented, so that an acceleration sensor that is highly sensitive and small in a size is provided with a low price. A sensor of a capacitance detecting type includes a membrane having a stacking structure formed of two or more layers and a plurality of beams capable of twisting so that the membrane is movable in a detecting direction, a first beam of the plurality of beams is formed of the same layer as either an upper or a lower layer of the membrane, and a second beam thereof is formed of the same layer as either an upper or a lower layer of the movable portion.

公开(公告)号：US20180346321A1

公开(公告)日：2018-12-06

申请号：US15912604

申请日：2018-03-06

Applicant: HITACHI, LTD.

Inventor： Chisaki TAKUBO ,  Atsushi ISOBE ,  Noriyuki SAKUMA ,  Yuudai KAMADA ,  Tomonori SEKIGUCHI

IPC: B81B7/02 ,  B81C1/00 ,  G01P15/125

Abstract: An object of the invention is to provide a MEMS device that is easy to set a cavity inner pressure to a desired value by utilizing normally-used MEMS device manufacturing processes and process materials without increase in the number of processes of manufacturing the MEMS device. In order to solve the problem, as a typical MEMS device of the present invention, a MEMS device having a cavity includes an insulating film containing hydrogen in vicinity of the cavity and a hydrogen barrier film covering the insulating film.

公开(公告)号：US20180238926A1

公开(公告)日：2018-08-23

申请号：US15554264

申请日：2016-11-09

Applicant: Hitachi, Ltd.

Inventor： Takashi SHIOTA ,  Tatsuyuki SAITO ,  Tatemi IDO ,  Noriyuki SAKUMA ,  Yuudai KAMADA ,  Atsushi ISOBE ,  Chisaki TAKUBO

IPC: G01P15/125 ,  B81C1/00 ,  G01P15/08

CPC classification number: G01P15/125 ,  B81B3/00 ,  B81B2201/0235 ,  B81C1/00047 ,  B81C1/00198 ,  B81C3/00 ,  G01P15/0802 ,  G01P2015/0862

Abstract: Airtightness in a cavity of an inertial sensor (acceleration sensor) is increased to achieve high sensitivity. In the acceleration sensor having movable electrodes VE1, VE2 and fixed electrodes FE1, FE2, the fixed electrodes are formed by portions surrounded by a through hole TH1 provided in a cap layer CL, and the through hole is filled with an insulating film IF1 and polysilicon P and has a wide portion (WP). The wide portion has a gap SP that is not filled with the insulating film IF1 and the polysilicon P, and the gap SP is filled with the interlayer insulating film ID. With such a configuration, degassing can be exhausted through the gap (airway) SP in a pressure reducing step.

公开(公告)号：US20160091524A1

公开(公告)日：2016-03-31

申请号：US14822419

申请日：2015-08-10

Applicant: HITACHI, LTD.

Inventor： Yuudai KAMADA ,  Atsushi ISOBE ,  Noriyuki SAKUMA ,  Takashi OSHIMA ,  Yuki FURUBAYASHI

IPC: G01P15/125

CPC classification number: G01P15/125 ,  B81B3/0086 ,  B81B2201/0235 ,  B81B2203/0109 ,  G01P2015/0831 ,  G01P2015/0837

Abstract: A low-noise and high-sensitivity inertial sensor is provided.On the assumption that a movable portion VU1 and a movable portion VU2 are formed in the same SOI layer, the movable portion VU1 and the movable portion VU2 are mechanically connected to each other by a mechanical coupling portion MCU even while these movable portions are electrically isolated from each other. Thereby, according to a sensor element SE in the invention, it is possible to further suppress a shift between the capacitance of a MEMS capacitor 1 and the capacitance of a MEMS capacitor 2.

Abstract translation: 提供了低噪声，高灵敏度的惯性传感器。 假设可动部分VU1和可动部分VU2形成在相同的SOI层中，即使这些可动部分被电隔离，可移动部分VU1和可动部分VU2通过机械耦合部分MCU彼此机械连接 从彼此。 因此，根据本发明的传感器元件SE，可以进一步抑制MEMS电容器1的电容与MEMS电容器2的电容之间的偏移。