公开(公告)号：US20230204974A1

公开(公告)日：2023-06-29

申请号：US18111073

申请日：2023-02-17

Applicant: STMicroelectronics S.r.l.

Inventor： Domenico GIUSTI ,  Dario PACI

IPC: G02B27/64 ,  G03B5/06 ,  H02N2/02 ,  H02N2/00 ,  B81B3/00 ,  H10N30/01 ,  H10N30/20

CPC classification number: G02B27/646 ,  B81B3/0021 ,  G03B5/06 ,  H02N2/22 ,  H02N2/028 ,  H10N30/01 ,  H10N30/2044 ,  B81B2201/032 ,  B81B2201/047 ,  B81B2203/053 ,  B81B2203/058 ,  G03B2205/0023

Abstract: A method of making a MEMS actuator with a monolithic body of semiconductor material includes forming a supporting portion of semiconductor material, orientable with respect to first and second rotation axes, the first rotation axis being transverse with respect to the second rotation axis, and forming a first frame of semiconductor material. The method further includes forming first deformable elements, of semiconductor material, coupled to the first frame, and configured to control a rotation of the supporting portion about the first rotation axis. The method also includes forming a second frame of semiconductor material, and forming second deformable elements, of semiconductor material, coupled to the first frame and to the second frame, and configured to control a rotation of the supporting portion about the second rotation axis. The first and second deformable elements are formed to carry respective first and second piezoelectric actuation elements.

公开(公告)号：US20220119246A1

公开(公告)日：2022-04-21

申请号：US17497538

申请日：2021-10-08

Applicant: STMicroelectronics S.r.l.

Inventor： Domenico GIUSTI ,  Marco FERRERA ,  Fabio QUAGLIA

IPC: B81B7/00 ,  H01L41/09 ,  H01L41/113 ,  B81B3/00 ,  B81C1/00

Abstract: A PMUT device includes a membrane element adapted to generate and receive ultrasonic waves by oscillating, about an equilibrium position, at a corresponding resonance frequency. A piezoelectric element is located over the membrane element along a first direction and configured to cause the membrane element to oscillate when electric signals are applied to the piezoelectric element, and generate electric signals in response to oscillations of the membrane element. A damper is configured to reduce free oscillations of the membrane element, and the damper includes a damper cavity surrounding the membrane element, and a polymeric member having at least a portion over the damper cavity along the first direction.

公开(公告)号：US20220102618A1

公开(公告)日：2022-03-31

申请号：US17485719

申请日：2021-09-27

Applicant: STMicroelectronics S.r.l.

Inventor： Domenico GIUSTI ,  Irene MARTINI ,  Davide ASSANELLI ,  Paolo FERRARINI ,  Carlo Luigi PRELINI ,  Fabio QUAGLIA

IPC: H01L41/08 ,  H01L41/047 ,  H01L41/277 ,  B81B7/02 ,  H01L41/113

Abstract: A piezoelectric microelectromechanical structure is provided with a piezoelectric stack having a main extension in a horizontal plane and a variable section in a plane transverse to the horizontal plane. The stack is formed by a bottom-electrode region, a piezoelectric material region arranged on the bottom-electrode region, and a top-electrode region arranged on the piezoelectric material region. The piezoelectric material region has, as a result of the variable section, a first thickness along a vertical axis transverse to the horizontal plane at a first area, and a second thickness along the same vertical axis at a second area. The second thickness is smaller than the first thickness. The structure at the first and second areas can form piezoelectric detector and a piezoelectric actuator, respectively.

公开(公告)号：US20210147222A1

公开(公告)日：2021-05-20

申请号：US17161367

申请日：2021-01-28

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Enri DUQI ,  Lorenzo BALDO ,  Domenico GIUSTI

IPC: B81C1/00 ,  B81B7/00

Abstract: An integrated device includes: a first die; a second die coupled in a stacked way on the first die along a vertical axis; a coupling region arranged between facing surfaces of the first die and of the second die, which face one another along the vertical axis and lie in a horizontal plane orthogonal to the vertical axis, for mechanical coupling of the first and second dies; electrical-contact elements carried by the facing surfaces of the first and second dies, aligned in pairs along the vertical axis; and conductive regions arranged between the pairs of electrical-contact elements carried by the facing surfaces of the first and second dies, for their electrical coupling. Supporting elements are arranged at the facing surface of at least one of the first and second dies and elastically support respective electrical-contact elements.

