Method for detection of a fluid leak related to a piston machine
    11.
    发明授权
    Method for detection of a fluid leak related to a piston machine 有权
    用于检测与活塞机相关的流体泄漏的方法

    公开(公告)号:US08412472B2

    公开(公告)日:2013-04-02

    申请号:US12674381

    申请日:2008-07-25

    Inventor: Age Kyllingstad

    Abstract: A method for detection of a fluid leak related to at least one piston machine (1), where the method includes: —attaching a pressure sensor (18, 24) to at least a pressure side of the at least one piston machine (1); —measuring the pressure on the pressure side of the at least one piston machine (1); —attaching a transmitter (28) to the at least one piston machine (1), said transmitter (28) rendering a signal for calculating the rotational speed of the at least one piston machine (1); —calculating the speed of the at least one piston machine (1); —calculating the sum of nominal flow rates from all piston machines (1); —calculating a flow rate compensation factor; —calculating a normalized pressure (42) to be equal to the discharge pressure multiplied by the said compensation factor for the flow rate; and —monitoring the normalized pressure (42) to detect a leakage.

    Abstract translation: 一种用于检测与至少一个活塞机(1)相关的流体泄漏的方法,其中所述方法包括:将压力传感器(18,24)附接到所述至少一个活塞机器(1)的至少一个压力侧, ; - 测量所述至少一个活塞机(1)的压力侧的压力; 将发射器(28)附接到所述至少一个活塞机器(1),所述发射器(28)呈现用于计算所述至少一个活塞机器(1)的转速的信号; 计算所述至少一个活塞机器(1)的速度; 计算所有活塞机(1)的额定流量的总和; 计算流量补偿系数; 将归一化压力(42)计算为等于排出压力乘以所述用于流量的所述补偿因子; 并监测归一化压力(42)以检测泄漏。

    Free-diaphragm pump
    12.
    发明申请

    公开(公告)号:US20020021974A1

    公开(公告)日:2002-02-21

    申请号:US09946752

    申请日:2001-09-04

    Abstract: A pump for ultra-pure fluids comprises a flexible diaphragm separating a fluid chamber from an air chamber. The diaphragm creates an airtight seal between the fluid chamber and the air chamber when a self-centering and trapezoidal shaped wedge compressively forces the diaphragm into a trapezoidal shaped perimeter cavity surrounding the chambers. Any leak from the fluid chamber into the air chamber is detected by a fiber optic system comprising two optical fibers that are disposed at an angle that is calculated to enable light to pass between the fibers only in the presence of a liquid having a predetermined index of refraction. The fiber optic system can also be used to determine the stroke of the pump by disposing the fiber optic lines at an angle calculated to reflect light off of the oscillating diaphragm when the diaphragm arrives at a predetermined location.

    Method for Detection of a Fluid Leak Related to a Piston Machine
    15.
    发明申请
    Method for Detection of a Fluid Leak Related to a Piston Machine 有权
    检测与活塞机相关的液体泄漏的方法

    公开(公告)号:US20110046902A1

    公开(公告)日:2011-02-24

    申请号:US12674381

    申请日:2008-07-25

    Inventor: Age Kyllingstad

    Abstract: A method for detection of a fluid leak related to at least one piston machine (1), where the method includes: —attaching a pressure sensor (18, 24) to at least a pressure side of the at least one piston machine (1); —measuring the pressure on the pressure side of the at least one piston machine (1); —attaching a transmitter (28) to the at least one piston machine (1), said transmitter (28) rendering a signal for calculating the rotational speed of the at least one piston machine (1); —calculating the speed of the at least one piston machine (1); —calculating the sum of nominal flow rates from all piston machines (1); —calculating a flow rate compensation factor; —calculating a normalized pressure (42) to be equal to the discharge pressure multiplied by the said compensation factor for the flow rate; and —monitoring the normalized pressure (42) to detect a leakage.

    Abstract translation: 一种用于检测与至少一个活塞机(1)相关的流体泄漏的方法,其中所述方法包括:将压力传感器(18,24)附接到所述至少一个活塞机器(1)的至少一个压力侧, ; - 测量所述至少一个活塞机(1)的压力侧的压力; 将发射器(28)附接到所述至少一个活塞机器(1),所述发射器(28)呈现用于计算所述至少一个活塞机器(1)的转速的信号; 计算所述至少一个活塞机器(1)的速度; 计算所有活塞机(1)的额定流量的总和; 计算流量补偿系数; 将归一化压力(42)计算为等于排出压力乘以所述用于流量的所述补偿因子; 并监测归一化压力(42)以检测泄漏。

    Fiber optics systems for high purity pump diagnostics
    16.
    发明授权
    Fiber optics systems for high purity pump diagnostics 有权
    用于高纯度泵诊断的光纤系统

    公开(公告)号:US06695593B1

    公开(公告)日:2004-02-24

    申请号:US10170082

    申请日:2002-06-11

    Abstract: A pump for ultra-pure fluids comprises a flexible diaphragm separating a fluid chamber from an air chamber. The diaphragm creates an airtight seal between the fluid chamber and the air chamber. Any leak from the fluid chamber into the air chamber is detected by a fiber optic system comprising an element and two optical fibers that are disposed such that light is detected by the second optical fiber only when the element is not in contact with liquid. A second fiber optic system can also be used to determine the stroke of an oscillating member by disposing the fiber optic lines at an angle calculated to reflect light off of the oscillating member when the member arrives at a predetermined location. The fiber optics are adapted to be resistant to corrosion, non-igniting, and non-contaminating.

