公开(公告)号：US10985200B2

公开(公告)日：2021-04-20

申请号：US16234472

申请日：2018-12-27

Applicant: IMEC VZW

Inventor： Veronique Rochus ,  Xavier Rottenberg

IPC: H01L31/0232 ,  H01L27/146

Abstract: A method for producing an image sensor comprises: depositing a first back-end-of-line, BEOL, layer above a substrate comprising an array of light-detecting elements, said BEOL layer comprising metal wirings being arranged to form connections to components on the substrate and together with depositing the first BEOL layer, improving planarization of the first BEOL layer by depositing a planarizing metal dummy pattern in the first BEOL layer, wherein a part of the planarizing metal dummy pattern is arranged above a light-detecting element, wherein the planarizing metal dummy patterns is formed from the same material as the metal wirings and is deposited to planarize density of the metal deposited in the first BEOL layer across a surface of the layer and wherein a shape and/or position of the metal dummy pattern above the array of light-detecting elements is designed to provide a desired effect on incident light.

公开(公告)号：US10921125B2

公开(公告)日：2021-02-16

申请号：US16690667

申请日：2019-11-21

Applicant: IMEC VZW

Inventor： Veronique Rochus ,  Roelof Jansen ,  Benedetto Troia

IPC: G01C19/66

Abstract: An optical gyroscope and a method for measuring an angular velocity of rotation are described. A closed-path optical cavity is configured for receiving at least a first optical signal circulating as at least one cavity mode of pre-determined orientation (inside the optical cavity. An extractor in optical communication with the optical cavity is configured for extracting a fraction of at least the circulating first optical signal from the optical cavity, wherein an amplitude of the extracted fraction increases when a resonance condition for the optical cavity in optical communication with the extractor is approached. A readout channel included in the optical gyroscope comprises an interferometric device adapted to spectrally modify the extracted fraction so as to produce a spectral Vernier effect. A difference between free spectral ranges of the interferometric device and the optical cavity is larger than the associated spectral widths. Readout detectors are included in the readout channel for detecting optical power levels of the spectrally modified optical signal, based on which the angular velocity is determined.

公开(公告)号：US11462244B2

公开(公告)日：2022-10-04

申请号：US17645107

申请日：2021-12-20

Applicant: IMEC vzw

Inventor： Grim Keulemans ,  Veronique Rochus ,  Maarten Rosmeulen ,  Xavier Rottenberg

IPC: G11B15/40 ,  G11B5/008 ,  G11B15/20 ,  G11B15/26 ,  G11B15/60

Abstract: A storage device configured to store data on a tape is provided. In one aspect, the storage device includes the tape, which is configured to store data, and a data head, which is configured to read and/or write data from and/or to the tape. The storage device further includes an actuator configured to move the tape in a length direction in a step-wise manner. The actuator can include a plurality of pulling electrodes, wherein each pulling electrode can be activated to exert a pulling force on the tape, and a plurality of clamping electrodes, wherein each clamping electrode can be activated to clamp the tape.

公开(公告)号：US09217861B2

公开(公告)日：2015-12-22

申请号：US14373071

申请日：2013-01-18

Applicant: IMEC VZW

Inventor： Murali Jayapala ,  Geert Van der Plas ,  Veronique Rochus ,  Xavier Rottenberg ,  Simone Severi

IPC: G02B26/00 ,  G02B27/10 ,  G02B5/08 ,  G02B26/08 ,  G02B17/08 ,  H04N13/04 ,  G02B7/182

CPC classification number: G02B26/0833 ,  G02B5/08 ,  G02B7/182 ,  G02B17/0896 ,  G02B26/08 ,  G02B26/0825 ,  G02B26/0841 ,  G02B27/10 ,  H04N13/322 ,  H04N13/365

Abstract: Micro-mirror arrays configured for use in a variable focal length lens are described herein. An example variable focal length lens comprises a micro-mirror array having a plurality of micro-mirror elements arranged in at least a first section and a second section. Each micro-mirror element has a tilt axis and comprises, on each of two opposing sides of the tilt axis, (i) at least one actuation electrode, (ii) at least one measurement electrode, and (iii) at least one stopper. Additionally, each micro-mirror element in the first section has a first tilt angle range, and each micro-mirror element in the second section has a second tilt angle range, with the first tilt angle range being less than the second tilt angle range.

Abstract translation: 这里描述了配置用于可变焦距透镜的微镜阵列。 示例性可变焦距透镜包括具有布置在至少第一部分和第二部分中的多个微反射镜元件的微反射镜阵列。 每个微镜元件具有倾斜轴线，并且在倾斜轴线的两个相对侧的每一侧上包括（i）至少一个致动电极，（ii）至少一个测量电极，和（iii）至少一个止动器。 此外，第一部分中的每个微镜元件具有第一倾斜角范围，并且第二部分中的每个微镜元件具有第二倾斜角范围，其中第一倾斜角度范围小于第二倾斜角范围。

公开(公告)号：US20140368920A1

公开(公告)日：2014-12-18

申请号：US14373071

申请日：2013-01-18

Applicant: IMEC VZW

Inventor： Murali Jayapala ,  Geert Van der Plas ,  Veronique Rochus ,  Xavier Rottenberg ,  Simone Severi

IPC: G02B26/08

CPC classification number: G02B26/0833 ,  G02B5/08 ,  G02B7/182 ,  G02B17/0896 ,  G02B26/08 ,  G02B26/0825 ,  G02B26/0841 ,  G02B27/10 ,  H04N13/322 ,  H04N13/365

Abstract: Micro-mirror arrays configured for use in a variable focal length lens are described herein. An example variable focal length lens comprises a micro-mirror array having a plurality of micro-mirror element arranged in at least a first section and a second section. Each micro-mirror element has a tilt axis and comprises, on each of two opposing sides of the tilt axis, (i) at least one actuation electrode, (ii) at least one measurement electrode, and (iii) at least one stopper. Additionally, each micro-mirror element in the first section has a first tilt axis range, and each micro-mirror element in the second section has a second tilt axis range, with the first tilt axis range being less than the second tilt axis range.

Abstract translation: 这里描述了配置用于可变焦距透镜的微镜阵列。 示例性可变焦距透镜包括具有布置在至少第一部分和第二部分中的多个微反射镜元件的微反射镜阵列。 每个微镜元件具有倾斜轴线，并且在倾斜轴线的两个相对侧的每一侧上包括（i）至少一个致动电极，（ii）至少一个测量电极，和（iii）至少一个止动器。 此外，第一部分中的每个微镜元件具有第一倾斜轴范围，并且第二部分中的每个微镜元件具有第二倾斜轴范围，其中第一倾斜轴范围小于第二倾斜轴范围。