Abstract:
A ceramic member having a high density, small grain diameter, and excellent plasma resistance is provided. The ceramic member is constituted of a fine structure composed of fine grains, which is a ceramic member comprising an yttria as a main component and obtained through firing, wherein the ceramic member has an open porosity, as determined through a measurement by the Archimedes method, of less than 0.5%. By diminishing open voids, sites which is an origin of plasma erosion can be diminished. Thus, a ceramic member having excellent plasma resistance can be provided. By inhibiting abnormal grain growth to form a ceramic member constituted of stall grains, particle contamination by dusting can be reduced. Thus, plasma resistance and preventing particulate contamination can be improved.
Abstract:
An ion conducting actuator includes facing electrodes on a surface of a base material which is made of an ion exchange resin. An output from a drive voltage supply is applied to the facing electrodes via an electrode pad. Here, when a negative voltage is applied to the electrode on a left side and a positive voltage is applied to the electrode on a right side, an electric field is generated due to the voltage applied. Due to the electric field, negative ions and/or polar molecules in the base material move to a negative pole side, and the negative pole side is swollen as compared to a positive pole side, and a front end of the base material is deformed to a right side in the diagram. On the other hand, when a negative voltage is applied to an electrode on a right side, and a positive voltage is applied to an electrode on a left side, there is a reverse effect of the effect mentioned above, and the front end of the base material is deformed to a left side in the diagram. The ion conducting actuator is driven by using these characteristics.
Abstract:
An optical apparatus has a look-up table provided with control information for controlling an optimum variable optical-property optical element in accordance with a distance to an object, a zoom state, or a combination of the distance to the object with the zoom state. A drive of the variable optical-property optical element is controlled on the control information obtained from the look-up table or a predetermined calculation process is executed on the control information obtained from the look-up table, and information obtained from the calculation process is used to control the drive of the variable optical-property optical element.
Abstract:
A corrosion-resistant member includes a ceramic member containing yttrium oxide as a main component, containing cerium element, and obtained by firing under a nonoxidizing atmosphere. The corrosion-resistant member that has high corrosion-resistant characteristics and includes a ceramic member having a low volume resistivity can be provided.
Abstract:
A light adjusting apparatus for use with a small-size image pickup equipment. The light adjusting apparatus includes two substrates, out of which, one has an aperture, a spacing portion which regulates a distance between the two substrates, at least one incident-light adjusting unit which has a shaft member which becomes a center of rotation, and which is turned in a plane perpendicular to an optical axial direction, between the substrates, and at least one driving unit which drives the incident-light adjusting unit. Incident light which passes through the aperture is adjusted by turning the incident-light adjusting unit alternately, to the aperture and to a retracted position which is retracted from the aperture, by the driving unit. The light adjusting apparatus includes a notch which receives the shaft member, formed in the substrate, and a retaining portion which prevents the incident-light adjusting unit from dropping.
Abstract:
A ceramic member having a high density, small grain diameter, and excellent plasma resistance is provided. The ceramic member is constituted of a fine structure composed of fine grains, which is a ceramic member comprising an yttria as a main component and obtained through firing, wherein the ceramic member has an open porosity, as determined through a measurement by the Archimedes method, of less than 0.5%. By diminishing open voids, sites which is an origin of plasma erosion can be diminished. Thus, a ceramic member having excellent plasma resistance can be provided. By inhibiting abnormal grain growth to form a ceramic member constituted of stall grains, particle contamination by dusting can be reduced. Thus, plasma resistance and preventing particulate contamination can be improved.
Abstract:
An electrostatic chuck includes a ceramic member containing yttrium oxide as a main component, containing cerium element and obtained by firing under a nonoxidizing atmosphere. The electrostatic chuck that has high corrosion resistant characteristics and includes a ceramic member having a low volume resistivity with a strong attracting force that utilize the Johnsen-Rahbeck force can be obtained.
Abstract:
A rare-earth oxide sintered body, or corrosion-resistant material, having low sintering temperature and high density is prepared by adding a boron compound at a ratio of 0.06 mol % or more and less than 25 mol % when converted into boron oxide (B2O3) to oxide powder of at least one of La, Nd, Sm, Eu, Gd, Dy, Ho, Er, Tm, Yb, Lu, and Sc, after which the mixed powder is formed and sintered. The sintered body comprises at least one of La2O3, Nd2O3, Sm2O3, Eu2O3, Gd2O3, Dy2O3, Ho2O3, Er2O3, Tm2O3, Yb2O3, Lu2O3, and Sc2O3, and at least one of Ln3BO6 (Ln=La, Nd, Sm, Eu, Gd, Dy, Ho, Er, Tm, Yb, and Lu), and Sc3BO6 as a main constituent crystal thereof.
Abstract translation:通过在转化为氧化硼(B 2 O 3)中添加比例为0.06摩尔%以上且小于25摩尔%的硼化合物,制备具有低烧结温度和高密度的稀土氧化物烧结体或耐腐蚀材料 )到La,Nd,Sm,Eu,Gd,Dy,Ho,Er,Tm,Yb,Lu和Sc中的至少一种的氧化物粉末,之后形成混合粉末并烧结。 烧结体包括La 2 O 3,Nd 2 O 3,Sm 2 O 3,Eu 2 O 3,Gd 2 O 3,Dy 2 O 3,Ho 2 O 3,Er 2 O 3,Tm 2 O 3,Yb 2 O 3,Lu 2 O 3和Sc 2 O 3中的至少一种,Ln 3 BO 6(L n = La,Nd,Sm, Gd,Dy,Ho,Er,Tm,Yb和Lu)和Sc3BO6作为其主要构成晶体。
Abstract:
A mobile device system includes a plurality of mobile devices, each to which unique identification information is assigned, wherein each mobile device includes a location-information acquisition unit, a communication unit, and a group registration unit. The communication unit links location information acquired by the location-information acquisition unit of the mobile device and the identification information of the mobile device, sends the information to other mobile devices, and receives from the other mobile devices location information of the other mobile devices and identification information linked to the location information of the other mobile devices. The group registration unit detects other mobile devices located within a predetermined range of the mobile device on the basis of the location information of the other mobile devices and the location information of the mobile device and registers the identification information of the detected other mobile devices as a group.
Abstract:
Even when the user carries a different combination of mobile devices on different days, the system can flexibly respond to those situations and misplacement of a mobile device can be prevented. Each mobile device includes a communication unit for communicating with other mobile devices, a GPS receiver for acquiring current location information of the mobile device, a group registration unit, a function-restricting unit for restricting a predetermined function, and a control unit. In each mobile device, other mobile devices located within a predetermined range of the mobile device are registered in the group registration unit as a group. After the registration, the other mobile devices located within the predetermined range of the mobile device are periodically detected, and the function-restricting unit is operated when the combination of the detected other mobile devices and the combination of the other mobile devices registered in the group registration unit differ.