公开(公告)号：US4950952A

公开(公告)日：1990-08-21

申请号：US408462

申请日：1989-09-15

Applicant: Yoshimitsu Aramaki

Inventor： Yoshimitsu Aramaki

IPC: H01J9/12 ,  H01J29/38

CPC classification number: H01J29/385 ,  H01J9/12 ,  H01J2201/3425 ,  H01J2201/3426

Abstract: The present invention provides a photocathode which is formed on a substrate consisting of polycrystalline members, and which mainly consists of a semimetal, manganese or silver, and one or a plurality of alkaline metals, characterized in that the photocathode is formed on an alkaline metal oxide layer formed on the substrate, and a composition ratio of the semimetal, manganese or silver, and the one or a plurality of alkaline metals is stoichiometric or almost stoichiometric. The photocathode of the present invention has high sensitivity and can stably maintain the sensitivity for a long period of time.

公开(公告)号：US4845365A

公开(公告)日：1989-07-04

申请号：US211388

申请日：1988-06-24

Applicant: Jean-Pierre Girardeau-Montaut ,  Claire Girardeau-Montaut ,  Angelo Erbeia

Inventor： Jean-Pierre Girardeau-Montaut ,  Claire Girardeau-Montaut ,  Angelo Erbeia

IPC: H01J29/48 ,  H01J1/34 ,  H01J3/02 ,  H01J23/04 ,  H01J37/06 ,  H01S3/09

CPC classification number: H01J3/021 ,  H01J1/34 ,  H01J23/04 ,  H01S3/0903 ,  H01J2201/3425 ,  H01J2201/3426

Abstract: According to the invention, under glancing incidence a first radiation (6) in the infrared range and which is linearly polarized is supplied to a target (2) made from a non-electrically insulating material and simultaneously to said target is supplied under a non-glancing incidence a second radiation (8) in the visible or ultraviolet range, in such a way that a same zone of the target is reached by the first and second radiations, the polarizing plane of the first radiation also being such that it contains a perpendicular to said zone, which then produces electrons.Application to the production of free electron lasers.

Abstract translation: 根据本发明，在扫描入射下，将红外范围内的线性偏振的第一辐射（6）供给到由非电绝缘材料制成的靶（2），并且同时向所述靶提供非靶 以可见光或紫外线范围的第二辐射（8）扫视入射，使得通过第一和第二辐射达到目标的相同区域，第一辐射的偏振平面也使得其包含垂直 到所述区域，然后产生电子。 应用于生产自由电子激光器。

公开(公告)号：US4460831A

公开(公告)日：1984-07-17

申请号：US525514

申请日：1983-08-22

Applicant: Peter E. Oettinger ,  Chunghsin Lee

Inventor： Peter E. Oettinger ,  Chunghsin Lee

IPC: H01J9/12 ,  H01J37/073 ,  H01J37/317 ,  G21K5/04 ,  H01J40/06 ,  H01J40/16

CPC classification number: B82Y10/00 ,  B82Y40/00 ,  H01J37/073 ,  H01J37/3174 ,  H01J9/12 ,  H01J2201/3423 ,  H01J2201/3426 ,  H01J2237/061 ,  H01J2237/06333 ,  H01J2237/31779

Abstract: An electron beam generator particularly adapted for direct-write semiconductor lithography applications is disclosed which includes a photoemissive cathode, a modulable laser for illuminating the photoemissive cathode, and light optics to create an optical pattern on the cathode. The photoemissive cathode is composed of a light transmissive substrate onto which is deposited an optically semitransparent, electrically conductive film. This film in turn is coated with a thin layer of a photoemissive substance such as cesium antimonide so that the photoemissive cathode emits an intense and substantially monochromatic beam of electrons upon laser light illumination. The emitted electron beam is configured in accordance with the optical pattern created on the cathode, and in passing through successive electron optical devices is further shaped and sized for use, for example, in lithographically generating very large scale integrated (VLSI) circuits on semiconductors.

Abstract translation: 公开了一种特别适用于直写半导体光刻应用的电子束发生器，其包括光发射阴极，用于照射光发射阴极的可调激光器，以及用于在阴极上产生光学图案的光学光学器件。 光发射阴极由其上沉积有光学半透明导电膜的透光基板组成。 该薄膜依次涂覆有诸如锑化锑的光发射物质的薄层，使得在激光照明下，光发射阴极发射强烈且基本上单色的电子束。 发射的电子束根据在阴极上产生的光学图案来配置，并且通过连续的电子光学器件进一步成型和定尺寸以用于例如在半导体上平版印刷生成非常大规模的集成（VLSI）电路。

