公开(公告)号：US08288192B2

公开(公告)日：2012-10-16

申请号：US12918660

申请日：2009-04-28

Applicant: Chienliu Chang

Inventor： Chienliu Chang

IPC: H01L21/00

CPC classification number: B06B1/0292 ,  B81B2201/038 ,  B81B2203/0127 ,  B81B2203/0315 ,  B81B2203/04 ,  B81C1/00476 ,  B81C2201/0114

Abstract: In a method of manufacturing a capacitive electromechanical transducer, a first electrode (8) is formed on a substrate (4), an insulating layer (9) which has an opening (6) leading to the first electrode is formed on the first electrode (8), and a sacrificial layer is formed on the insulating layer. A membrane (3) having a second electrode (1) is formed on the sacrificial layer, and an aperture is provided as an etchant inlet in the membrane. The sacrificial layer is etched to form a cavity (10), and then the aperture serving as an etchant inlet is sealed. The etching is executed by electrolytic etching in which a current is caused to flow between the first electrode (8) and an externally placed counter electrode through the opening (6) and the aperture of the membrane.

Abstract translation: 在制造电容式机电换能器的方法中，在基板（4）上形成第一电极（8），在第一电极上形成具有通向第一电极的开口（6）的绝缘层（9） 8），并且在绝缘层上形成牺牲层。 在牺牲层上形成具有第二电极（1）的膜（3），并且在膜中设置有作为蚀刻剂入口的孔。 蚀刻牺牲层以形成空腔（10），然后密封用作蚀刻剂入口的孔。 蚀刻通过电解蚀刻进行，其中使电流通过开口（6）和膜的孔径在第一电极（8）和外部放置的对电极之间流动。

公开(公告)号：US08203254B2

公开(公告)日：2012-06-19

申请号：US13274261

申请日：2011-10-14

Applicant: Isao Takahashi

Inventor： Isao Takahashi

IPC: H01L41/08

CPC classification number: B81B3/0021 ,  B81B2201/038 ,  B81B2203/0118 ,  F03G7/005 ,  Y10S310/80

Abstract: A polymer actuator device includes an electrolyte layer, a pair of electrode layers that are provided on both surfaces of the electrolyte layer in a thickness direction of the electrolyte layer, a polymer actuator that is bent when a voltage is applied between the pair of electrode layers, and terminal parts that apply a voltage to the polymer actuator. The polymer actuator includes a deformable portion and a supported portion. A conductive porous member is interposed between a first electrode layer, which is positioned on the side of the supported portion of the polymer actuator corresponding to a negative electrode, and the terminal part.

Abstract translation: 聚合物致动器装置包括电解质层，在电解质层的厚度方向上设置在电解质层的两个表面上的一对电极层，当在一对电极层之间施加电压时弯曲的聚合物致动器 以及向聚合物致动器施加电压的端子部件。 聚合物致动器包括可变形部分和支撑部分。 导电性多孔体插入位于与负​​极对应的聚合物致动器的被支撑部分侧的第一电极层和端子部之间。

公开(公告)号：US08171804B2

公开(公告)日：2012-05-08

申请号：US11963072

申请日：2007-12-21

Applicant: Richard Lee Knipe

Inventor： Richard Lee Knipe

IPC: G01L1/22

CPC classification number: B81B5/00 ,  B81B3/0032 ,  B81B2201/038 ,  B81B2203/051 ,  B81B2203/058 ,  F16H21/16 ,  F16H21/44 ,  F16H21/50 ,  Y10T74/18056 ,  Y10T74/18568 ,  Y10T74/1892

Abstract: A motion conversion system is described. The motion conversion system comprises a first torsional member operative for rotating in a first direction. A second torsional member is offset a distance from the first torsional member, wherein the second torsional member is operative for rotating in a direction opposite from the first direction. And, a lateral member has a lower surface connected to the first and second torsional members. Wherein, translational movement of the lateral member results from rotational movement of the first and second torsional members.

Abstract translation: 描述运动转换系统。 运动转换系统包括可操作用于沿第一方向旋转的第一扭转构件。 第二扭转构件偏离与第一扭转构件的距离，其中第二扭转构件可操作用于沿与第一方向相反的方向旋转。 并且，横向构件具有连接到第一和第二扭转构件的下表面。 其中，横向构件的平移运动是由第一和第二扭转构件的旋转运动引起的。

公开(公告)号：US20110193281A1

公开(公告)日：2011-08-11

申请号：US13122776

申请日：2009-10-06

Applicant: Gloria Jean Wiens ,  Koustubh Jayaprakash Rao ,  Troy Benjamin Rippere