公开(公告)号：US20200369023A1

公开(公告)日：2020-11-26

申请号：US16882215

申请日：2020-05-22

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Domenico GIUSTI ,  Andrea Nicola COLECCHIA ,  Gaetano SANTORUVO

IPC: B41J2/03 ,  H01L41/09 ,  H01L41/314 ,  H01L27/20

Abstract: A microfluidic device for continuous ejection of fluids includes: a semiconductor body that laterally delimits chambers; an intermediate structure which forms membranes each delimiting a top of a corresponding chamber; and a nozzle body which overlies the intermediate structure. The device includes, for each chamber: a corresponding piezoelectric actuator; a supply channel which traverses the intermediate structure and communicates with the chamber; and a nozzle which traverses the nozzle body and communicates with the supply channel. Each actuator is configured to operate i) in a resting condition such that the pressure of a fluid within the corresponding chamber causes the fluid to pass through the supply channel and become ejected from the nozzle as a continuous stream, and ii) in an active condition, where it causes a deformation of the corresponding membrane and a consequent variation of the pressure of the fluid, causing a temporary interruption of the continuous stream.

公开(公告)号：US20200290355A1

公开(公告)日：2020-09-17

申请号：US16885908

申请日：2020-05-28

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Domenico GIUSTI ,  Mauro CATTANEO ,  Carlo Luigi PRELINI

IPC: B41J2/14 ,  B41J2/16

Abstract: The microfluidic device has a plurality of ejector elements. Each ejector element includes a first region, accommodating a first fluid flow channel and an actuator chamber; a second region, accommodating a fluid containment chamber; and a third region, accommodating a second fluid flow channel. The fluid containment chamber is fluidically coupled to the first and to the second fluid flow channels. The second region is formed from a membrane layer, from a membrane definition layer, mechanically coupled to the membrane layer and having a membrane definition opening, and a fluid chamber defining body, mechanically coupled to the membrane definition layer and having a chamber defining opening, with a width greater than the width of the membrane definition opening. The width of the membrane is thus defined by the width of the chamber defining opening.

公开(公告)号：US20190329551A1

公开(公告)日：2019-10-31

申请号：US16392007

申请日：2019-04-23

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Domenico GIUSTI ,  Marco FERRERA ,  Carlo Luigi PRELINI

IPC: B41J2/14 ,  B41J2/16

Abstract: A fluid ejection device, comprising: a chamber; a membrane, with a first side and a second side opposite to one another, where the first side faces the chamber; an actuator, of a piezoelectric type, which extends on the second side of the membrane and is operatively coupled to the membrane for causing, in use, a vibration of the membrane; a passivation layer, which extends only alongside, or partially on, the actuator; and a protection layer, which extends on the actuator at least in surface portions of the latter that are free from the passivation layer, and has a Young's modulus lower than the Young's modulus of the passivation layer.

公开(公告)号：US20190160816A1

公开(公告)日：2019-05-30

申请号：US16262789

申请日：2019-01-30

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Domenico GIUSTI ,  Mauro PASETTI

IPC: B41J2/14 ,  B41J2/045

Abstract: A microfluidic device, having a containment body accommodating a plurality of ejecting elements arranged adjacent to each other. Each ejecting element has a liquid inlet, a containment chamber, a piezoelectric actuator and an ejection nozzle. The piezoelectric actuators of each ejecting element are connected to a control unit configured to generate actuation signals and to be integrated in the containment body.

公开(公告)号：US20190068934A1

公开(公告)日：2019-02-28

申请号：US16174801

申请日：2018-10-30

Applicant: STMicroelectronics S.r.l.

Inventor： Domenico GIUSTI ,  Roberto CARMINATI ,  Nicolo' BONI

IPC: H04N9/31 ,  G02B26/10 ,  B81B3/00 ,  G02B26/08 ,  G02B7/182

Abstract: Disclosed herein is a MEMS device including a fixed structure, a mobile structure, and deformable structures extending therebetween. The deformable structures have first ends anchored along X and Y axes of the fixed structure, and have second ends anchored offset from the X and Y axes of the fixed structure. The deformable structures are shaped so as to curve from their anchoring points along the mobile structure back toward the mobile structure, to extend along the perimeter of the mobile structure, and to then curve away from the mobile structure and toward their anchoring points along the fixed structure. Each deformable structure has two piezoelectric elements that extend along the length of that deformable structure, with one piezoelectric element having a greater length than the other piezoelectric element.

公开(公告)号：US20180215607A1

公开(公告)日：2018-08-02

申请号：US15867491

申请日：2018-01-10

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Domenico GIUSTI

IPC: B81B3/00 ,  H01L41/09 ,  H01L41/08

Abstract: What is described is a MEMS device comprising a piezoelectric actuator, which includes a film of piezoelectric material. The film is penetrated by a plurality of holes.