公开(公告)号：US3254253A

公开(公告)日：1966-05-31

申请号：US15832761

申请日：1961-12-11

Applicant: EMI LTD

Inventor： PETER DAVIS GORDON ,  ALFRED BENBOW HENRY

IPC: H01J1/34 ,  H01J29/38 ,  H01J40/06

CPC classification number: H01J40/06 ,  H01J1/34 ,  H01J29/38 ,  H01J2201/3426

公开(公告)号：US07772771B2

公开(公告)日：2010-08-10

申请号：US10537587

申请日：2004-01-16

Applicant: Takashi Watanabe ,  Yoshiro Akai ,  Shirou Sakai

Inventor： Takashi Watanabe ,  Yoshiro Akai ,  Shirou Sakai

IPC: H01J31/26 ,  H01J1/14 ,  H01J17/26

CPC classification number: C22B26/10 ,  C22B5/04 ,  C23C14/14 ,  C23C14/243 ,  H01J1/35 ,  H01J9/12 ,  H01J2201/32 ,  H01J2201/3426

Abstract: The present invention relates to an alkali metal generating agent and others for formation of a photo-cathode or a secondary-electron emitting surface capable of stably generating an alkali metal. The alkali metal generating agent is used in formation of a photo-cathode for emitting a photoelectron corresponding to incident light, or in formation of a secondary-electron emitting surface for emitting secondary electrons corresponding to an incident electron. Particularly, the alkali metal generating agent contains at least an oxidizer comprising at least one vanadate with an alkali metal ion as a counter cation, and a reducer for reducing the ion. An alkali metal generating device comprises at least the alkali metal generating agent and a case housing it, and the case is provided with a discharge port for discharging the vapor of the alkali metal.

Abstract translation: 本发明涉及一种用于形成能够稳定产生碱金属的光阴极或二次电子发射表面的碱金属发生剂等。 碱金属发生剂用于形成用于发射对应于入射光的光电子的光阴极，或者形成用于发射对应于入射电子的二次电子的二次电子发射表面。 特别地，碱金属发生剂至少包含至少一种含有碱金属离子作为抗衡阳离子的钒酸盐的氧化剂和用于还原离子的还原剂。 碱金属发生装置至少包括碱金属发生剂和容纳它的壳体，并且壳体设置有用于排出碱金属的蒸气的排出口。

公开(公告)号：US07474051B2

公开(公告)日：2009-01-06

申请号：US10538642

申请日：2004-01-16

Applicant: Hiroyuki Sugiyama ,  Yoshiro Akai ,  Shirou Sakai

Inventor： Hiroyuki Sugiyama ,  Yoshiro Akai ,  Shirou Sakai

IPC: H01J40/06

CPC classification number: C22B26/10 ,  C22B5/04 ,  C23C14/14 ,  C23C14/243 ,  H01J1/35 ,  H01J9/12 ,  H01J2201/32 ,  H01J2201/3426

Abstract: The present invention relates to an alkali metal generating agent and others for formation of a photo-cathode or a secondary-electron emitting surface capable of stably generating an alkali metal. The alkali metal generating agent is used in formation of a photo-cathode for emitting a photoelectron corresponding to incident light, or in formation of a secondary-electron emitting surface for emitting secondary electrons corresponding to an incident electron. Particularly, the alkali metal generating agent contains at least an oxidizer comprising at least one tungstate with an alkali metal ion as a counter cation, and a reducer for reducing the ion. An alkali metal generating device comprises at least the alkali metal generating agent and a case housing it, and the case is provided with a discharge port for discharging the vapor of the alkali metal.

Abstract translation: 本发明涉及一种用于形成能够稳定产生碱金属的光阴极或二次电子发射表面的碱金属发生剂等。 碱金属发生剂用于形成用于发射对应于入射光的光电子的光阴极，或者形成用于发射对应于入射电子的二次电子的二次电子发射表面。 特别地，碱金属发生剂至少包含含有至少一种具有碱金属离子作为抗衡阳离子的钨酸盐的氧化剂和用于还原离子的还原剂。 碱金属发生装置至少包括碱金属发生剂和容纳它的壳体，并且壳体设置有用于排出碱金属的蒸气的排出口。

公开(公告)号：US06531816B1

公开(公告)日：2003-03-11

申请号：US09423278

申请日：1999-11-04

Applicant: Amos Breskin ,  Rachel Chechik ,  Alexei Buzulutskov

Inventor： Amos Breskin ,  Rachel Chechik ,  Alexei Buzulutskov

IPC: H01J4006

CPC classification number: H01J1/34 ,  H01J2201/3426

Abstract: This invention discloses a thin-film-coated photocathode, including a photocathode formed of first material consisting of potassium cesiuin antimonide and a thin-film coating of a second material consisting of cesium bromide (CsBr).

