公开(公告)号：US08619259B2

公开(公告)日：2013-12-31

申请号：US13153442

申请日：2011-06-05

Applicant: Seong Weon Lee ,  Sang Young Chin ,  Gyung Su Moon

Inventor： Seong Weon Lee ,  Sang Young Chin ,  Gyung Su Moon

IPC: G01N21/55

CPC classification number: G01J1/02 ,  G01J1/0266 ,  G01J1/04 ,  G01J1/0411 ,  G01J1/0422 ,  G01J1/0437 ,  G01J1/0444 ,  G01J1/0448

Abstract: A high-speed optical measurement apparatus includes an objective lens unit, an optical path unit, a control circuit unit, a measurement sensor, an eyepiece unit, and a measurement sensor connection. The objective lens unit adjusts the magnitude of the overall light of the individual locations of the object or the set of multiple objects, and allows the light to make its entrance. The optical path unit changes the path of the incident light. The control circuit unit outputs a control signal which is used to change a direction of the light by controlling the optical path unit. The measurement sensor measures the incident light. The eyepiece unit conforms the light to the size and location of the measurement sensor. The measurement sensor connection fastens the measurement sensor so that the light incoming through the eyepiece unit is aligned with the measurement sensor.

Abstract translation: 高速光学测量装置包括物镜单元，光路单元，控制电路单元，测量传感器，目镜单元和测量传感器连接。 物镜单元调整物体或多个物体的各个位置的整体光的大小，并允许光进入。 光路单元改变入射光的路径。 控制电路单元通过控制光路单元输出用于改变光的方向的控制信号。 测量传感器测量入射光。 目镜单元符合测量传感器的尺寸和位置。 测量传感器连接固定测量传感器，使得通过目镜单元进入的光线与测量传感器对齐。

公开(公告)号：US08194125B2

公开(公告)日：2012-06-05

申请号：US11980912

申请日：2007-10-31

Applicant: John A. Mack ,  Marion N. Todd ,  David F. Rock

Inventor： John A. Mack ,  Marion N. Todd ,  David F. Rock

IPC: H04N9/47

CPC classification number: G01J1/08 ,  G01J1/04 ,  G01J1/0437 ,  G01J1/0444

Abstract: A radiance source includes a housing having an interior wall, wherein at least a spherical portion of the interior wall of the housing is spherical, an interior volume, and an exit port. A light source is disposed within the interior volume of the housing. A calibration structure blocks and reflects a light ray that would otherwise travel directly from the light source to the exit port without reflecting from the interior wall. The calibration structure has a calibration body having a curved back surface facing the light source and a curved front surface facing the exit port. There is an optically diffuse, lambertian reflecting surface on at least the spherical portion of the interior wall of the housing, the back surface of the calibration body, and the front surface of the calibration body.

Abstract translation: 辐射源包括具有内壁的壳体，其中壳体的内壁的至少球形部分是球形的，内部容积和出口。 光源设置在壳体的内部空间内。 校准结构阻挡并反射否则将直接从光源行进到出口而不从内壁反射的光线。 校准结构具有校准体，其具有面向光源的弯曲后表面和面向出口的弯曲前表面。 在壳体的内壁的至少球形部分，校准体的后表面和校准体的前表面上存在光漫射的朗伯反射表面。

公开(公告)号：US07576316B2

公开(公告)日：2009-08-18

申请号：US11649877

申请日：2007-01-05

Applicant: Volker Seyfried ,  Frank Schreiber

Inventor： Volker Seyfried ,  Frank Schreiber

IPC: G12B13/00

CPC classification number: H01L27/14806 ,  G01J1/02 ,  G01J1/0295 ,  G01J1/04 ,  G01J1/0414 ,  G01J1/0437 ,  G01J1/0444 ,  G01J1/0488 ,  G01J1/08 ,  G01J1/10

Abstract: An apparatus, a microscope having an apparatus, and a method for calibration of a photosensor chip (19) are disclosed. The apparatus has a photosensor chip (19) which has a multiplicity of light-sensitive elements. A reference light source (30) is provided and directs the light at at least one part of the photosensor chip (19). In addition, an open-loop or closed-loop control unit (19a) is provided and determines and corrects variances between the individual light-sensitive elements.

