CHEMICAL CHARACTERIZATION OF SURFACE FEATURES
    14.
    发明申请
    CHEMICAL CHARACTERIZATION OF SURFACE FEATURES 有权
    表面特征的化学特征

    公开(公告)号:US20140098368A1

    公开(公告)日:2014-04-10

    申请号:US14032192

    申请日:2013-09-19

    Abstract: Provided herein is an apparatus, including an optical characterization device; a photon detector array configured to sequentially receive a first set of photons scattered from surface features of an article and a second set of photons scattered from surface features of the article and subsequently processed by the optical characterization device; and a chemical characterization means for chemically characterizing the surface features of the article, wherein the chemical characterization means is configured for processing the first set of photons received by the photon detector array and the second set of photons received by the photon detector array.

    Abstract translation: 本文提供的装置包括光学表征装置; 光子检测器阵列,其被配置为顺序地接收从制品的表面特征散射并随后由所述光学表征装置处理的物品的表面特征散射的第一组光子和第二组光子; 以及用于化学表征所述制品的表面特征的化学表征装置,其中所述化学表征装置被配置用于处理由所述光子检测器阵列接收的第一组光子和由所述光子检测器阵列接收的所述第二组光子。

    Chemical characterization of surface features
    20.
    发明授权
    Chemical characterization of surface features 有权
    表面特征的化学特征

    公开(公告)号:US09297751B2

    公开(公告)日:2016-03-29

    申请号:US14032192

    申请日:2013-09-19

    Abstract: Provided herein is an apparatus, including an optical characterization device; a photon detector array configured to sequentially receive a first set of photons scattered from surface features of an article and a second set of photons scattered from surface features of the article and subsequently processed by the optical characterization device; and a chemical characterization means for chemically characterizing the surface features of the article, wherein the chemical characterization means is configured for processing the first set of photons received by the photon detector array and the second set of photons received by the photon detector array.

    Abstract translation: 本文提供的装置包括光学表征装置; 光子检测器阵列,其被配置为顺序地接收从制品的表面特征散射并随后由所述光学表征装置处理的物品的表面特征散射的第一组光子和第二组光子; 以及用于化学表征所述制品的表面特征的化学表征装置,其中所述化学表征装置被配置用于处理由所述光子检测器阵列接收的第一组光子和由所述光子检测器阵列接收的所述第二组光子。

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