Abstract:
There is provided a micromachined sensor for measuring a vibration, based on silicone micromachining technology, in which a conductor having elasticity is connected to masses moving due to a force generated by the vibration and the vibration is measured by using induced electromotive force generated due to the conductor moving in a magnetic field.
Abstract:
The present invention relates to a micro-electromechanical actuator. An electromagnetic-type micro-electromechanical actuator of the present invention has a conductive beam formed in a micro electronic substrate on an upper side of a magnetic substance, so that the conductive beam can be moved toward an in-plane mode in parallel to the micro electronic substrate depending on a direction that current flows. Therefore, the micro-electromechanical actuator can be applied to most of electromagnetic micro-electromechanical systems that require an in-plane mode.
Abstract:
An optical interconnection structure between an optoelectric device and a single mode optical fiber for enlarging an alignment tolerance is provided. The optical interconnection structure is constituted by a microlensed optoelectric device and a graded index fiber ended single mode optical fiber. Light beams emitted from the optoelectric device are collimated by the microlens on the rear surface of a substrate or are enlarged in size by being focused or diverged. The extended output light travels a predetermined distance and then reaches the graded index fiber ended single mode optical fiber. When the length of the graded index optical fiber lens is appropriate, the incident extended beams are again focused by the lens, and thus enter into the single mode optical fiber while maintaining a great coupling efficiency. The optoelectric device and the microlens are integrated by the photolithography process, such that alignment with respect to all elements within a substrate is accomplished. Thus, there is no need to make optical alignment for each single element, resulting in the possibility of mass production. Since the graded index optical fiber lens and the single mode optical fiber have the same diameter and the same circular shape, so that they are easily aligned automatically and mechanically stable.
Abstract:
A micro semiconductor-type pressure sensor and a manufacturing method thereof are provided. The micro semi-conductor-type pressure sensor is implemented by etching a cavity-formation region of a substrate to form a plurality of trenches, oxidizing the plurality of trenches through a thermal oxidation process to form a cavity-formation oxide layer, forming a membrane-formation material layer on upper portions of the cavity-formation oxide layer and the substrate, forming a plurality of etching holes in the membrane-formation material layer, removing the cavity-formation oxide layer through the plurality of etching holes to form a cavity buried in the substrate, forming a membrane reinforcing layer on an upper portion of the membrane-formation material layer to form a membrane for closing the cavity, and forming sensitive films made of a piezoresisive material on an upper portion of the membrane.
Abstract:
Provided is a wireless power transmission device. The wireless power transmission device includes a power coil in which a high frequency current is applied, a transmission coil in which the high frequency current is induced by magnetic induction, the transmission coil configured to generate an non-radiative electromagnetic wave when the transmission coil has the same resonant frequency as an at least one external target device, and a resonant frequency regulator configured to regulate the resonant frequency of the transmission coil. The wireless power transmission device can transmit the power when it has the same resonant frequency as the target device. Therefore, the overheating due to an eddy current may not occur, and the design may be easily varied.
Abstract:
A conventional capacitive accelerometer has a limitation in reducing a distance between a sensing electrode and a reference electrode, and requires a complex process and a separate method of correcting a clearance difference caused by a process error. However, the capacitive accelerometer of the present invention has high sensitivity, can be simply manufactured by maintaining a very narrow distance between a reference electrode and a sensing electrode, and can make it unnecessary to individually correct each manufactured accelerometer by removing or drastically reducing a functional difference due to a process error.
Abstract:
An active type tunable wavelength optical filter having a Fabry-Perot structure is disclosed. A tunable wavelength optical filter which comprises a lower mirror in which silicon films and oxide films are sequentially laminated in a multi-layer and the silicon film is laminated on the highest portion; an upper mirror in which silicon films and oxide films are sequentially laminated in a multi-layer and the silicon film is laminated on the highest portion and which is spaced away from the lower mirror by a predetermined distance; a connecting means for connecting and supporting the lower mirror and the upper mirror to a semiconductor substrate; and electrode pads for controlling the gap between the lower mirror and the upper mirror by an electrostatic force and the method of manufacturing the same are provided. Thereby, by finely driving the upper and lower mirrors composed of a multi-layer structure of the silicon film and the oxide film by the electrostatic force, the wavelength of the transmitted light with respect to the incident light can be selectively sent.
Abstract:
A power transmitter includes a signal processor that externally obtains a reception power state signal depending on variation of a distance between transmission and reception coil units, a modulation controller configured to a modulation frequency for selecting a frequency band having maximum power transmission performance, based on the reception power state signal, a power signal generator that generates a power signal, and a modulator that modulates the power signal in response to the modulation frequency, the reception coil unit being configured to transmit the modulated signal. A power receiver includes a reception coil unit that receives a power signal, a power generator that generates power by receiving the power signal from the reception coil unit, and a signal generator that generates a reception power state signal depending on the generated power level and transmits the latter signal to a transmission coil unit corresponding to the reception coil unit.
Abstract:
An apparatus for preventing stiction of a three-dimensional MEMS (microelectromechanical system) microstructure, the apparatus including: a substrate; and a plurality of micro projections formed on a top surface of the substrate with a predetermined height in such a way that a cleaning solution flowing out from the microstructure disposed thereabove is discharged.
Abstract:
A chemical sensor using metal nano-particles and a method for manufacturing a chemical sensor using metal nano-particles are provided. The chemical sensor includes: metal nano-particles; single-ligand organic molecules (or a single molecule) that binds to the metal nano-particles by using a metal bonding functional group; a substrate bonding functional group formed at the metal nano-particles and the single-ligand organic molecules as bound to each other; a substrate; electrodes formed on the substrate and having an interdigitate (IDT) structure; and a substrate functional group formed on the substrate and positioned between the electrodes, wherein the substrate bonding functional group and the substrate functional group are covalently bonded.