公开(公告)号：US20020158480A1

公开(公告)日：2002-10-31

申请号：US10009471

申请日：2001-11-07

Inventor： Yoshikazu Nakayama ,  Seiji Akita ,  Akio Harada ,  Takashi Okawa

IPC: B25J015/12

CPC classification number: B25J7/00 ,  B81B2201/032 ,  B81B2201/12 ,  B81B2203/0118 ,  B81C99/002 ,  B82B3/00 ,  G01Q80/00 ,  Y10S977/732 ,  Y10S977/734 ,  Y10S977/742 ,  Y10S977/778 ,  Y10S977/78 ,  Y10S977/837 ,  Y10S977/842 ,  Y10S977/858 ,  Y10S977/863 ,  Y10S977/875 ,  Y10S977/876 ,  Y10S977/89 ,  Y10S977/901 ,  Y10S977/962

Abstract: To provide nanotweezers and a nanomanipulator which allow great miniaturization of the component and are capable of gripping various types of nano-substances such as insulators, semiconductors and conductors and of gripping nano-substances of various shapes. Electrostatic nanotweezers 2 are characterized in that the nanotweezers 2 are comprised of a plurality of nanotubes whose base end portions are fastened to a holder 6 so that the nanotubes protrude from the holder 6, coating films which insulate and cover the surfaces of the nanotubes, and lead wires 10, 10 which are connected to two of the nanotubes 8, 9; and the tip ends of the two nanotubes are freely opened and closed by means of an electrostatic attractive force generated by applying a voltage across these lead wires. Furthermore, by way of forming a piezo-electric film 32 on the surface of the nanotube 9, and the tip ends of the nanotubes are freely opened and closed by expanding and contracting the piezo-electric film, thus allowing any desired nano-substances to be handled regardless of whether the nano-substances are insulators, semiconductors or conductors. Furthermore, if by way of designing three nanotubes so as to be freely opened and closed by an electrostatic system, nano-substances of various shapes such as spherical, rod-form, etc. can be handled. Moreover, a nanomanipulator that is constructed by combining the nanotweezers with a three-dimensional driving mechanism facilitates the gripping, moving and releasing of nano-substances.

Abstract translation: 提供纳米管和纳米管操纵器，其允许部件的极小化，并且能够夹持各种类型的纳米物质，例如绝缘体，半导体和导体，并且夹持各种形状的纳米物质。 静电纳米针筒2的特征在于，纳米针筒2由多个纳米管组成，其基端部固定在保持器6上，使得纳米管从支架6突出，绝缘并覆盖纳米管表面的涂膜，以及 引线10,10连接到两个纳米管8,9; 并且通过在这些引线上施加电压而产生的静电吸引力自由地打开和闭合两个纳米管的末端。 此外，通过在纳米管9的表面上形成压电膜32，通过使压电膜膨胀收缩来使纳米管的前端自由地开闭，从而使任何所需的纳米物质 无论纳米物质是绝缘体，半导体还是导体，都要进行处理。 此外，如果通过设计三个纳米管以通过静电系统自由地打开和关闭，则可以处理诸如球形，棒状等各种形状的纳米物质。 此外，通过将纳米技术人员与三维驱动机构组合而构成的纳米机械手有利于纳米物质的夹持，移动和释放。

公开(公告)号：US06236491B1

公开(公告)日：2001-05-22

申请号：US09320891

申请日：1999-05-27

Applicant: Scott Halden Goodwin-Johansson

Inventor： Scott Halden Goodwin-Johansson

IPC: G02B2600

CPC classification number: B81C1/00666 ,  B81B2201/032 ,  B81B2203/0118 ,  B81C2201/0167 ,  G02B6/353 ,  G02B6/3566 ,  G02B6/357 ,  G02B6/3594 ,  H01H59/0009 ,  H01H2059/0081

Abstract: A MEMS (Micro Electro Mechanical System) electrostatic device operated with lower and more predictable operating voltages is provided. An electrostatic actuator, an electrostatic attenuator of electromagnetic radiation, and a method for attenuating electromagnetic radiation are provided. Improved operating voltage characteristics are achieved by defining a non increasing air gap between the substrate electrode and flexible composite electrode within the electrostatic device. A medial portion of a multilayer flexible composite overlying the electromechanical substrate is held in position regardless of the application of electrostatic force, thereby sustaining the defined air gap. The air gap is relatively constant in separation from the underlying microelectronic surface when the medial portion is cantilevered in one embodiment. A further embodiment provides an air gap that decreases to zero when the medial portion approaches and contacts the underlying microelectronic surface. A moveable distal portion of the flexible composite is biased to curl naturally due to differences in thermal coefficients of expansion between the component layers. In response to electrostatic forces, the distal portion moves and thereby alters the distance separating the flexible composite from the underlying microelectronic surface. Structures and techniques for controlling bias in the medial portion and the resulting air gap are provided. The electrostatic device may be disposed to selectively clear or intercept the path of electromagnetic radiation. Materials used in the attenuator can be selected to pass, reflect, or absorb various types of electromagnetic radiation. A plurality of electromagnetic attenuators may be disposed in an array and selectively activated in subsets.

