Optical interconnection structure for enlarging alignment tolerance
    23.
    发明授权
    Optical interconnection structure for enlarging alignment tolerance 失效
    用于扩大对准公差的光互连结构

    公开(公告)号:US06253004B1

    公开(公告)日:2001-06-26

    申请号:US09350149

    申请日:1999-07-09

    CPC classification number: G02B6/4206 G02B6/425

    Abstract: An optical interconnection structure between an optoelectric device and a single mode optical fiber for enlarging an alignment tolerance is provided. The optical interconnection structure is constituted by a microlensed optoelectric device and a graded index fiber ended single mode optical fiber. Light beams emitted from the optoelectric device are collimated by the microlens on the rear surface of a substrate or are enlarged in size by being focused or diverged. The extended output light travels a predetermined distance and then reaches the graded index fiber ended single mode optical fiber. When the length of the graded index optical fiber lens is appropriate, the incident extended beams are again focused by the lens, and thus enter into the single mode optical fiber while maintaining a great coupling efficiency. The optoelectric device and the microlens are integrated by the photolithography process, such that alignment with respect to all elements within a substrate is accomplished. Thus, there is no need to make optical alignment for each single element, resulting in the possibility of mass production. Since the graded index optical fiber lens and the single mode optical fiber have the same diameter and the same circular shape, so that they are easily aligned automatically and mechanically stable.

    Abstract translation: 提供了用于扩大对准公差的光电器件和单模光纤之间的光互连结构。 光互连结构由微型光电器件和渐变折射率光纤端接单模光纤构成。 从光电装置发射的光束被基板背面的微透镜准直,或者被聚焦或发散的尺寸增大。 扩展输出光行进预定距离,然后到达渐变折射率光纤端单模光纤。 当渐变折射率光纤透镜的长度适当时,入射的延伸光束再次被透镜聚焦,从而进入单模光纤同时保持很好的耦合效率。 通过光刻工艺将光电器件和微透镜集成,使得相对于衬底内的所有元件的对准被实现。 因此,不需要对每个单个元件进行光学对准,导致批量生产的可能性。 由于分级折射率光纤透镜和单模光纤具有相同的直径和相同的圆形形状,使得它们易于自动且机械稳定地对准。

    Micro piezoresistive pressure sensor and manufacturing method thereof
    24.
    发明授权
    Micro piezoresistive pressure sensor and manufacturing method thereof 有权
    微压阻式压力传感器及其制造方法

    公开(公告)号:US08261617B2

    公开(公告)日:2012-09-11

    申请号:US12745745

    申请日:2008-04-21

    CPC classification number: G01L9/0042 Y10T29/42 Y10T29/49

    Abstract: A micro semiconductor-type pressure sensor and a manufacturing method thereof are provided. The micro semi-conductor-type pressure sensor is implemented by etching a cavity-formation region of a substrate to form a plurality of trenches, oxidizing the plurality of trenches through a thermal oxidation process to form a cavity-formation oxide layer, forming a membrane-formation material layer on upper portions of the cavity-formation oxide layer and the substrate, forming a plurality of etching holes in the membrane-formation material layer, removing the cavity-formation oxide layer through the plurality of etching holes to form a cavity buried in the substrate, forming a membrane reinforcing layer on an upper portion of the membrane-formation material layer to form a membrane for closing the cavity, and forming sensitive films made of a piezoresisive material on an upper portion of the membrane.

    Abstract translation: 提供一种微型半导体型压力传感器及其制造方法。 微型半导体型压力传感器通过蚀刻衬底的空腔形成区域以形成多个沟槽来实现,通过热氧化工艺氧化多个沟槽以形成空腔形成氧化物层,形成膜 在形成空腔的氧化物层和衬底的上部上形成一层形成材料层,在膜形成材料层中形成多个蚀刻孔,通过多个蚀刻孔去除腔形成氧化物层,以形成埋入腔 在所述基板中,在所述膜形成材料层的上部形成膜增强层,以形成用于封闭所述空腔的膜,并且在所述膜的上部形成由压阻材料制成的敏感膜。

    Electric device, wireless power transmission device, and power transmission method thereof
    25.
    发明授权
    Electric device, wireless power transmission device, and power transmission method thereof 失效
    电气设备,无线电力传输装置及其电力传输方法

    公开(公告)号:US08110949B2

    公开(公告)日:2012-02-07

    申请号:US12581923

    申请日:2009-10-20

    CPC classification number: H02J50/12 H02J5/005 H02J7/025 H02J50/40

    Abstract: Provided is a wireless power transmission device. The wireless power transmission device includes a power coil in which a high frequency current is applied, a transmission coil in which the high frequency current is induced by magnetic induction, the transmission coil configured to generate an non-radiative electromagnetic wave when the transmission coil has the same resonant frequency as an at least one external target device, and a resonant frequency regulator configured to regulate the resonant frequency of the transmission coil. The wireless power transmission device can transmit the power when it has the same resonant frequency as the target device. Therefore, the overheating due to an eddy current may not occur, and the design may be easily varied.

