公开(公告)号：US20220187204A1

公开(公告)日：2022-06-16

申请号：US17685719

申请日：2022-03-03

Applicant: Lumina Instruments

Inventor： Steven W. Meeks ,  Hung Phi Nguyen ,  Alireza Shahdoost Moghaddam

IPC: G01N21/47 ,  G01B11/24

Abstract: An optical scanning system including a radiating source capable of outputting a source light beam, a de-scan lens that is configured to output a de-scanned light beam, the de-scanned light beam is created by focusing light reflected from the sample and the de-scan lens is located approximately one focal length of the de-scan lens from an irradiation location where the light beam irradiates the sample, a focusing lens that is configured to output a focused light beam, a collimating lens that is configured to output a collimated light beam, a polarizing beam splitter that is configured to be irradiated by the collimated light beam, and a detector that is configured to be irradiated by at least a portion of the collimated light beam that is not reflected by the polarizing beam splitter.

公开(公告)号：US20230341332A1

公开(公告)日：2023-10-26

申请号：US18140190

申请日：2023-04-27

Applicant: Lumina Instruments, Inc.

Inventor： Steven W. Meeks ,  Hung Phi Nguyen ,  Alireza Shahdoost Moghaddam

IPC: G01N21/88

CPC classification number: G01N21/8806 ,  G01N2021/8809 ,  G01N2021/8845 ,  G01N2021/8848

Abstract: An optical scanning system includes a first radiating source capable of outputting a first source light beam, a second radiating source capable of outputting a second source light beam, a first time-varying beam reflector configured to direct the first source light beam and the second source light beam toward the sample, a scan lens configured to focus the first source light beam and the second source light beam reflected by the first time-varying beam reflector onto the sample, and a compound ellipsoidal collector configured to direct light scattered from the sample toward a scattered radiation detector. The optical scanning system causes one of the first or second source light beams to be directed towards a sample at an incident angle. The first light beam has a first wavelength, the second light beam has a second wavelength, and the first wavelength and the second wavelength are not the same.

公开(公告)号：US20200319116A1

公开(公告)日：2020-10-08

申请号：US16838026

申请日：2020-04-02

Applicant: Lumina Instruments Inc.

Inventor： Steven W. Meeks ,  Hung Phi Nguyen ,  Alireza Shahdoost Moghaddam

IPC: G01N21/88 ,  G01N21/958 ,  G02B26/08 ,  G02B26/10 ,  G02B27/28

Abstract: An optical scanning system, including: a radiating source that outputs a light beam, a first time varying beam reflector that reflects the light beam through a scan lens towards a transparent sample, a second time varying beam reflector that reflects the light beam reflected from the transparent sample, a focusing lens that focuses the light beam reflected from the transparent sample, a blocker, and a detector that is irradiated by the one or more selectable portions of the light beam reflected from the transparent sample that pass the blocker. The blocker can be configured to block one or more portions of the light beam reflected from the transparent sample so that one or more selectable portions of the light beam reflected from the transparent sample can pass the blocker.

公开(公告)号：US20200278192A1

公开(公告)日：2020-09-03

申请号：US16838028

申请日：2020-04-02

Applicant: Lumina Instruments Inc.

Inventor： Steven W. Meeks ,  Hung Phi Nguyen ,  Alireza Shahdoost Moghaddam

IPC: G01B11/06 ,  G02B26/10

Abstract: An optical scanning system including a radiating source that outputs a light beam, a time varying beam reflector that reflects the light beam through a scan lens towards a transparent sample, a focusing lens configured to be irradiated by light scattered from the transparent sample, and a detector that is irradiated by the light scattered from the transparent sample. The detector outputs a signal that indicates an intensity of light measured by the detector. None of the light scattered from the transparent sample is blocked. The light scattered from the transparent sample is scattered from the top surface of the transparent sample, the bottom surface of the transparent sample, or any location in between the top surface of the transparent sample and the bottom surface of the transparent sample.

公开(公告)号：US20250093274A1

公开(公告)日：2025-03-20

申请号：US18520279

申请日：2023-11-27

Applicant: Lumina Instruments Inc.

Inventor： Steven W. Meeks ,  Hung Phi Nguyen ,  Alireza Shahdoost Moghaddam

IPC: G01N21/88 ,  G01N21/958

Abstract: A method includes enabling a first radiating source configured to output a first beam, enabling a second radiating source configured to output a second beam, directing the first beam to irradiate a sample at an angle of incidence of ten degrees of Brewster's angle or less, directing the second beam to irradiate a sample at an angle of incidence of ten degrees or less (the first beam and the second beam only pass through a single scan lens before irradiating the sample), measuring scattered radiation data resulting from the irradiation of the sample by the second beam, measuring reflected radiation resulting from irradiation of the sample by the first beam, and determining the presence of a defect based at least in part on one of the measurements. The radiating sources may be enabled in an alternating fashion so to improve resulting measurement performance.

公开(公告)号：US12146830B2

公开(公告)日：2024-11-19

申请号：US17685719

申请日：2022-03-03

Applicant: Lumina Instruments Inc.

Inventor： Steven W. Meeks ,  Hung Phi Nguyen ,  Alireza Shahdoost Moghaddam

IPC: G01N21/47 ,  G01B11/24

Abstract: An optical scanning system including a radiating source capable of outputting a source light beam, a de-scan lens that is configured to output a de-scanned light beam, the de-scanned light beam is created by focusing light reflected from the sample and the de-scan lens is located approximately one focal length of the de-scan lens from an irradiation location where the light beam irradiates the sample, a focusing lens that is configured to output a focused light beam, a collimating lens that is configured to output a collimated light beam, a polarizing beam splitter that is configured to be irradiated by the collimated light beam, and a detector that is configured to be irradiated by at least a portion of the collimated light beam that is not reflected by the polarizing beam splitter.

公开(公告)号：US10648928B1

公开(公告)日：2020-05-12

申请号：US16289640

申请日：2019-02-28

Applicant: Lumina Instruments Inc.

Inventor： Steven W. Meeks ,  Hung Phi Nguyen ,  Alireza Shahdoost Moghaddam

IPC: G01N21/958 ,  G01N21/55 ,  G01N21/88 ,  G02B27/30 ,  G01N21/21

Abstract: An optical scanning system includes a radiating source capable of outputting a light beam, a time varying beam reflector that is configured to reflect the light beam through a scan lens towards a transparent sample at an incident angle that is not more than one degree greater or less than Brewster's angle of the transparent sample, and a focusing lens configured to be irradiated by light scattered from the transparent sample at an angle that is normal to the plane of incidence of the moving irradiated spot on the transparent sample. A first portion of the light beam is scattered from a first surface of the transparent sample and a second portion of the light beam is scattered from a second surface of the transparent sample. A spatial filter is configured to block the second portion of the light beam scattered from the second surface of the transparent sample.