公开(公告)号：US09638589B2

公开(公告)日：2017-05-02

申请号：US14311497

申请日：2014-06-23

Applicant: STMICROELECTRONICS SA ,  STMICROELECTRONICS (CROLLES 2) SAS

Inventor： Vincent Fiori ,  Pierre Bar ,  Sébastien Gallois-Garreignot

IPC: G01L1/00 ,  G01L1/20 ,  G01L25/00 ,  G01B7/16 ,  G01L1/22 ,  G01L5/16 ,  H01L21/66

CPC classification number: G01L1/20 ,  G01B7/18 ,  G01L1/2287 ,  G01L5/161 ,  G01L25/00 ,  H01L22/34

Abstract: A method and corresponding system are provided for determining a three-dimensional stress field of an object having a flat surface. At least four flat resistors are placed on the flat surface of the object, with at least one of the resistors having a geometry different from that of the others. A variation of resistance of the resistors is measured. The three-dimensional stress field is determined from a system of equations involving the stress field, values of variations of the measured resistive values and sensitivity parameters of the resistors.