MEMS DEVICE
    23.
    发明申请
    MEMS DEVICE 审中-公开
    MEMS器件

    公开(公告)号:US20110215672A1

    公开(公告)日:2011-09-08

    申请号:US13109371

    申请日:2011-05-17

    CPC classification number: B81B3/0072

    Abstract: A MEMS device includes: a semiconductor substrate; a vibrating film formed on the semiconductor substrate with a restraining portion interposed between the vibrating film and the semiconductor substrate, and including a lower electrode, and a fixed film formed on the semiconductor substrate with a support portion interposed between the fixed film and the semiconductor substrate to cover the vibrating film, and including an upper electrode. A gap formed between the vibrating film and the fixed film opposed to each other forms an air gap. The restraining portion provides partial coupling between the semiconductor substrate and the vibrating film, and the vibrating film has a multilayer structure in which the lower electrode and a compressive stress inducing insulating film are laminated. The insulating film is located within the perimeter of the lower electrode.

    Abstract translation: MEMS器件包括:半导体衬底; 形成在所述半导体基板上的振动膜,具有介于所述振动膜和所述半导体基板之间的限制部分,并且包括下电极;以及固定膜,其形成在所述半导体基板上,所述固定膜插入在所述固定膜和所述半导体基板之间 以覆盖振动膜,并且包括上电极。 彼此相对的振动膜和固定膜之间形成的间隙形成气隙。 约束部分提供半导体衬底和振动膜之间的部分耦合,并且振动膜具有层叠下部电极和压缩应力诱导绝缘膜的多层结构。 绝缘膜位于下电极的周边内。

    Piezoelectric Actuator, Imaging Element Moving Device Using the Same, and Imaging Device Using the Same
    24.
    发明申请
    Piezoelectric Actuator, Imaging Element Moving Device Using the Same, and Imaging Device Using the Same 有权
    压电致动器,使用其的成像元件移动装置和使用其的成像装置

    公开(公告)号:US20070284968A1

    公开(公告)日:2007-12-13

    申请号:US11662916

    申请日:2005-10-18

    Inventor: Yusuke Takeuchi

    Abstract: To implement a piezoelectric actuator which can actuate a large object, such as an imaging element, in a predetermined direction at high power without involvement of rotational displacement; which can ensure a large amount of actuation; which is suitable for miniaturization and weight reduction; and which is advantageous in terms of mechanical durability and manufacturing cost. A piezoelectric actuator having a well-balanced mechanical structure is obtained by means of stacking a plurality of cross units, in each of which a pair of bimorph piezoelectric elements (21a and 21b, 21c and 21d) are crossed in the form of the letter X, into two layers (an even number of layers), and fixing the thus-stacked cross units. An imaging element 11 is stably supported by means of two movable ends (C-1, C-2) provided at the extremity of the piezoelectric actuator.

    Abstract translation: 实现能够以高功率在预定方向上致动诸如成像元件的大物体而不涉及旋转位移的压电致动器; 这可以确保大量的致动; 适合小型化,减轻重量; 并且在机械耐久性和制造成本方面是有利的。 通过堆叠多个交叉单元获得具有良好平衡机械结构的压电致动器,其中每个交叉单元中的一对双压电晶片压电元件(21a和21b,21c和21d)以 的字母X分成两层(偶数层),并固定如此堆叠的交叉单元。 通过设置在压电致动器的末端的两个可移动端(C-1,C-2)稳定地支撑成像元件11。

    Signal transmit-receive device, circuit, and loopback test method
    25.
    发明授权
    Signal transmit-receive device, circuit, and loopback test method 失效
    信号发射接收设备,电路和环回测试方法

    公开(公告)号:US07216269B2

    公开(公告)日:2007-05-08

    申请号:US10309886

    申请日:2002-12-05

    CPC classification number: H04B10/035 H04B10/071 H04L1/243

    Abstract: A signal transmit-receive device of the invention reduces the number of high-speed signal lines required for connecting a transmitting circuit group and a receiving circuit group, and for running a loopback test on a signal transmit-receive device. The loopback test circuit uses an error detecting circuit, a test signal producing circuit, and a wiring for transmitting error information. The error detecting circuit compares a test signal pattern defined in advance by a first communication device and a received signal pattern. The test signal producing circuit produces the test signal pattern based on error information. If an error is detected, the error signal is transmitted to the test signal producing circuit through the wiring. The test signal producing circuit produces a predetermined test signal pattern if the error signal DE has an L level; upon receiving H level, it sends back the predetermined test signal pattern to the first communication device.

    Abstract translation: 本发明的信号发送接收装置减少了连接发送电路组和接收电路组所需的高速信号线的数量,并且对信号发送接收装置进行环回测试。 环回测试电路使用错误检测电路,测试信号产生电路和用于发送错误信息的布线。 误差检测电路将预先由第一通信设备定义的测试信号模式与接收到的信号模式进行比较。 测试信号产生电路基于错误信息产生测试信号模式。 如果检测到错误,则误差信号通过布线传输到测试信号产生电路。 如果误差信号DE具有L电平,则测试信号产生电路产生预定的测试信号模式; 在接收到H电平后,将预定的测试信号模式发送回第一通信设备。

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