Abstract translation: 本发明公开了一种薄膜涂覆的光电阴极，其包括由铯氯化镉组成的第一材料和由溴化铯（CsBr）组成的第二材料的薄膜涂层形成的光电阴极。

公开(公告)号：US20030001497A1

公开(公告)日：2003-01-02

申请号：US10181360

申请日：2002-07-17

Inventor： Masao Kinoshita ,  Hiroyuki Watanabe ,  Rie Nishiura

IPC: H01J043/04 ,  H01J040/06

CPC classification number: B82Y10/00 ,  H01J1/35 ,  H01J43/06 ,  H01J43/10 ,  H01J2201/30469 ,  H01J2201/32 ,  H01J2201/3426 ,  Y10S977/952

Abstract: A cathode (5) for emitting photoelectrons or secondary electrons comprises a nickel electrode substrate (5c) with an aluminum layer (5b) deposited on it; an intermediate layer (5a) consisting of carbon nanotubes formed on the aluminum layer; and an alkaline metal layer (5d) formed on the intermediate layer (5a) and composed, for example, of particles of an alkali antimony compound that either emits photoelectrons in response to incident light or emits secondary electrons in response to incident electrons. The decrease in defect density of the particles reduces the probability of recombination of electron and hole remarkably, thus increasing quantum efficiency.

Abstract translation: 用于发射光电子或二次电子的阴极（5）包括沉积有铝层（5b）的镍电极基板（5c） 由形成在所述铝层上的碳纳米管构成的中间层（5a） 以及形成在中间层（5a）上的碱金属层（5d），其由例如响应于入射光发射光电子的碱锑化合物颗粒构成，或者响应入射电子发射二次电子。 颗粒的缺陷密度的降低降低了电子和空穴的显着复合的可能性，从而提高了量子效率。

公开(公告)号：US5789861A

公开(公告)日：1998-08-04

申请号：US764242

申请日：1996-12-12

Applicant: Hiroyuki Kyushima ,  Koji Nagura ,  Yutaka Hasegawa ,  Eiichiro Kawano ,  Tomihiko Kuroyanagi ,  Akira Atsumi ,  Masuya Mizuide

Inventor： Hiroyuki Kyushima ,  Koji Nagura ,  Yutaka Hasegawa ,  Eiichiro Kawano ,  Tomihiko Kuroyanagi ,  Akira Atsumi ,  Masuya Mizuide

IPC: H01J9/12 ,  H01J9/18 ,  H01J43/04 ,  H01J43/10 ,  H01J43/12 ,  H01J43/22 ,  H01J43/18

CPC classification number: H01J43/04 ,  H01J43/10 ,  H01J43/12 ,  H01J43/22 ,  H01J9/12 ,  H01J9/18 ,  H01J2201/32 ,  H01J2201/3426

Abstract: A photomultiplier is constituted by a photocathode and an electron multiplier having a typical structure in which a dynode unit having a plurality of dynode plates stacked in an incident direction of photoelectrons, an anode plate, and an inverting dynode plate are sequentially stacked. Through holes for injecting a metal vapor are formed in the inverting dynode plate to form secondary electron emitting layers on the surfaces of dynodes supported by the dynode plates, and the photocathode. With this structure, the secondary electron emitting layers are uniformly formed on the surfaces of the dynodes. Therefore, variations in output signals obtained from anodes can be reduced regardless of the positions of the photocathode.

Abstract translation: 光电倍增管由具有典型结构的光电阴极和电子倍增器构成，其中依次堆叠具有沿光电子的入射方向堆叠的多个倍增极板的倍增电极单元，阳极板和反相倍增极板。 用于注入金属蒸汽的通孔形成在反相倍增器板中，以在由倍增极板和光电阴极支撑的倍增极的表面上形成二次电子发射层。 利用这种结构，二次电子发射层均匀地形成在倍增电极的表面上。 因此，无论光电阴极的位置如何，可以减少从阳极获得的输出信号的变化。

公开(公告)号：US5336966A

公开(公告)日：1994-08-09

申请号：US943524

申请日：1992-09-11

Applicant: Kiyoshi Nakatsugawa ,  Kazuyoshi Oguri ,  Hiroyuki Onda ,  Hiroyuki Watanabe

Inventor： Kiyoshi Nakatsugawa ,  Kazuyoshi Oguri ,  Hiroyuki Onda ,  Hiroyuki Watanabe

IPC: H01J40/06 ,  H01J1/34 ,  H01J9/12 ,  H01J29/45 ,  H01J40/16 ,  H01J43/08 ,  H01J43/18

CPC classification number: H01J43/08 ,  H01J1/34 ,  H01J2201/3426

Abstract: A high performance reflection type photocathode for use in a photomultiplier tube is formed by sequentially depositing three layers on a substrate made of nickel. The first layer is made of either one of chromium, manganese and magnesium as a major component and is deposited over the substrate. The second layer is made of aluminum as a major component and is deposited over the first layer. The third layer is made of antimony and at least one kind of alkaline metals and is deposited over the second layer.

Abstract translation: 用于光电倍增管的高性能反射型光电阴极通过在由镍构成的衬底上依次沉积三层而形成。 第一层由铬，锰和镁中的任一种作为主要成分，并沉积在基材上。 第二层由铝作为主要成分，并沉积在第一层上。 第三层由锑和至少一种碱金属制成，并沉积在第二层上。