Abstract translation: 公开了一种装置，具有装置的显微镜和用于校准光传感器芯片（19）的方法。 该装置具有光传感器芯片（19），其具有多个感光元件。 提供参考光源（30）并将光引导到光传感器芯片（19）的至少一部分。 此外，提供开环或闭环控制单元（19a），并确定和校正各个感光元件之间的差异。

公开(公告)号：US07130051B2

公开(公告)日：2006-10-31

申请号：US10736940

申请日：2003-12-16

Applicant: Ben R. Oppenheimer ,  Michael M. Shara

Inventor： Ben R. Oppenheimer ,  Michael M. Shara

IPC: G01N21/55 ,  G01N21/47 ,  G01J5/02

CPC classification number: G02B23/00 ,  G01J1/0403 ,  G01J1/0437 ,  G01J1/0444 ,  G01J1/4228 ,  G02B5/005

Abstract: In an embodiment according to the present invention, a coronagraph for detecting reflective bodies external to a light source is provided. A first mirror for directing a beam of light onto an occulting mask is adjusted based on a data from a fiber optic sensor or a second sensor. An occulting mask for separating the beam into a first and second portion directs the first portion onto a fiber optic sensor and the second portion onto a Lyot stop. The occulting mask is adjustable based on data from the second sensor. The Lyot stop separates the second portion of the beam into a third and fourth portion. The Lyot stop also directs the third portion of the beam onto the second sensor and the fourth portion of the beam onto a camera for detecting one or more reflective bodies external to a light source.

Abstract translation: 在根据本发明的实施例中，提供了一种用于检测光源外部的反射体的检测器。 基于来自光纤传感器或第二传感器的数据来调整用于将光束引导到掩蔽掩模上的第一反射镜。 用于将光束分离成第一和第二部分的掩蔽掩模将第一部分引导到光纤传感器上，将第二部分引导到Lyot停止点上。 掩蔽罩可根据第二传感器的数据进行调节。 Lyot挡块将梁的第二部分分成第三部分和第四部分。 Lyot挡块还将光束的第三部分引导到第二传感器和光束的第四部分到用于检测光源外部的一个或多个反射体的照相机上。

公开(公告)号：US09664555B2

公开(公告)日：2017-05-30

申请号：US13718850

申请日：2012-12-18

Applicant: Apple Inc.

Inventor： Boon W. Shiu ,  David Lin Lee ,  Michael DiVincent

IPC: G01J1/02 ,  G01J1/04 ,  G01J1/42 ,  H04M1/22

CPC classification number: G01J1/0271 ,  G01J1/0425 ,  G01J1/0444 ,  G01J1/4204 ,  G01J1/4228 ,  H04M1/22

Abstract: Electronic devices may be provided with light sensors. Light sensors may be proximity sensors or ambient light sensors. Proximity sensors may include a light-emitting component and a light-sensitive component. The electronic device may include an enclosure formed from housing structures and some or all of a display for the device. The enclosure may include openings such as openings formed from clusters of smaller openings. Each light sensor may receive light through one of the clusters of openings. The light sensor may receive the light directly through the openings or may receive light that passes through the openings and is guided to the light sensor by light guiding structures. The light guiding structures may include fiber optic structures or light-reflecting structures. Fiber optic structures may fill or partially fill the openings. Light reflecting structures may be machined cavities in an internal support structure.