    Abstract translation: 提供了一种无线电力传输装置。 无线电力传输装置包括其中施加高频电流的电力线圈,由磁感应感应高频电流的发送线圈,所述发送线圈被配置为当发送线圈具有非辐射电磁波时产生非辐射电磁波 与至少一个外部目标装置相同的谐振频率,以及被配置为调节传输线圈的谐振频率的谐振频率调节器。 当无线电力传输装置具有与目标装置相同的谐振频率时,可以发送电力。 因此,由于涡流引起的过热可能不会发生,并且设计可能容易变化。

    CAPACITIVE ACCELEROMETER
    26.
    发明申请
    CAPACITIVE ACCELEROMETER 有权
    电容式加速度计

    公开(公告)号:US20100050771A1

    公开(公告)日:2010-03-04

    申请号:US12517068

    申请日:2007-12-05

    CPC classification number: G01P15/125 G01P15/0802

    Abstract: A conventional capacitive accelerometer has a limitation in reducing a distance between a sensing electrode and a reference electrode, and requires a complex process and a separate method of correcting a clearance difference caused by a process error. However, the capacitive accelerometer of the present invention has high sensitivity, can be simply manufactured by maintaining a very narrow distance between a reference electrode and a sensing electrode, and can make it unnecessary to individually correct each manufactured accelerometer by removing or drastically reducing a functional difference due to a process error.

    Abstract translation: 常规的电容加速度计在减小感测电极和参考电极之间的距离方面具有局限性,并且需要一种复杂的过程和用于校正由过程误差引起的间隙差异的单独方法。 然而,本发明的电容加速度计具有高的灵敏度,可以通过在参考电极和感测电极之间保持非常窄的距离来简单地制造,并且可以使得不需要通过去除或大幅度地减少功能性来单独校正每个制造的加速度计 差异由于过程错误。

    Tunable-wavelength optical filter and method of manufacturing the same
    27.
    发明授权
    Tunable-wavelength optical filter and method of manufacturing the same 有权
    可调谐波长光学滤波器及其制造方法

    公开(公告)号:US07012752B2

    公开(公告)日:2006-03-14

    申请号:US11045554

    申请日:2005-01-27

    Abstract: An active type tunable wavelength optical filter having a Fabry-Perot structure is disclosed. A tunable wavelength optical filter which comprises a lower mirror in which silicon films and oxide films are sequentially laminated in a multi-layer and the silicon film is laminated on the highest portion; an upper mirror in which silicon films and oxide films are sequentially laminated in a multi-layer and the silicon film is laminated on the highest portion and which is spaced away from the lower mirror by a predetermined distance; a connecting means for connecting and supporting the lower mirror and the upper mirror to a semiconductor substrate; and electrode pads for controlling the gap between the lower mirror and the upper mirror by an electrostatic force and the method of manufacturing the same are provided. Thereby, by finely driving the upper and lower mirrors composed of a multi-layer structure of the silicon film and the oxide film by the electrostatic force, the wavelength of the transmitted light with respect to the incident light can be selectively sent.

    Abstract translation: 公开了一种具有法布里 - 珀罗结构的有源型可调谐波长滤光器。 一种可调波长滤光器,包括下反射镜,其中硅膜和氧化物膜顺次层叠在多层中,并且硅膜层压在最高部分上; 其中硅膜和氧化物膜顺次层叠在多层中并且硅膜层压在最高部分上并且与下反射镜间隔预定距离的上反射镜; 用于将下反射镜和上反射镜连接和支撑到半导体基板的连接装置; 以及用于通过静电力控制下反射镜和上反射镜之间的间隙的电极焊盘及其制造方法。 由此,通过利用静电力微细地驱动由硅膜和氧化膜构成的上反射镜和下反射镜,可以选择性地发送透射光相对于入射光的波长。

    Power transmission apparatus and power reception apparatus
    28.
    发明授权
    Power transmission apparatus and power reception apparatus 有权
    电力传输装置和电力接收装置

    公开(公告)号:US09006936B2

    公开(公告)日:2015-04-14

    申请号:US13491112

    申请日:2012-06-07

    CPC classification number: H02J50/80 H02J5/005 H02J50/12

    Abstract: A power transmitter includes a signal processor that externally obtains a reception power state signal depending on variation of a distance between transmission and reception coil units, a modulation controller configured to a modulation frequency for selecting a frequency band having maximum power transmission performance, based on the reception power state signal, a power signal generator that generates a power signal, and a modulator that modulates the power signal in response to the modulation frequency, the reception coil unit being configured to transmit the modulated signal. A power receiver includes a reception coil unit that receives a power signal, a power generator that generates power by receiving the power signal from the reception coil unit, and a signal generator that generates a reception power state signal depending on the generated power level and transmits the latter signal to a transmission coil unit corresponding to the reception coil unit.

    Abstract translation: 电力发送器包括:信号处理器,其根据发送和接收线圈单元之间的距离的变化外部获取接收功率状态信号;调制控制器,被配置为用于选择具有最大功率传输性能的频带的调制频率,基于 接收功率状态信号,产生电力信号的电力信号发生器和响应于调制频率调制功率信号的调制器,接收线圈单元被配置为发送调制信号。 电力接收机包括接收电力信号的接收线圈单元,通过接收来自接收线圈单元的电力信号而发电的发电机,以及根据发电功率电平生成接收功率状态信号的信号发生器, 后者发送到对应于接收线圈单元的发送线圈单元。

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