Abstract:
An electrode layer is formed on the upper surface of a first substrate, and a processing for partially removing the substrate is carried out in order to allow the substrate to have flexibility. To the lower surface of the first substrate, a second substrate is connected. Then, by cutting the second substrate, a working body and a pedestal are formed. On the other hand, a groove is formed on a third substrate. An electrode layer is formed on the bottom surface of the groove. The third substrate is connected to the first substrate so that both the electrodes face to each other with a predetermined spacing therebetween. Finally, the first, second and third substrates are cut off every respective unit regions to form independent sensors, respectively. When an acceleration is exerted on the working body, the first substrate bends. As a result, the distance between both the electrodes changes. Thus, an acceleration exerted is detected by changes in an electrostatic capacitance between both the electrodes.
Abstract:
A capacitance type sensor includes a substrate, a group of electrodes fixed on an upper face of the substrate, a movable electrode plate having an electrode on its lower side and a gap between the group of fixed electrodes on the substrate and the electrode on the movable electrode plate. The gap is formed with a solder layer, a conductive elastomer layer, a conductive paint layer, or a conductive adhesive material layer provided on the substrate. The electrode on the movable electrode plate is made of conductive rubber plate or conductive elastomer plate.
Abstract:
In a liquid crystal display device including a liquid crystal display panel (10) including a liquid crystal layer (3) sandwiched between a first substrate (1) and a second substrate (2) having transparent electrodes (5, 6) on inner surfaces opposing to each other, the film thickness of at least one of the transparent electrodes (5, 6) formed on the first and second substrates (1, 2) is set so that light passing through the transparent electrode and exhibiting a maximum transmittance has a color within either a region defined by an x value of 0.22 to 0.28 and a y value of 0.21 to 0.31 or a region defined by an x value of 0.28 to 0.34 and a y value of 0.22 to 0.35 in a chromaticity diagram of a CIE 1931 color system using a white light source. This reduces coloring irregularities due to a film thickness error caused during manufacturing of the transparent electrodes to enable performance of uniform display.
Abstract:
Forces and moments are detected in a distinguishing manner by a simple structure. A supporting member (20) is positioned below a force receiving member (10), which receives forces to be detected, and between these components, at least two columnar force transmitting members (11, 12) are connected. Connecting members having flexibility are interposed at the upper and lower ends of each of columnar force transmitting members (11, 12) so that columnar force transmitting members (11, 12) can become inclined when force receiving member (10) becomes displaced upon receiving a force. Sensors (21, 22) are positioned at the respective connection parts of columnar force transmitting members (11, 12) and supporting member (20) to detect forces that are transmitted from the respective columnar force transmitting members (11, 12) to supporting member (20). Based on the detection values of sensors (21, 22), detection processing unit 30 detects, in a distinguishing manner, forces and moments acting on force receiving member (10). When four columnar force transmitting members are used, all of forces Fx, Fy, and Fz and moments Mx, My, and Mz can be detected.
Abstract:
An electrode layer is formed on the upper surface of a first substrate, and a processing for partially removing the substrate is carried out in order to allow the substrate to have flexibility. To the lower surface of the first substrate, a second substrate is connected. Then, by cutting the second substrate, a working body and a pedestal are formed. On the other hand, a groove is formed on a third substrate. An electrode layer is formed on the bottom surface of the groove. The third substrate is connected to the first substrate so that both the electrodes face to each other with a predetermined spacing therebetween. Finally, the first, second and third substrates are cut off every respective unit regions to form independent sensors, respectively. When an acceleration is exerted on the working body, the first substrate bends. As a result, the distance between both the electrodes changes. Thus, an acceleration exerted is detected by changes in an electrostatic capacitance between both the electrodes.
Abstract:
An electrode layer is formed on the upper surface of a first substrate, and a processing for partially removing the substrate is carried out in order to allow the substrate to have flexibility. To the lower surface of the first substrate, a second substrate is connected. Then, by cutting the second substrate, a working body and a pedestal are formed. On the other hand, a groove is formed on a third substrate. An electrode layer is formed on the bottom surface of the groove. The third substrate is connected to the first substrate so that both the electrodes face to each other with a predetermined spacing therebetween. Finally, the first, second and third substrates are cut off every respective unit regions to form independent sensors, respectively. When an acceleration is exerted on the, working body, the first substrate bends. As a result, the distance between both the electrodes changes. Thus, an acceleration exerted is detected by changes in an electrostatic capacitance between both the electrodes.
Abstract:
An angular velocity sensor for detecting angular velocity components about three axes with high response is provided. A weight body carries out a circular movement along a circular orbit within the XY-plane with the origin being as a center. The weight body is supported so that it can be moved with a predetermined degree of freedom within a sensor casing. A Coriolis force Fco exerted in the Z-axis direction to the weight body is detected when the weight body passes through the X-axis at the point Px and an angular velocity .omega.x about the X-axis is obtained based on the detected force. Further, a Coriolis force Fco exerted in the Z-axis direction to the weight body is detected when the weight body passes through the Y-axis at the point Py and an angular velocity .omega.y about the Y-axis is obtained based on the detected force. In addition, a force exerted in the X-axis direction to the weight body at the point Px is detected and an angular velocity .omega.z about the Z-axis is obtained based on the detected force by eliminating a centrifugal force.
Abstract:
The periphery of a disk having flexibility is fixed to a sensor casing, and a force applied to the central portion is detected. A doughnut disk-shaped piezoelectric element is positioned on the upper surface of the disk, and upper electrode layers indicated by patterns of D1 to D6 are formed on the upper surface of the piezoelectric element. Further, lower electrode layers similarly having pattern of D1 to D6 are formed on the lower surface of the piezoelectric element, and the lower surface of the lower electrode layer is fixed on the upper surface of the disk. Six detection elements D1 to D6 are formed each of which is constituted by a pair of upper and lower electrode layers and a portion of piezoelectric element put therebetween. Thus, force component s exerted at an origin defined in the central portion of the disk in respective axes directions of X, Y, Z can be detected based on charges produced in detection elements D1, D2, detection elements D3, D4, and detection elements D5, D6, respectively.
Abstract:
Force and moment exerted on the working point (P) on a semiconductor substrate (110; 210), on one surface of which resistance elements (r, R) having an electric resistance varying due to mechanical deformation are formed, are detected. A portion spaced from the working point of the semiconductor substrate is fixed. Since openings (113) or bridge portions (212 to 215) are formed in the semiconductor substrate, when a force or an angular moment in a fixed direction is applied to the working point, uneven stresses are produced on the semiconductor substrate. Such uneven stresses are detected as changes in electric resistances of the resistance elements. A measure is taken for an arrangement of resistance elements on the semiconductor substrate, thereby to constitute predetermined bridges. Thus, forces in three directions and angular moments in three directions in the three-dimensional space can be independently read as bridge voltages, respectively.
Abstract:
There is proposed a tilt sensor in which a permanent magnet having a surface coated with a magnetic field is housed in a hollow portion of a nonmagnetic case, and a magnetic sensing element is disposed outside a bottom portion of the case. When the case is tilted at an angle exceeding a predetermined angle, the permanent magnet is greatly moved and the magnetic sensing element detects the movement of the magnet. Furthermore, adverse influences due to magnetic attraction between the permanent magnet and the magnetic sensing element or a surface tension of the magnetic fluid are compensated.