公开(公告)号：US09354173B2

公开(公告)日：2016-05-31

申请号：US13593485

申请日：2012-08-23

Applicant: Antero Yli-Koski ,  Pauli Salmelainen ,  Jukka Valtonen

Inventor： Antero Yli-Koski ,  Pauli Salmelainen ,  Jukka Valtonen

IPC: G01N21/00 ,  G01N21/64 ,  G01J1/04

CPC classification number: G01N21/6445 ,  G01J1/0444 ,  G01J1/0488 ,  G01J1/0492 ,  G01N21/6408 ,  G01N21/645

Abstract: An apparatus for optically measuring samples, including a radiation source configured to form an excitation beam in an excitation channel, a detector configured to detect an emission beam in an emission channel and a filter configured to be located, in an excitation position, in the excitation channel, and in an emission position, in the emission channel. The apparatus further includes a first filter storage comprising a first set of filter storage positions, a second filter storage comprising a second set of filter storage positions, and a filter transfer mechanism configured to move the filter between the excitation position, the emission position, the first set of filter storage positions and the second set of filter storage positions.

Abstract translation: 一种用于光学测量样品的装置，包括被配置为在激发通道中形成激发光束的辐射源，被配置为检测发射通道中的发射光束的检测器和被配置为位于激发位置的激发器中的滤光器 通道，并处于发射位置。 所述设备还包括第一过滤器存储器，其包括第一组过滤器存储位置，第二过滤器存储器包括第二组过滤器存储位置，以及过滤器传送机构，其配置成在所述激励位置，所述排放位置， 第一组过滤器存储位置和第二组过滤器存储位置。

公开(公告)号：US09116044B2

公开(公告)日：2015-08-25

申请号：US13646246

申请日：2012-10-05

Applicant: KLA-Tencor Corporation

Inventor： Daniel Hey

IPC: G01J1/00 ,  G01J1/42 ,  G01J1/04

CPC classification number: G01J1/4257 ,  G01J1/0437 ,  G01J1/0444

Abstract: The disclosure is directed to a system and method for determining at least one characteristic of an illumination beam emanating from an illumination source. A substrate having a plurality of apertures may be actuated through an illumination beam so that apertures at different spatial offsets are scanned through the illumination beam at one or more levels of focus. Portions of illumination directed through scanned apertures may be received by at least one detector. At least one characteristic of the illumination beam may be extracted from data points associated with intensity levels associated with detected portions of illumination. Furthermore, multiple determinations of a beam characteristic made over a period of time may be utilized to calibrate the illumination source.

Abstract translation: 本公开涉及一种用于确定从照明源发出的照明光束的至少一个特性的系统和方法。 具有多个孔的基底可以通过照明光束被致动，使得在不同的空间偏移下的孔以一个或多个焦点水平被扫过照射束。 通过扫描的孔径引导的照明部分可以由至少一个检测器接收。 可以从与检测到的照明部分相关联的强度水平相关联的数据点提取照明光束的至少一个特性。 此外，可以利用在一段时间内进行的光束特性的多次确定来校准照明源。

公开(公告)号：US07944608B2

公开(公告)日：2011-05-17

申请号：US12343208

申请日：2008-12-23

Applicant: Kazuhiro Hayashi ,  Minoru Sukekawa ,  Takayuki Kono

Inventor： Kazuhiro Hayashi ,  Minoru Sukekawa ,  Takayuki Kono

IPC: G02B21/00

CPC classification number: G02B21/14 ,  G01J1/04 ,  G01J1/0411 ,  G01J1/0414 ,  G01J1/0444 ,  G01J1/0462 ,  G01J1/08 ,  G02B26/007

Abstract: Provided are an illuminating optical system which illuminates a sample, an illumination-side pupil modulating device which is arranged on a side of the illuminating optical system, an illumination-side turret which holds the illumination-side pupil modulating device, an illumination-side-turret revolving mechanism which revolves the illumination-side turret to move the illumination-side pupil modulating device along an orbital circumference on a plane perpendicular to an optical axis, a relaying optical system which relays a pupil of an objective lens, an imaging-side pupil modulating device which is arranged on a side of the relaying optical system, an imaging-side turret which holds the imaging-side pupil modulating device, and an imaging-side-turret revolving mechanism which revolves the imaging-side turret to move the imaging-side pupil modulating device along the orbital circumference on a plane perpendicular to the optical axis.

