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    RESONATOR DEVICE INCLUDING ELECTRODES WITH BURIED TEMPERATURE COMPENSATING LAYERS
    22.
    发明申请
    RESONATOR DEVICE INCLUDING ELECTRODES WITH BURIED TEMPERATURE COMPENSATING LAYERS 有权
    谐振器装置，包括带有温度补偿层的电极

    公开(公告)号：US20130049545A1

    公开(公告)日：2013-02-28

    申请号：US13601384

    申请日：2012-08-31

    Applicant: Qiang ZOU ,  Zhiqiang BI ,  Kristina LAMERS ,  Richard C. RUBY

    Inventor： Qiang ZOU ,  Zhiqiang BI ,  Kristina LAMERS ,  Richard C. RUBY

    IPC: H03H9/17

    CPC classification number: H03H3/04 ,  H03H9/02102 ,  H03H9/131 ,  H03H9/173 ,  H03H9/175

    Abstract: An acoustic resonator includes a substrate and a first composite electrode disposed over the substrate. The first composite electrode includes first and second electrically conductive layers and a first temperature compensating layer disposed between the first and second electrically conductive layers. The second electrically conductive layer forms a first electrical contact with the first electrically conductive layer on at least one side of the first temperature compensating layer, and the first electrical contact electrically shorts a first capacitive component of the first temperature compensating layer.

    Abstract translation: 声谐振器包括衬底和设置在衬底上的第一复合电极。 第一复合电极包括第一和第二导电层和设置在第一和第二导电层之间的第一温度补偿层。 所述第二导电层在所述第一温度补偿层的至少一侧与所述第一导电层形成第一电接触，并且所述第一电接触使所述第一温度补偿层的第一电容分量电短路。

    ACOUSTICALLY COUPLED RESONATORS AND METHOD OF MAKING THE SAME
    24.
    发明申请
    ACOUSTICALLY COUPLED RESONATORS AND METHOD OF MAKING THE SAME 审中-公开
    有声联系的共振器及其制造方法

    公开(公告)号：US20090096547A1

    公开(公告)日：2009-04-16

    申请号：US12207304

    申请日：2008-09-09

    Applicant: KUN WANG ,  PAUL D. BRADLEY ,  RICHARD C. RUBY

    Inventor： KUN WANG ,  PAUL D. BRADLEY ,  RICHARD C. RUBY

    IPC: H03H9/02

    CPC classification number: H03H9/587 ,  H03H3/02 ,  H03H7/1708 ,  H03H9/0095 ,  H03H9/0571 ,  H03H9/583 ,  H03H9/584 ,  H03H9/706 ,  H03H2003/0428 ,  Y10T29/49002

    Abstract: An apparatus includes a substrate with a cavity and a two-stage resonator filter fabricated over the cavity. The two-stage resonator filter includes a first stage and a second stage. The first stage includes a first resonator and a second resonator, the second resonator acoustically coupled to the first resonator. The second stage includes a third resonator and a fourth resonator, the fourth resonator acoustically coupled to the third resonator. The second resonator and the third resonators are electrically coupled. A decoupling layer couples the first resonator and the second resonator. The decoupling layer extends between the third resonator and the fourth resonator. The first resonator and the fourth resonator are above the substrate. The decoupling layer is above the first resonator and the fourth resonator. The second resonator and the third resonators are above the decoupling layer.

    Abstract translation: 一种装置包括具有空腔的衬底和在空腔上制造的两级谐振器滤波器。 两级谐振滤波器包括第一级和第二级。 第一级包括第一谐振器和第二谐振器，第二谐振器声耦合到第一谐振器。 第二级包括第三谐振器和第四谐振器，第四谐振器声耦合到第三谐振器。 第二谐振器和第三谐振器电耦合。 去耦层耦合第一谐振器和第二谐振器。 解耦层在第三谐振器和第四谐振器之间延伸。 第一谐振器和第四谐振器在衬底之上。 去耦层位于第一谐振器和第四谐振器之上。 第二谐振器和第三谐振器在去耦层之上。

    Cavity spanning bottom electrode of a substrate-mounted bulk wave acoustic resonator
    29.
    发明授权
    Cavity spanning bottom electrode of a substrate-mounted bulk wave acoustic resonator 有权
    衬底安装的体声波谐振器的腔体跨越底部电极

    公开(公告)号：US06384697B1

    公开(公告)日：2002-05-07

    申请号：US09566868

    申请日：2000-05-08

    Applicant: Richard C. Ruby

    Inventor： Richard C. Ruby

    IPC: H03H900

    CPC classification number: H03H9/587 ,  H03H3/02 ,  H03H3/04 ,  H03H9/173 ,  H03H9/585

    Abstract: A filter formed of acoustic resonators, where each resonator has its own cavity and a bottom electrode that spans the entirety of the cavity, so that the bottom electrode has an unsupported interior region surrounded by supported peripheral regions. In the preferred embodiment, the cavity is formed by etching a depression into the substrate, filling the depression with a sacrificial material, depositing the piezoelectric and electrode layers that define an FBAR or SBAR, and then removing the sacrificial material from the depression. Also in the preferred embodiment, the sacrificial material is removed via release holes that are limited to the periphery of the depression. Preferably, the bottom electrode is the only electrode that spans the cavity, thereby limiting the formation of parasitic FBARs or SBARs. In one embodiment, the bottom electrode includes a serpentine edge that leaves a portion of one side of the cavity free of overlap by the bottom electrode, so that a top electrode may overlap this portion. Thus, the top and bottom electrodes can overlap the same side without sandwiching the piezoelectric layer outside of the unsupported interior region.

    Abstract translation: 由声谐振器形成的滤波器，其中每个谐振器具有其自身的空腔和跨越整个空腔的底部电极，使得底部电极具有被支撑的周边区域包围的无支撑的内部区域。 在优选实施例中，通过将凹陷蚀刻到基板中，用牺牲材料填充凹陷，沉积限定FBAR或SBAR的压电层和电极层，然后从凹陷中去除牺牲材料来形成空腔。 同样在优选实施例中，通过限制在凹陷周边的释放孔去除牺牲材料。 优选地，底部电极是跨越空腔的唯一电极，从而限制寄生FBAR或SBAR的形成。 在一个实施例中，底部电极包括使空腔的一侧的一部分离开由底部电极重叠的蛇形边缘，使得顶部电极可能与该部分重叠。 因此，顶部和底部电极可以重叠在同一侧，而不将压电层夹在未支撑的内部区域之外。

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