Abstract translation: 提供了具有更低和更可预测的工作电压的MEMS（微机电系统）静电装置。 提供静电致动器，电磁辐射的静电衰减器和用于衰减电磁辐射的方法。 通过在静电装置内限定衬底电极和柔性复合电极之间的不增加的空气间隙来实现改进的工作电压特性。 覆盖机电衬底的多层柔性复合体的中间部分保持在适当的位置，而与施加静电力无关，从而维持限定的气隙。 在一个实施例中，当中间部分为悬臂时，气隙与下面的微电子表面分离时相对恒定。 另一实施例提供了当中间部分靠近并接触下面的微电子表面时减小到零的气隙。 由于组件层之间的热膨胀系数的差异，柔性复合材料的可移动远端部分被偏压以自然地卷曲。 响应于静电力，远端部分移动，从而改变将柔性复合材料与下面的微电子表面分开的距离。 提供了用于控制中间部分中的偏压和产生的气隙的结构和技术。 静电装置可以设置成选择性地清除或拦截电磁辐射的路径。 衰减器中使用的材料可以选择通过，反射或吸收各种类型的电磁辐射。 多个电磁衰减器可以被布置成阵列并且选择性地在子集中激活。

公开(公告)号：US5962949A

公开(公告)日：1999-10-05

申请号：US965277

申请日：1997-11-06

Applicant: Vijayakumar R. Dhuler ,  Robert L. Wood

Inventor： Vijayakumar R. Dhuler ,  Robert L. Wood

IPC: G01B21/00 ,  B25J7/00 ,  B81B3/00 ,  B81B7/02 ,  F03G7/06 ,  G01B7/004 ,  G01B7/34 ,  G01N27/00 ,  G02B6/38 ,  G02B6/42 ,  H01H1/00 ,  H01H9/14 ,  H01H61/00 ,  H01H37/32 ,  H01L37/00

CPC classification number: F03G7/06 ,  B81B3/0024 ,  B81B2201/032 ,  B81B2201/054 ,  B81B2203/0109 ,  B81B2203/051 ,  G02B6/3803 ,  G02B6/4226 ,  H01H1/0036 ,  H01H2001/0042 ,  H01H2001/0068 ,  H01H2061/006 ,  H01H61/00 ,  H01H9/14

Abstract: A microelectromechanical (MEMS) positioning apparatus is provided that can precisely microposition an object in each of the X, Y and Z directions. The MEMS positioning apparatus includes a reference surface, a support disposed in a fixed position to the reference surface, and a stage defining an XY plane that is suspended adjacent to the support and over at least a portion of the reference surface. The MEMS positioning apparatus also includes at least one and, more typically, several actuators for precisely positioning the stage and, in turn, objects carried by the stage. For example, the MEMS positioning apparatus can include first and second MEMS actuators for moving the stage in the XY plane upon actuation. In addition, the MEMS positioning apparatus can include a Z actuator, such as a thermal bimorph structure, for moving the stage in the Z direction. As such, the MEMS positioning apparatus can precisely position the stage as well as any objects carried by the stage in each of the X, Y and Z directions. As a result of the construction of the MEMS positioning apparatus, the MEMS positioning apparatus can also be fabricated in an affordable, reliable and reproducible manner without compromising the precision alignment provided by the MEMS positioning apparatus.

Abstract translation: 提供了一种微机电（MEMS）定位装置，其能够精确地将对象在X，Y和Z方向中的每一个定位。 MEMS定位设备包括参考表面，设置在参考表面的固定位置的支撑件以及限定垂直于支撑件悬挂并在参考表面的至少一部分上方的XY平面的平台。 MEMS定位装置还包括至少一个并且更典型的几个致动器，用于精确地定位平台，并且依次由舞台承载的物体。 例如，MEMS定位装置可以包括用于在致动时在XY平面中移动台的第一和第二MEMS致动器。 此外，MEMS定位装置可以包括用于在Z方向上移动台的Z致动器，例如热双压电晶片结构。 因此，MEMS定位装置可以精确地定位舞台以及在X，Y和Z方向中的每一个中由舞台承载的任何物体。 作为MEMS定位装置的结构的结果，MEMS定位装置也可以以可承受的，可靠的和可再生的方式制造，而不会损害由MEMS定位装置提供的精确对准。