Abstract translation: 本发明提供一种照射样品的照明光学系统，配置在照明光学系统一侧的照明侧光瞳调制装置，保持照明侧光瞳调制装置的照明侧转塔，照明侧光瞳调制装置， 旋转照明侧转塔的转台旋转机构，其使照明侧光瞳调制装置沿着与光轴垂直的平面上的轨道圆周移动，中继光学系统，其中继物镜的光瞳，成像侧瞳孔 配置在中继光学系统一侧的调制装置，保持成像侧光瞳调制装置的成像侧转塔和成像侧转塔旋转机构，其使成像侧转塔旋转， 在垂直于光轴的平面上沿轨道圆周进行侧光瞳调制装置。

公开(公告)号：US20090108213A1

公开(公告)日：2009-04-30

申请号：US11980912

申请日：2007-10-31

Applicant: John A. Mack ,  Marion N. Todd ,  David F. Rock

Inventor： John A. Mack ,  Marion N. Todd ,  David F. Rock

IPC: G21G5/00

CPC classification number: G01J1/08 ,  G01J1/04 ,  G01J1/0437 ,  G01J1/0444

Abstract: A radiance source includes a housing having an interior wall, wherein at least a spherical portion of the interior wall of the housing is spherical, an interior volume, and an exit port. A light source is disposed within the interior volume of the housing. A calibration structure blocks and reflects a light ray that would otherwise travel directly from the light source to the exit port without reflecting from the interior wall. The calibration structure has a calibration body having a curved back surface facing the light source and a curved front surface facing the exit port. There is an optically diffuse, lambertian reflecting surface on at least the spherical portion of the interior wall of the housing, the back surface of the calibration body, and the front surface of the calibration body.

Abstract translation: 辐射源包括具有内壁的壳体，其中壳体的内壁的至少球形部分是球形的，内部容积和出口。 光源设置在壳体的内部空间内。 校准结构阻挡并反射否则将直接从光源行进到出口而不从内壁反射的光线。 校准结构具有校准体，其具有面向光源的弯曲后表面和面向出口的弯曲前表面。 在壳体的内壁的至少球形部分，校准体的后表面和校准体的前表面上存在光漫射的朗伯反射表面。

公开(公告)号：US20070200052A1

公开(公告)日：2007-08-30

申请号：US11649877

申请日：2007-01-05

Applicant: Volker Seyfried ,  Frank Schreiber

Inventor： Volker Seyfried ,  Frank Schreiber

IPC: G02B27/40

CPC classification number: H01L27/14806 ,  G01J1/02 ,  G01J1/0295 ,  G01J1/04 ,  G01J1/0414 ,  G01J1/0437 ,  G01J1/0444 ,  G01J1/0488 ,  G01J1/08 ,  G01J1/10

Abstract: An apparatus, a microscope having an apparatus, and a method for calibration of a photosensor chip (19) are disclosed. The apparatus has a photosensor chip (19) which has a multiplicity of light-sensitive elements. A reference light source (30) is provided and directs the light at at least one part of the photosensor chip (19). In addition, an open-loop or closed-loop control unit (19a) is provided and determines and corrects variances between the individual light-sensitive elements.

Abstract translation: 公开了一种装置，具有装置的显微镜和用于校准光传感器芯片（19）的方法。 该装置具有光传感器芯片（19），其具有多个感光元件。 提供参考光源（30）并将光引导到光传感器芯片（19）的至少一部分。 此外，提供开环或闭环控制单元（19a），并确定和校正各个感光元件之间的差异。