    Abstract translation: 用于超纯流体的泵包括将流体室与空气室分开的柔性隔膜。 隔膜在流体室和空气室之间产生气密密封。 从流体室进入空气室的任何泄漏由包括元件和两个光纤的光纤系统检测,该光纤系统被设置成仅当该元件不与液体接触时由第二光纤检测到光。 第二光纤系统还可以用于通过将光纤线路设计成在成员到达预定位置时被计算为反射光离开振荡部件的角度来确定振荡部件的行程。 光纤适用于耐腐蚀,不起火和无污染。

    Free-diaphragm pump
    17.
    发明授权
    Free-diaphragm pump 有权
    自由隔膜泵

    公开(公告)号:US06402486B1

    公开(公告)日:2002-06-11

    申请号:US09946752

    申请日:2001-09-04

    Abstract: A pump for ultra-pure fluids comprises a flexible diaphragm separating a fluid chamber from an air chamber. The diaphragm creates an airtight seal between the fluid chamber and the air chamber when a self-centering and trapezoidal shaped wedge compressively forces the diaphragm into a trapezoidal shaped perimeter cavity surrounding the chambers. Any leak from the fluid chamber into the air chamber is detected by a fiber optic system comprising two optical fibers that are disposed at an angle that is calculated to enable light to pass between the fibers only in the presence of a liquid having a predetermined index of refraction. The fiber optic system can also be used to determine the stroke of the pump by disposing the fiber optic lines at an angle calculated to reflect light off of the oscillating diaphragm when the diaphragm arrives at a predetermined location.

    Abstract translation: 用于超纯流体的泵包括将流体室与空气室分开的柔性隔膜。 当自定心和梯形形状的楔形物压缩地将隔膜压迫到围绕室的梯形周边空腔时,隔膜在流体室和空气室之间产生气密密封。 从流体室进入空气室的任何泄漏由包括两个光纤的光纤系统检测,该光纤系统被设置成一角度,以使光仅在存在具有预定指数 折射。 光纤系统还可以用于通过将光纤线设置成当光阑到达预定位置时被计算为反射光离开振荡光阑的角度来确定泵的行程。

    Free-diaphragm pump
    18.
    发明授权
    Free-diaphragm pump 有权
    自由隔膜泵

    公开(公告)号:US6106246A

    公开(公告)日:2000-08-22

    申请号:US166490

    申请日:1998-10-05

    Abstract: A pump for ultra-pure fluids, such as hot, de-ionized water, processing acids, and the like, such as those used in the semiconductor processing industries, is designed to operate at greater than 10 and often 30 or 50 million cycles without failure, and to be failclean. A diaphragm pump maintains a free diaphragm, supported in a contoured chamber for driving and being driven by a piston, able to move radially, rather than absorbing misalignment or distortions. A self-energizing, self-centering, trapezoidal seal captures a constant-thickness diaphragm between a head and body forming the chamber of the pump, separating a body portion and a head portion. An oriented, calendered, multi-layered chlorofluorocarbon diaphragm may be the same material chemically as the body, head, or both. Non-reactive pilots control an operating (motive) fluid, detecting the end-of-stroke whether near the head or near the body. An integrated base controller for the operating fluid supports the apparatus, has a quick exhaust for dumping external-controller air overboard after use, and a bias disk to provide precise, digital, spool positioning within an operational range of pressure differentials. The heads may connect to the body by slip rings, so heads remain registered. Cantilevered portions of the head may absorb secondary creep and provide continued spring loading using exclusively non-reactive materials, no metals, and no elastomers, as a failclean system.

    Abstract translation: 用于超纯流体的泵,例如热,去离子水,加工酸等,例如在半导体加工工业中使用的那些,被设计为在大于10次,通常为30或5000万次循环的情况下操作,而没有 失败,失败。 隔膜泵保持自由的隔膜,支撑在轮廓室中,用于驱动并由能够径向移动的活塞驱动,而不是吸收不对准或扭曲。 自动自动定心的梯形密封件在形成泵的腔室的头部和主体之间捕获恒定厚度的隔膜,分离主体部分和头部部分。 取向的,压延的多层氯氟烃隔膜可以是与身体,头部或两者化学相同的材料。 非反应性驾驶员控制操作(动力)流体,无论是靠近头部还是靠近身体,都可以检测行程终点。 用于工作流体的集成基座控制器支持该装置,具有用于在使用后倾倒外部控制器空气的快速排气,以及偏置盘,以在压力差的操作范围内提供精确的数字式阀芯定位。 头部可以通过滑环连接到身体,因此头部保持注册。 头部的悬臂部分可以吸收二次蠕变,并且使用专门的非反应性材料,没有金属,没有弹性体作为故障清洁系统来提供持续的弹簧加载。

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