Inventor： Gloria Jean Wiens ,  Koustubh Jayaprakash Rao ,  Troy Benjamin Rippere

IPC: B23Q3/06

CPC classification number: B81C99/002 ,  B81B2201/038 ,  B81C2203/058

Abstract: Embodiments generally relate to fixturing devices for supporting a workpiece, the devices including modularized cantilevered and fixed beam fixing elements. Each module includes a compliant beam and an interface element in contact with the workpiece and a portion of the compliant beam for transmitting a contact force between the workpiece and the beam. Dynamic adaptability of the beam is configured by selectively varying beam stiffness by varying either beam length or beam width. Varying a width can include varying a beam width, and/or breadth. In a further embodiment, the compliant beam fixed at both ends is slidable in a longitudinal direction of the beam such that a portion of the interface element slides along the beam, thus dynamically adapting the beam stiffness according to a force applied to a workpiece.

Abstract translation: 实施例通常涉及用于支撑工件的固定装置，该装置包括模块化悬臂和固定梁固定元件。 每个模块包括柔性梁和与工件接触的接口元件和柔性梁的一部分，用于在工件和梁之间传递接触力。 通过改变光束长度或光束宽度来选择性地改变光束刚度来配置光束的动态适应性。 改变宽度可以包括改变波束宽度和/或宽度。 在另一实施例中，固定在两端的柔性梁可沿梁的纵向方向滑动，使得接口元件的一部分沿着梁滑动，从而根据施加到工件的力来动态调节梁的刚度。

公开(公告)号：US07936112B2

公开(公告)日：2011-05-03

申请号：US12372369

申请日：2009-02-17

Applicant: Jaeyoung Choi ,  Jongmin Kim ,  Sang Yoon Lee

Inventor： Jaeyoung Choi ,  Jongmin Kim ,  Sang Yoon Lee

IPC: H01L41/107

CPC classification number: H02N2/18 ,  B81B2201/038 ,  B81B2203/0376 ,  B81C1/00103 ,  B81C2201/0115

Abstract: Exemplary embodiments relate to an energy converting apparatus and a method for converting energy, which may convert energy of an applied signal into electrical energy. The energy converting apparatus may include at least one nanowire which resonates in response to the applied signal. The resonating nanowire may contact an electrode allowing a current to flow through the electrode and the nanowire by a Schottky contact between the electrode and the nanowire. The method for converting energy may include applying a signal to at least one nanowire to resonate the nanowire, and generating electrical energy through the contact between the resonating nanowire and an electrode.

Abstract translation: 示例性实施例涉及能量转换装置和用于转换能量的方法，其可以将施加的信号的能量转换成电能。 能量转换装置可以包括响应于所施加的信号而谐振的至少一个纳米线。 谐振纳米线可以接触允许电流通过电极和纳米线之间的肖特基接触流过电极和纳米线的电极。 用于转换能量的方法可以包括将信号施加到至少一个纳米线以共振纳米线，以及通过谐振纳米线和电极之间的接触产生电能。

公开(公告)号：US07843111B2

公开(公告)日：2010-11-30

申请号：US12400231

申请日：2009-03-09

Applicant: Mohamed Yahia Benslimane ,  Peter Gravesen

Inventor： Mohamed Yahia Benslimane ,  Peter Gravesen

IPC: H01L41/08

CPC classification number: H02N1/006 ,  B81B3/007 ,  B81B2201/038 ,  H01L41/0471 ,  H01L41/083 ,  H01L41/0836 ,  H01L41/0986 ,  H01L41/27 ,  H01L41/333 ,  H01L41/45 ,  H04R23/00 ,  Y10S310/80 ,  Y10T428/24612

Abstract: A composite for a transducer facilitates an increased actuation force as compared to similar prior art composites for transducers. In accordance with the present invention, the composite also facilitates increased compliance of the transducer in one direction and an improved reaction time as compared to similar prior art composites for transducers, as well as provides an increased lifetime of the transducer in which it is applied.

Abstract translation: 与用于换能器的类似的现有技术复合材料相比，用于换能器的复合材料促进了增加的致动力。 根据本发明，与用于换能器的类似的现有技术复合材料相比，复合材料还有助于提高换能器在一个方向上的顺应性和改进的反应时间，并且提供其应用传感器的寿命增加。

公开(公告)号：US07808163B2

公开(公告)日：2010-10-05

申请号：US12476780

申请日：2009-06-02

Applicant: Mohamed Yahia Benslimane ,  Peter Gravesen

Inventor： Mohamed Yahia Benslimane ,  Peter Gravesen

IPC: H01L41/047

CPC classification number: F04B43/043 ,  B81B3/007 ,  B81B2201/038 ,  H01L41/0471 ,  H01L41/083 ,  H01L41/0836 ,  H01L41/0986 ,  H01L41/27 ,  H01L41/297 ,  H01L41/45 ,  H02N1/002 ,  H02N1/006 ,  H04R23/00 ,  Y10T428/24521

Abstract: A multilayer composite includes at least two composites, each composite having a film and an electronically conductive layer. Several composites are laminated to provide an increased conversion between mechanical and electrical energies not only due to the multiplication of the effect of each layer, but also due to the fact that the multilayer structure itself renders the multilayer composite more rigid. In addition, the multilayer structure facilitates application of an electrical field over thinner portions of the structure, thereby requiring much less potential difference between electrodes.

Abstract translation: 多层复合材料包括至少两种复合材料，每种复合材料具有膜和电子导电层。 层压几种复合材料以提供机械和电能之间的增加的转换，这不仅是由于每层效应的增加，而且由于多层结构本身使多层复合材料更加刚性的事实。 此外，多层结构有助于在较薄的结构部分上施加电场，从而在电极之间需要更少的电位差。

公开(公告)号：US20100221497A1

公开(公告)日：2010-09-02

申请号：US12395510

申请日：2009-02-27

Applicant: Regan Nayve ,  Darren T. Imai ,  Alex F. Fong

Inventor： Regan Nayve ,  Darren T. Imai ,  Alex F. Fong

IPC: B32B27/38 ,  B05D3/00 ,  B32B3/10 ,  B32B7/00

CPC classification number: B81B2201/038 ,  B81B2207/115

Abstract: A fluid impermeable protective layer is described for a structure that has a 3-dimensional profile. The 3-dimensional profile can include actuators. The protective layer is applied so that there are no breaches in the protective layer and so that the protective layer is not too thick to prevent the actuators from being able to properly function.

Abstract translation: 对于具有3维轮廓的结构，描述了不透液体的保护层。 三维轮廓可以包括致动器。 施加保护层使得保护层中不存在破裂并且保护层不太厚以防止致动器能够正常地起作用。

公开(公告)号：US20090066186A1

公开(公告)日：2009-03-12

申请号：US11902226

申请日：2007-09-20

Applicant: Alex Horng ,  I-Yu Huang

Inventor： Alex Horng ,  I-Yu Huang

IPC: H02N1/00

CPC classification number: B81B3/0086 ,  B81B2201/038

Abstract: The present invention relates to a non-contact actuator located on a substrate and at least including a plate and a bushing. When a voltage is applied externally, the plate is bent by the attraction of the substrate and won't be contacted with the substrate. A counteraction force is generated when the plate withstands the electrostatic force of the substrate. After the voltage is removed, the counteraction force and an elastic tension generated by recovering from a curved state of the plate to an original state are employed to generate bouncing motion of the plate and the bushing and further proceed step movement of the actuator. Because of no friction between the plate and the substrate, the present invention only requires a rather small voltage and consumes the minimum current so as to lower the driving voltage and reduce the current consumption and defacement of device for longer lifespan.

Abstract translation: 本发明涉及位于基板上并且至少包括板和衬套的非接触致动器。 当外部施加电压时，板被基板的吸引而弯曲，并且不会与基板接触。 当板承受基板的静电力时产生反作用力。 在去除电压之后，采用反作用力和通过从板的弯曲状态恢复到原始状态产生的弹性张力来产生板和衬套的弹跳运动，并进一步进行致动器的步进运动。 由于板和基板之间没有摩擦，本发明仅需要相当小的电压并消耗最小电流，以便降低驱动电压并且减少器件的电流消耗和污损，从而延长使用寿命。

公开(公告)号：US20090046414A1

公开(公告)日：2009-02-19

申请号：US12187316

申请日：2008-08-06

Applicant: Oliver G. Schmidt

Inventor： Oliver G. Schmidt

IPC: H01G9/025 ,  B05D5/12 ,  B32B38/00

CPC classification number: H01G4/32 ,  B81B2201/038 ,  B81C1/0019 ,  H01G4/30 ,  Y10T29/435 ,  Y10T29/49002 ,  Y10T29/49128 ,  Y10T29/49155 ,  Y10T156/1044

Abstract: The method comprises fabricating a layer stack on a substrate, the layer stack comprising at least two electrically conducting layers and at least one electrically insulating layer arranged between the two electrically conducting layers, and displacing a first portion of the layer stack away from its original position, the first portion comprising an edge portion of the layer stack, and bending the first portion back towards a second portion of the layer stack. The bending may comprise a rolling-up of the first portion of the layer stack.

Abstract translation: 该方法包括在衬底上制造层堆叠，该层叠层包括至少两个导电层和布置在两个导电层之间的至少一个电绝缘层，并且使叠层的第一部分远离其原始位置 ，所述第一部分包括所述层堆叠的边缘部分，并且将所述第一部分向所述层堆叠的第二部分弯曲。 弯曲可以包括层叠体的第一部分的卷起。